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1. 发明授权

US4951601A Multi-chamber integrated process system 失效
标题翻译：多室综合处理系统
公开(公告)号：US4951601A
公开(公告)日：1990-08-28
申请号：US371700
申请日：1989-06-23
申请人： Dan Maydan , Sasson Somekh , David N. Wang , David Cheng , Masato Toshima , Isaac Harari , Peter D. Hoppe
发明人： Dan Maydan , Sasson Somekh , David N. Wang , David Cheng , Masato Toshima , Isaac Harari , Peter D. Hoppe
IPC分类号： H01L21/00 , H01L21/677
CPC分类号： H01L21/67167 , H01L21/67184 , H01L21/67201 , H01L21/67742 , Y10S414/135 , Y10S414/137 , Y10S414/139
摘要： An integrated modular multiple chamber vacuum processing system is disclosed. The system includes a load lock, may include an external cassette elevator, and an internal load lock wafer elevator, and also includes stations about the periphery of the load lock for connecting one, two or several vacuum process chambers to the load lock chamber. A robot is mounted within the load lock and utilizes a concentric shaft drive system connected to an end effector via a dual four-bar link mechanism for imparting selected R-.theta. movement to the blade to load and unload wafers at the external elevator, internal elevator and individual process chambers. The system is uniquely adapted for enabling various types of IC processing including etch, deposition, sputtering and rapid thermal annealing chambers, thereby providing the opportunity for multiple step, sequential processing using different processes.
摘要翻译：公开了一种集成的模块化多室真空处理系统。该系统包括一个加载锁定，可以包括一个外部盒式电梯和一个内部装载锁定晶片升降机，并且还包括围绕负载锁的周边的站，用于将一个，两个或几个真空处理室连接到负载锁定室。机器人安装在装载锁中，并且利用同轴驱动系统，该系统通过双四杆连杆机构连接到末端执行器，用于将选定的Rθ运动传递给叶片，以在外部升降机，内部升降机和各个处理室。该系统独特地适用于实现各种类型的IC处理，包括蚀刻，沉积，溅射和快速热退火室，从而为使用不同工艺的多步骤顺序处理提供了机会。

2. 发明授权

US5292393A Multichamber integrated process system 失效
标题翻译：多室综合过程系统
公开(公告)号：US5292393A
公开(公告)日：1994-03-08
申请号：US808786
申请日：1991-12-16
申请人： Dan Maydan , Sasson Somekh , David N. Wang , David Cheng , Masato Toshima , Isaac Harari , Peter D. Hoppe
发明人： Dan Maydan , Sasson Somekh , David N. Wang , David Cheng , Masato Toshima , Isaac Harari , Peter D. Hoppe
IPC分类号： H01L21/00 , C23C16/00 , B65G1/06
CPC分类号： H01L21/67167 , H01L21/67201
摘要： An integrated modular multiple chamber vacuum processing system is disclosed. The system includes a load lock, may include an external cassette elevator, and an internal load lock wafer elevator, and also includes stations about the periphery of the load lock for connecting one, two or several vacuum process chambers to the load lock chamber. A robot is mounted within the load lock and utilizes a concentric shaft drive system connected to an end effector via a dual four-bar link mechanism for imparting selected R-.theta. movement to the blade to load and unload wafers at the external elevator, internal elevator and individual process chambers. The system is uniquely adapted for enabling various types of IC processing including etch, deposition, sputtering and rapid thermal annealing chambers, thereby providing the opportunity for multiple step, sequential processing using different processes.
摘要翻译：公开了一种集成的模块化多室真空处理系统。该系统包括一个加载锁定，可以包括一个外部盒式电梯和一个内部装载锁定晶片升降机，并且还包括围绕负载锁的周边的站，用于将一个，两个或几个真空处理室连接到负载锁定室。机器人被安装在装载锁中，并且利用通过双重四杆连杆机构连接到端部执行器的同心轴驱动系统，用于将选定的R（θ）运动传递到叶片以在外部升降机上加载和卸载晶片，内部电梯和各个处理室。该系统独特地适用于实现各种类型的IC处理，包括蚀刻，沉积，溅射和快速热退火室，从而为使用不同工艺的多步骤顺序处理提供了机会。

3. 发明授权

US5882165A Multiple chamber integrated process system 失效
标题翻译：多室综合处理系统
公开(公告)号：US5882165A
公开(公告)日：1999-03-16
申请号：US926568
申请日：1997-09-10
申请人： Dan Maydan , Sasson Somekh , David Nin-Kou Wang , David Cheng , Masato Toshima , Isaac Harari , Peter D. Hoppe
发明人： Dan Maydan , Sasson Somekh , David Nin-Kou Wang , David Cheng , Masato Toshima , Isaac Harari , Peter D. Hoppe
IPC分类号： H01L21/00 , H01L21/677 , C23C16/00
CPC分类号： H01L21/67161 , H01L21/67184 , H01L21/67201 , H01L21/67742 , H01L21/67745 , H01L21/67748
摘要： An integrated modular multiple chamber vacuum processing system is disclosed. The system includes a load lock, may include an external cassette elevator, and an internal load lock wafer elevator, and also includes stations about the periphery of the load lock for connecting one, two or several vacuum process chambers to the load lock chamber. A robot is mounted within the load lock and utilizes a concentric shaft drive system connected to an end effector via a dual four-bar link mechanism for imparting selected R--.THETA. movement to the blade to load and unload wafers at the external elevator, internal elevator and individual process chambers. The system is uniquely adapted for enabling various types of IC processing including etch, deposition, sputtering and rapid thermal annealing chambers, thereby providing the opportunity for multiple step, sequential processing using different processes.
摘要翻译：公开了一种集成的模块化多室真空处理系统。该系统包括一个加载锁定，可以包括一个外部盒式电梯和一个内部装载锁定晶片升降机，并且还包括围绕负载锁的周边的站，用于将一个，两个或几个真空处理室连接到负载锁定室。机器人被安装在装载锁中，并利用同轴的驱动系统，该系统通过双重四杆连杆机构连接到末端执行器，用于将选定的R-THETA运动传递给叶片，以在外部升降机，内部升降机和各个处理室。该系统独特地适用于实现各种类型的IC处理，包括蚀刻，沉积，溅射和快速热退火室，从而为使用不同工艺的多步骤顺序处理提供了机会。

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