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    • 6. 发明申请
    • Plasma Deposition of Amorphous Semiconductors at Microwave Frequencies
    • 微波频率下非晶半导体的等离子体沉积
    • US20120115274A1
    • 2012-05-10
    • US13355541
    • 2012-01-22
    • Stanford R OvshinskyDavid StrandPatrick KlersyBoil Pashmakov
    • Stanford R OvshinskyDavid StrandPatrick KlersyBoil Pashmakov
    • H01L31/18
    • C23C16/511C23C16/24C23C16/545H01L21/02425H01L21/02532H01L21/02592H01L21/0262
    • Apparatus and method for plasma deposition of thin film photovoltaic materials at microwave frequencies. The apparatus inhibits deposition on windows or other microwave transmission elements that couple microwave energy to deposition species. The apparatus includes a microwave applicator with conduits passing therethrough that carry deposition species. The applicator transfers microwave energy to the deposition species to transform them to a reactive state conducive to formation of a thin film material. The conduits physically isolate deposition species that would react to form a thin film material at the point of microwave power transfer. The deposition species are separately energized and swept away from the point of power transfer to prevent thin film deposition. The invention allows for the ultrafast formation of silicon-containing amorphous semiconductors that exhibit high mobility, low porosity, little or no Staebler-Wronski degradation, and low defect concentration.
    • 微波等离子体沉积薄膜光伏材料的设备和方法。 该装置抑制在将微波能量耦合到沉积物质的窗口或其它微波传输元件上的沉积。 该装置包括带有通过其的导管的微波施加器,其携带沉积物质。 施加器将微波能量传递到沉积物质以将它们转变成有助于形成薄膜材料的反应状态。 导管物理隔离在微波功率传递点反应以形成薄膜材料的沉积物质。 沉积物质分开通电并从功率传递点扫除,以防止薄膜沉积。 本发明允许超快速地形成显示高迁移率,低孔隙率,很少或没有Staebler-Wronski降解和低缺陷浓度的含硅非晶半导体。
    • 10. 发明授权
    • Method of operating a multi-terminal electronic device
    • 操作多终端电子设备的方法
    • US07529123B2
    • 2009-05-05
    • US11451740
    • 2006-06-13
    • Stanford R. OvshinskyBoil Pashmakov
    • Stanford R. OvshinskyBoil Pashmakov
    • G11C11/21
    • G11C13/0004H01L45/06H01L45/1206H01L45/1233H01L45/144
    • A method of operating a multi-terminal electronic device. The device includes an active material in electrical communication with three or more electrical terminals. The active material is able to undergo a transformation from one state to another state, where the two states differ in resistance. The method includes the step of providing energy between one pair of terminals of the device, where the provided energy effects a change in the state of the active material adjacent to one or more other terminals of the device. In one embodiment, energy is applied between a first terminal and a second terminal of a three-terminal device and the state of the active material adjacent to the third terminal is altered. In one embodiment, energy is applied in the form of electrical energy and the active material is a phase change material that undergoes a transformation from one structural state to another structural state. The two structural states may include different volume fractions of a crystalline phase and an amorphous phase.
    • 一种操作多终端电子设备的方法。 该装置包括与三个或更多个电气端子电连通的活性材料。 活性材料能够经历从一个状态到另一个状态的转变,其中两个状态的阻力不同。 该方法包括在设备的一对端子之间提供能量的步骤,其中所提供的能量影响与设备的一个或多个其他端子相邻的活性材料的状态的变化。 在一个实施例中,能量被施加在三端子装置的第一端子和第二端子之间,并且与第三端子相邻的活性材料的状态被改变。 在一个实施例中,能量以电能的形式施加,并且活性材料是经历从一个结构状态到另一个结构状态的转变的相变材料。 两个结构状态可以包括结晶相和非晶相的不同体积分数。