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    • 1. 发明申请
    • METHODS OF FABRICATING SEMICONDUCTOR DEVICES HAVING DOUBLE-LAYERED BLOCKING INSULATING LAYERS
    • 制备具有双层隔离绝缘层的半导体器件的方法
    • US20150155297A1
    • 2015-06-04
    • US14315906
    • 2014-06-26
    • Dae-hong EOMDong-Chul YOOKyung-Hyun KIMKi-Hyun HWANG
    • Dae-hong EOMDong-Chul YOOKyung-Hyun KIMKi-Hyun HWANG
    • H01L27/115
    • H01L27/11582H01L29/40117H01L29/66833H01L29/7926
    • Provided is a method of fabricating a semiconductor memory device. The method includes alternately stacking interlayer insulating layers and sacrificial layers on a substrate, forming a channel hole exposing the substrate through the interlayer insulating layers and the sacrificial layers, sequentially forming a blocking insulating layer, an electric charge storage layer and a channel layer on a substrate exposed on a sidewall of the channel hole and in the channel hole wherein the blocking insulating layer includes a first blocking insulating layer and a second blocking insulating layer, selectively removing the sacrificial layers to expose the first blocking insulating layer and then forming a gap, removing the first blocking insulating layer exposed in the gap, forming first blocking insulating patterns between the interlayer insulating layers and the second blocking insulating layer, and forming a gate electrode in the gap.
    • 提供一种制造半导体存储器件的方法。 该方法包括在衬底上交替堆叠层间绝缘层和牺牲层,形成通过层间绝缘层和牺牲层暴露衬底的沟道孔,在其上依次形成阻挡绝缘层,电荷存储层和沟道层 衬底暴露在通道孔的侧壁和通道孔中,其中阻挡绝缘层包括第一阻挡绝缘层和第二阻挡绝缘层,选择性地去除牺牲层以暴露第一阻挡绝缘层,然后形成间隙, 去除在所述间隙中暴露的所述第一阻挡绝缘层,在所述层间绝缘层和所述第二阻挡绝缘层之间形成第一阻挡绝缘图案,以及在所述间隙中形成栅电极。
    • 2. 发明申请
    • DECISION FEEDBACK EQUALIZER (DFE) CIRCUITS FOR USE IN A SEMICONDUCTOR MEMORY DEVICE AND INITIALIZING METHOD THEREOF
    • 用于半导体存储器件的决策反馈均衡器(DFE)电路及其初始化方法
    • US20090175328A1
    • 2009-07-09
    • US12261814
    • 2008-10-30
    • Kyung-Hyun KIMYongsam MOON
    • Kyung-Hyun KIMYongsam MOON
    • H03H7/30
    • G11C7/20G11C7/02G11C7/1006G11C7/1078G11C7/1084G11C27/02
    • A DFE circuit for use in a semiconductor memory device and an initializing method thereof. In the method of initializing a DFE circuit used in a semiconductor memory device having a discontinuous data transmission, the DFE circuit may be used for changing a sampling reference level in response to a level of previous data and sampling transmission data. The method includes terminating a data channel having a transmission of the transmission data at a predefined termination level, and controlling a sampling start time point of the transmission data as a time point preceding a transmission time point of the transmission data by a predefined time. Further, an initialization may be performed of the previous data on the basis of initialization data obtained through a pre-sampling of the data channel at a sampling start time point of the transmission data, thereby obtaining an initialization of the DFE circuit and compensating for a feedback delay.
    • 一种用于半导体存储器件的DFE电路及其初始化方法。 在具有不连续数据传输的半导体存储器件中使用的DFE电路的初始化方法中,DFE电路可以用于响应于先前数据的电平和采样发送数据来改变采样基准电平。 该方法包括终止在预定的终止级别具有传输数据的传输的数据信道,并且将传输数据的采样开始时间点控制在传输数据的传输时间点之前的时间点预定的时间。 此外,可以基于在发送数据的采样开始时间点通过数据信道的预采样获得的初始化数据来执行先前数据的初始化,从而获得DFE电路的初始化并补偿 反馈延迟。