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1. 发明申请

US20160271835A1 CUTTING APPARATUS 审中-公开
标题翻译：切割装置
公开(公告)号：US20160271835A1
公开(公告)日：2016-09-22
申请号：US15072679
申请日：2016-03-17
申请人： DISCO CORPORATION
发明人： Takuya Kato , Takeomi Fukuoka
IPC分类号： B28D5/02 , B28D5/00 , H01L21/67 , B23Q11/08
CPC分类号： B28D5/024 , B23Q11/0816 , B28D5/0076 , H01L21/67092 , H01L24/97 , H01L2924/181 , H01L2924/00012
摘要： A cutting apparatus includes a holding table for holding a workpiece, a feeding unit for moving the holding table in a feeding direction, first and second bellows connected to opposite ends of the holding table in the feeding direction, each of the bellows having an upper wall and opposite side walls adapted to be expanded and contracted for covering the feeding unit, a pair of drain channels provided along the sides of both bellows for receiving cutting water used in cutting the workpiece, and a scrap receptacle provided at the downstream end of the first bellows in the feeding direction for receiving scraps generated from the workpiece in cutting the workpiece. The cutting apparatus further includes a pair of fall prevention plates provided along the pair of drain channels for preventing scraps scattered onto the upper wall of the first bellows from falling into the drain channels.
摘要翻译：一种切割装置，包括：用于保持工件的保持台，用于沿进给方向移动保持台的进给单元，沿着进给方向连接到保持台的相对端的第一和第二波纹管，每个波纹管具有上壁以及适于膨胀和收缩以覆盖进给单元的相对侧壁，沿着两个波纹管的侧面设置的一对排水通道，用于接收用于切割工件的切割水;以及废料容器，设置在第一沿进给方向的波纹管，用于在切割工件时接收从工件产生的废料。切割装置还包括沿着该对排水通道设置的一对防坠落板，用于防止分散在第一波纹管的上壁上的碎屑落入排水通道。

2. 发明授权

US11794357B2 Processing apparatus 有权
公开(公告)号：US11794357B2
公开(公告)日：2023-10-24
申请号：US17094160
申请日：2020-11-10
申请人： DISCO CORPORATION
发明人： Takeomi Fukuoka
IPC分类号： B25J15/06 , B25B11/00 , B23D49/00
CPC分类号： B25J15/065 , B23D49/007 , B25B11/005 , B25J15/0683
摘要： A processing apparatus includes a table base to which a jig table is removably secured, a cutting unit, a moving assembly for moving the table base between a processing area and a mounting/dismounting area, and a delivery assembly for delivering the jig table from a temporary rest area onto the table base while applying a negative pressure to a second suction channel of the jig table. The delivery assembly includes a pair of grippers for gripping both sides of the jig table, a suction pipe connected to the second suction channel of the jig table that is gripped by the grippers, and a lifting and lowering unit for positioning the suction pipe selectively in an operative position where the suction pipe is connected to the second suction channel and a lifted position where the suction pipe is spaced from the second suction channel.

3. 发明授权

US11173631B2 Cutting apparatus 有权
公开(公告)号：US11173631B2
公开(公告)日：2021-11-16
申请号：US16442824
申请日：2019-06-17
申请人： DISCO CORPORATION
发明人： Takeomi Fukuoka
IPC分类号： B28D5/00 , B28D5/02 , H01L21/673 , H01L21/677
摘要： A cutting apparatus includes a cutting unit cutting a workpiece held on a chuck table, a processing-feed unit moving the chuck table, a moving unit moving the cutting unit, and a delivery pad delivering the workpiece to be cut to the chuck table and delivering the workpiece that has been cut on the chuck table. The delivery pad is mountable on and detachable from the moving unit, holds the workpiece under suction while being mounted on the moving unit, and delivers the workpiece by being moved by the moving unit while holding the workpiece under suction.

4. 发明授权

US10297488B2 Workpiece support jig 有权
公开(公告)号：US10297488B2
公开(公告)日：2019-05-21
申请号：US15245977
申请日：2016-08-24
申请人： DISCO CORPORATION
发明人： Takeomi Fukuoka
IPC分类号： B28D5/00 , B28D5/02 , H01L21/683
摘要： A workpiece support jig includes a support plate supporting a workpiece on a first surface while covering a support surface of a chuck table with a second surface opposite to the first surface and a retainer plate including an area sufficient to cover the whole of the workpiece and sandwiching the workpiece, held on the first surface of the support plate, between the support plate and itself. The support plate includes a plurality of groove parts corresponding to projected division lines of the supported workpiece and a plurality of through holes formed in chip-holding regions demarcated and divided by the intersecting groove parts. When the workpiece divided by a processing unit into chips is unloaded from the chuck table, the workpiece is unloaded while being sandwiched between the support plate and the retainer plate.

5. 发明申请

US20170076971A1 WORKPIECE SUPPORT JIG 审中-公开
标题翻译：工作支持大
公开(公告)号：US20170076971A1
公开(公告)日：2017-03-16
申请号：US15245977
申请日：2016-08-24
申请人： DISCO CORPORATION
发明人： Takeomi Fukuoka
IPC分类号： H01L21/683 , B28D5/00 , B28D5/02
CPC分类号： H01L21/6838 , B28D5/0094 , B28D5/023 , B28D5/024 , H01L21/67346 , H01L21/6835 , H01L2221/68327
摘要： A workpiece support jig includes a support plate supporting a workpiece on a first surface while covering a support surface of a chuck table with a second surface opposite to the first surface and a retainer plate including an area sufficient to cover the whole of the workpiece and sandwiching the workpiece, held on the first surface of the support plate, between the support plate and itself. The support plate includes a plurality of groove parts corresponding to projected division lines of the supported workpiece and a plurality of through holes formed in chip-holding regions demarcated and divided by the intersecting groove parts. When the workpiece divided by a processing unit into chips is unloaded from the chuck table, the workpiece is unloaded while being sandwiched between the support plate and the retainer plate.
摘要翻译：工件支撑夹具包括：在第一表面上支撑工件的支撑板，同时覆盖具有与第一表面相对的第二表面的卡盘台的支撑表面;以及保持板，该保持板包括足以覆盖整个工件并夹持保持在支撑板的第一表面上的工件在支撑板和本身之间。支撑板包括对应于被支撑工件的投影分割线的多个凹槽部分和形成在由交叉凹槽部分划分和划分的芯片保持区域中的多个通孔。当将由加工单元划分成切屑的工件从卡盘卸载时，工件在夹持在支撑板和保持板之间时被卸载。

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