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1. 发明授权

US09631745B2 Processing apparatus for guiding workpiece using bellows with floating means 有权
公开(公告)号：US09631745B2
公开(公告)日：2017-04-25
申请号：US14549852
申请日：2014-11-21
申请人： DISCO CORPORATION
发明人： Shinichi Fujisawa , Toshifumi Matsuyama , Jun Suwano
IPC分类号： B23Q5/34 , F16L11/11 , B23Q11/08 , H01L21/67 , H01L21/677
CPC分类号： F16L11/11 , B23Q11/0816 , H01L21/67092 , H01L21/67709
摘要： A processing apparatus including an expansible and contractable bellows unit mounted on a workpiece holding unit for covering an area of movement of the workpiece holding unit in a feeding direction and a guide unit for guiding the expansion and contraction of the bellows unit in the feeding direction. The guide unit has an opening for allowing the movement of the workpiece holding unit in the feeding direction and a gutter extending in the feeding direction adjacent to the opening. The bellows unit has a bellows member having one end connected to the workpiece holding unit and the other end connected to the guide unit. The processing apparatus further includes a floating unit for floating the bellows member along the gutter of the guide unit in a noncontact manner.

2. 发明授权

US11027225B2 Waste liquid treating apparatus 有权
公开(公告)号：US11027225B2
公开(公告)日：2021-06-08
申请号：US16857443
申请日：2020-04-24
申请人： DISCO CORPORATION
发明人： Jun Suwano , Takeshi Furonaka
IPC分类号： B01D21/02 , B01D21/00 , B01D21/24
摘要： A sedimenting assembly for sedimenting debris contained in a processed waste liquid in a sedimentation tank includes a plurality of partition plates extending vertically across a direction in which the processed waste liquid flows and disposed at spaced intervals in the direction, thereby defining a zigzag channel through which the processed waste liquid flows horizontally. The zigzag channel ensures a time during which to sediment the debris against a time during which the processed waste liquid flows through the zigzag channel, allowing the debris to settle reliably.

3. 发明授权

US11618698B2 Waste fluid treatment apparatus and processing water regeneration system 有权
公开(公告)号：US11618698B2
公开(公告)日：2023-04-04
申请号：US17116352
申请日：2020-12-09
申请人： DISCO CORPORATION
发明人： Kenji Takenouchi , Hiroyuki Kashiwagi , Jun Suwano
IPC分类号： C02F1/66 , C02F1/68 , C02F1/32 , C02F1/42 , B01D21/00 , C02F103/34 , C02F1/00
摘要： A waste fluid treatment apparatus includes a sedimentation tank that stores the processing waste fluid with the processing debris contained therein, an inflow port provided on the sedimentation tank for introduction of the processing waste fluid into the sedimentation tank, an acidification unit configured to acidify the processing waste fluid to be introduced from the inflow port into the sedimentation tank, whereby the processing debris is allowed to settle at a higher rate compared with a rate at which the processing debris would settle if the processing waste water is neutral, and an outflow port provided on the sedimentation tank for discharge of acidic supernatant that is obtained by allowing the processing debris in the processing waste fluid to settle in the sedimentation tank from the sedimentation tank.

4. 发明申请

US20150151396A1 PROCESSING APPARATUS 有权
标题翻译：加工设备
公开(公告)号：US20150151396A1
公开(公告)日：2015-06-04
申请号：US14549852
申请日：2014-11-21
申请人： DISCO CORPORATION
发明人： Shinichi Fujisawa , Toshifumi Matsuyama , Jun Suwano
IPC分类号： B23Q5/34 , F16L11/11
CPC分类号： F16L11/11 , B23Q11/0816 , H01L21/67092 , H01L21/67709
摘要： A processing apparatus including an expansible and contractable bellows unit mounted on a workpiece holding unit for covering an area of movement of the workpiece holding unit in a feeding direction and a guide unit for guiding the expansion and contraction of the bellows unit in the feeding direction. The guide unit has an opening for allowing the movement of the workpiece holding unit in the feeding direction and a gutter extending in the feeding direction adjacent to the opening. The bellows unit has a bellows member having one end connected to the workpiece holding unit and the other end connected to the guide unit. The processing apparatus further includes a floating unit for floating the bellows member along the gutter of the guide unit in a noncontact manner.
摘要翻译：一种加工设备，包括可扩张和可收缩的波纹管单元，其安装在工件保持单元上，用于覆盖工件保持单元在进给方向上的运动区域和用于引导波纹管单元沿进给方向的膨胀和收缩的引导单元。引导单元具有用于允许工件保持单元沿供给方向移动的开口和沿着与开口相邻的进给方向延伸的沟槽。波纹管单元具有波纹管构件，其一端连接到工件保持单元，另一端连接到引导单元。该处理装置还包括浮动单元，用于以不接触的方式沿着引导单元的沟槽浮动波纹管构件。

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