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1. 发明申请

US20130249648A1 HBAR Resonator Comprising A Structure For Amplifying The Amplitude Of At Least One Resonance Of Said Resonator And Methods For Producing Such A Resonator 有权
标题翻译：包含用于放大所述谐振器的至少一个谐振的振幅的结构的HBAR谐振器和用于产生这样的谐振器的方法
公开(公告)号：US20130249648A1
公开(公告)日：2013-09-26
申请号：US13847432
申请日：2013-03-19
申请人： Commissariat A L'Energie Atomique Et Aux Energies Alternatives , CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
发明人： Alexandre Reinhardt , Sylvain Ballandras , Francois Perruchot
IPC分类号： H03H9/17 , H03H3/04
CPC分类号： H03H9/17 , H03H3/04 , H03H9/02078 , H03H9/172 , Y10T29/42
摘要： An HBAR resonator comprises, on a substrate, a piezoelectric transducer, said transducer comprising at least one piezoelectric layer, at least two series of electrodes and exhibiting resonance frequencies Fi corresponding to wavelengths λi, characterized in that it comprises an amplification structure comprising at least one resonant cavity arranged on the substrate between said transducer and said substrate or in said substrate, this amplification structure being suitable for mechanically resonating at least one of the resonance frequencies Fi of said transducer corresponding to said wavelength λi, so as to amplify the amplitude of the electrical resonance generated at said frequency.
摘要翻译：一种HBAR谐振器在衬底上包括压电换能器，所述换能器包括至少一个压电层，至少两个串联的电极，并且具有对应于波长lambdai的谐振频率Fi，其特征在于，其包括放大结构，该放大结构包括至少一个谐振腔，其布置在所述传感器和所述衬底之间或所述衬底中的衬底上，所述放大结构适用于使所述换能器的至少一个谐振频率Fi对应于所述波长lambdai，以便放大所述振荡器的振幅在所述频率下产生的电共振。

2. 发明授权

US09099984B2 HBAR resonator comprising a structure for amplifying the amplitude of at least one resonance of said resonator and methods for producing such a resonator 有权
标题翻译： HBAR谐振器包括用于放大所述谐振器的至少一个谐振的振幅的结构和用于产生这种谐振器的方法
公开(公告)号：US09099984B2
公开(公告)日：2015-08-04
申请号：US13847432
申请日：2013-03-19
申请人： Commissariat A l'Energie Atomique et Aux Energies Alternatives , Centre National de la Recherche Scientifique
发明人： Alexandre Reinhardt , Sylvain Ballandras , Francois Perruchot
IPC分类号： H03H9/00 , H01L41/09 , H03H9/17 , H03H9/02 , H03H3/04
CPC分类号： H03H9/17 , H03H3/04 , H03H9/02078 , H03H9/172 , Y10T29/42
摘要： An HBAR resonator comprises, on a substrate, a piezoelectric transducer, said transducer comprising at least one piezoelectric layer, at least two series of electrodes and exhibiting resonance frequencies Fi corresponding to wavelengths λi, characterized in that it comprises an amplification structure comprising at least one resonant cavity arranged on the substrate between said transducer and said substrate or in said substrate, this amplification structure being suitable for mechanically resonating at least one of the resonance frequencies Fi of said transducer corresponding to said wavelength λi, so as to amplify the amplitude of the electrical resonance generated at said frequency.
摘要翻译： HBAR谐振器在衬底上包括压电换能器，所述换能器包括至少一个压电层，至少两个电极系列，并且具有对应于波长λ1的谐振频率Fi，其特征在于，其包括放大结构，该放大结构包括至少一个谐振腔，其布置在所述传感器和所述衬底之间或所述衬底中的衬底上，该放大结构适用于对应于所述波长λi的所述换能器的谐振频率Fi中的至少一个谐振频率Fi进行机械共振，以便放大在所述频率下产生的电共振。

3. 发明授权

US10270420B2 Surface elastic wave device comprising a single-crystal piezoelectric film and a crystalline substrate with low visoelastic coefficients 有权
公开(公告)号：US10270420B2
公开(公告)日：2019-04-23
申请号：US15060356
申请日：2016-03-03
申请人： COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
发明人： Sébastien Grousset , Sylvain Ballandras
IPC分类号： H03H9/02 , H03H9/17 , H03H9/54 , H03H3/04
摘要： A surface elastic wave device comprises a stack including: a thin film made of a piezoelectric first material; a substrate made from a second material; and exciting means for generating at least one surface acoustic wave propagation mode in the piezoelectric film; wherein: the first material is a single-crystal material and the second material is a crystalline material, the thickness of the thin film of piezoelectric first material being smaller than or equal to 20 μm, and the first material and the second material having viscoelastic coefficients lower than or equal to those of quartz for the propagation mode induced by the exciting means.

4. 发明授权

US09360378B2 Electrical device and method for producing same 有权
标题翻译：电气装置及其制造方法
公开(公告)号：US09360378B2
公开(公告)日：2016-06-07
申请号：US14395467
申请日：2013-04-03
申请人： CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (C.N.R.S.) , UNIVERSITE DE FRANCHE-COMTE
发明人： Sylvain Ballandras , Bruno Francois
IPC分类号： H05K7/00 , G01K11/26 , H05K1/02 , B23K1/00 , H05K1/18 , H05K3/28 , H05K1/03 , H05K1/05 , H05K3/10 , H05K3/34
CPC分类号： G01K11/265 , B23K1/0016 , B23K2101/38 , H01L2224/45014 , H01L2224/45147 , H01L2224/45169 , H01L2224/48091 , H01L2224/8592 , H01L2924/181 , H05K1/0293 , H05K1/0306 , H05K1/053 , H05K1/181 , H05K3/103 , H05K3/285 , H05K3/3426 , H05K2201/1006 , H05K2201/10068 , H05K2201/10075 , H05K2201/10083 , H05K2201/10098 , H05K2201/10151 , H05K2201/1028 , H05K2201/10287 , H05K2201/10977 , H05K2203/049 , Y02P70/611 , H01L2924/00014 , H01L2924/00012
摘要： An electrical device includes a first electrical component and a second electrical component connected to each other via an electrical connection having an electrically insulating support plate and a weld joint deposited on the support plate. The weld joint has a melting temperature (Ta) significantly lower than an ambient operating temperature (Ta) to which at least one of the two electrical components and the electrical connection are subjected. The electrical device includes cement that completely covers the exposed weld joint. The material of the cement is chosen to maintain its adhesion and its tightness with respect to the weld joint when the Ta is applied.
摘要翻译：电气设备包括通过电连接彼此连接的第一电气部件和第二电气部件，该电气连接具有电绝缘支撑板和沉积在支撑板上的焊接接头。焊接接头具有明显低于两个电气部件和电连接中的至少一个所承受的环境工作温度（Ta）的熔化温度（Ta）。电气设备包括完全覆盖暴露的焊接接头的水泥。当施加Ta时，选择水泥的材料以保持其粘合性和相对于焊接接头的密封性。

5. 发明授权

US09666786B2 Volume wave resonators on micromachined vertical structures 有权
公开(公告)号：US09666786B2
公开(公告)日：2017-05-30
申请号：US14349347
申请日：2012-10-05
申请人： CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (C.N.R.S.) , UNIVERSITE DE FRANCHE-COMTE , ECOLE NATIONALE SUPERIEURE DE MECANIQUE ET DES MICROTECHNIQUES
发明人： Sylvain Ballandras , Gwenn Ulliac , Blandine Edouard-Guichardaz , Thomas Baron , Jean-Yves Rauch
IPC分类号： H01L41/08 , H03H9/02 , H03H3/04 , H03H9/13 , H03H9/17 , H01L41/047 , H01L41/18
CPC分类号： H01L41/08 , H01L41/0477 , H01L41/18 , H03H3/04 , H03H9/02157 , H03H9/13 , H03H9/17 , H03H2003/045 , Y10T29/42
摘要： A bulk wave piezoelectric resonator operating at a predetermined frequency includes a substrate block, having a plane face, a first thickness and consisting of a first material, a resonant plate having a length, width and second thickness, and consisting of a second piezoelectric material, first and second metal electrodes at least partly covering the resonant plate on each side and partly facing each other. The resonant plate is fixed perpendicularly in the vicinity of the plane face of the substrate block so that the width of the resonant plate and the first thickness of the substrate block have the same direction, and the first material, the second material, the first thickness of the block of substrate, the length, the width, the second thickness of the resonant plate are configured for trapping bulk waves at the operating frequency of the resonator and for producing a plane-plane type bulk wave piezoelectric resonator.

6. 发明申请

US20140292155A1 ELECTRO-ACOUSTIC TRANSDUCER WITH PERIODIC FERROELECTRIC POLARIZATION PRODUCED ON A MICROMACHINED VERTICAL STRUCTURE 有权
标题翻译：具有周期性电磁极化的电声传感器，采用MICROMACHINED垂直结构
公开(公告)号：US20140292155A1
公开(公告)日：2014-10-02
申请号：US14349579
申请日：2012-10-05
申请人： UNIVERSITE DE FRANCHE-COMTE , CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (C.N.R.S.)
发明人： Sylvain Ballandras , Gwenn Ulliac , Blandine Edouard-Guichardaz , Florent Bassignot , Emilie Courjon
IPC分类号： H03H9/17
CPC分类号： H03H9/177 , H03H3/04 , H03H9/02157 , H03H9/13 , H03H9/178 , Y10T29/42
摘要： A piezoelectric and ferroelectric bulk wave transducer operating at a predetermined frequency includes a block of substrate, having a first thickness and in a first material, and a piezoelectric and ferroelectric transduction plate, having a length, a width and a second thickness, and in a second piezoelectric material, first and second metal electrodes covering the plate in the direction of the length thereof. The plate has first and second ferroelectric domains with alternating polarizations, distributed along the length of the plate according to a periodic pattern of pitch. The plate is attached perpendicularly to the block so that the width of the plate and the first thickness of the block are the same direction. The first and second material, the first thickness of the block, the length, the width, the second thickness, the pitch of the plate are configured for generating and trapping bulk waves at the operating frequency of the transducer, guided between both electrodes.
摘要翻译：以预定频率工作的压电和铁电体波传感器包括具有第一厚度和第一材料的基片块，以及具有长度，宽度和第二厚度的压电和铁电转导板，第二压电材料，在其长度方向上覆盖板的第一和第二金属电极。板具有交替极化的第一和第二铁电畴，根据间距的周期性图案沿着板的长度分布。板垂直于块体连接，使得板的宽度和块的第一厚度是相同的方向。第一和第二材料，块的第一厚度，长度，宽度，第二厚度，板的间距被配置为在两个电极之间引导的在换能器的工作频率处产生和捕获体波。

7. 发明授权

US09843304B2 Transducer with bulk waves surface-guided by synchronous excitation structures 有权
公开(公告)号：US09843304B2
公开(公告)日：2017-12-12
申请号：US14436455
申请日：2013-10-09
申请人： CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (C.N.R.S.) , UNIVERSITE DE FRANCHE-COMTE
发明人： Sylvain Ballandras , Viktor Plesski
IPC分类号： H03H9/17 , H03H9/19 , H01L41/047 , H01L41/107 , H03H9/25 , H03H9/02
CPC分类号： H03H9/19 , H01L41/047 , H01L41/107 , H03H9/02228 , H03H9/171 , H03H9/25
摘要： A surface-guided bulk wave transducer includes a stack of an acoustic substrate, an electric ground plane, and a network of synchronous acoustic excitation sources with two combs of elementary piezoelectric transducers alternately interlaced two-by-two according to a periodic network step corresponding to a propagation mode of a surface-guided bulk wave of the acoustic substrate. Each elementary piezoelectric transducer includes a single and different rod with a parallelepipedal shape for which the nature, the cut of the piezoelectric material, the height h, and the width are selected for increasing the electromechanical coupling coefficient of the transducer assembly to a high level.

8. 发明授权

US09496847B2 Electro-acoustic transducer with periodic ferroelectric polarization produced on a micromachined vertical structure 有权
标题翻译：在微机械垂直结构上产生的具有周期性铁电极化的电声换能器
公开(公告)号：US09496847B2
公开(公告)日：2016-11-15
申请号：US14349579
申请日：2012-10-05
申请人： CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (C.N.R.S) , UNIVERSITE DE FRANCHE-COMTE
发明人： Sylvain Ballandras , Gwenn Ulliac , Blandine Edouard-Guichardaz , Florent Bassignot , Emilie Courjon
IPC分类号： H03H9/17 , H03H3/04 , H03H9/02 , H03H9/13
CPC分类号： H03H9/177 , H03H3/04 , H03H9/02157 , H03H9/13 , H03H9/178 , Y10T29/42
摘要： A piezoelectric and ferroelectric bulk wave transducer operating at a predetermined frequency includes a block of substrate, having a first thickness and in a first material, and a piezoelectric and ferroelectric transduction plate, having a length, a width and a second thickness, and in a second piezoelectric material, first and second metal electrodes covering the plate in the direction of the length thereof. The plate has first and second ferroelectric domains with alternating polarizations, distributed along the length of the plate according to a periodic pattern of pitch. The plate is attached perpendicularly to the block so that the width of the plate and the first thickness of the block are the same direction. The first and second material, the first thickness of the block, the length, the width, the second thickness, the pitch of the plate are configured for generating and trapping bulk waves at the operating frequency of the transducer, guided between both electrodes.
摘要翻译：以预定频率工作的压电和铁电体波传感器包括具有第一厚度和第一材料的基片块，以及具有长度，宽度和第二厚度的压电和铁电转导板，第二压电材料，在其长度方向上覆盖板的第一和第二金属电极。板具有交替偏振的第一和第二铁电畴，根据间距的周期性图案沿着板的长度分布。板垂直于块体连接，使得板的宽度和块的第一厚度是相同的方向。第一和第二材料，块的第一厚度，长度，宽度，第二厚度，板的间距被配置为在两个电极之间引导的在换能器的工作频率处产生和捕获体波。

9. 发明申请

US20140300246A1 VOLUME WAVE RESONATOR USING EXCITATION/DETECTION OF VIBRATIONS 有权
标题翻译：使用振动/振动检测的波浪谐振器
公开(公告)号：US20140300246A1
公开(公告)日：2014-10-09
申请号：US14131341
申请日：2012-07-06
申请人： CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (C.N.R.S.) , ECOLE NATIONALE SUPERIEURE DE MECANIQUE ET DE MICROTECHNIQUE , UNIVERSITE DE FRANCHE-COMTE
发明人： Bernard Dulmet , Mihaela Ivan , Sylvain Ballandras
IPC分类号： H03H9/24
CPC分类号： H03H9/2405 , B06B1/0292 , H03H9/02259 , H03H9/02409 , H03H9/174 , H03H9/2463
摘要： The invention relates to an acoustic volume wave resonator configured to resonate at a predetermined work frequency comprising: a mounting (12), comprising a first surface (14) and a second surface (16), a resonating substrate (18), comprising a first surface (20) and a second surface (22), and a diaphragm (24) rigidly connecting the second surface (16) of the mounting on the one hand and the first surface (20) of the resonating substrate on the other hand, The mounting comprises an internal cavity (28) and an internal electrode (32), so as to form a gap area (34) between the internal electrode (24) and a portion (35) of the diaphragm.The resonating substrate is configured to generate, between its first surface and its second surface, longitudinal mode acoustic waves vibrating at the work frequency of the resonator, when an electrostatic field having a sinusoidal component at the work frequency is generated in the gap area by applying a differential voltage between the diaphragm or the first surface of the resonating substrate on the one hand and the internal electrode on the other hand.
摘要翻译：本发明涉及一种配置成以预定工作频率谐振的声体积波谐振器，包括：安装件（12），包括第一表面（14）和第二表面（16），谐振基板（18），包括第一表面（20）和第二表面（22）以及另一方面将固定装置的第二表面（16）与谐振基板的第一表面（20）刚性连接的隔膜（24）安装包括内部空腔（28）和内部电极（32），以在内部电极（24）和隔膜的一部分（35）之间形成间隙区域（34）。谐振衬底被构造成在其第一表面和第二表面之间产生在谐振器的工作频率下振动的纵向模式的声波，当通过施加在间隙区域中产生在工作频率处具有正弦分量的静电场时另一方面，隔膜或谐振基板的第一表面与内部电极之间的差分电压。

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