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    • 5. 发明授权
    • Apparatus and method for controlling inverter
    • 控制逆变器的装置及方法
    • US07881080B2
    • 2011-02-01
    • US12088542
    • 2006-12-28
    • Sung-Min ParkTae-Kyung Kim
    • Sung-Min ParkTae-Kyung Kim
    • H02M1/12H02M1/14
    • H02P23/03H02P2205/01
    • An apparatus and method for controlling an inverter capable of enhancing reliability of current measurement by ensuring an optimal time for which effective voltage vectors are applied to detect a three-phase current according to a phase current and sizes of the effective voltage vectors, the apparatus comprising a space voltage modulator that generates and outputs effective voltage vectors based upon a voltage command value, and a low modulation determiner that determines whether the effective voltage vectors are located within a low modulation region, and outputs a low modulation switching control signal or a normal modulation switching control signal according to the determination.
    • 一种用于控制逆变器的装置和方法,其能够通过确保施加有效电压矢量的最佳时间来根据有效电压矢量的相电流和大小检测三相电流来提高电流测量的可靠性,该装置包括 空间电压调制器,其基于电压指令值产生并输出有效电压矢量;以及低调制确定器,其确定有效电压矢量是否位于低调制区域内,并输出低调制切换控制信号或正常调制 切换控制信号根据确定。
    • 7. 发明申请
    • Apparatus and Method for Controlling Inverter
    • 逆变器控制装置及方法
    • US20080225561A1
    • 2008-09-18
    • US12088542
    • 2006-12-28
    • Sung-Min ParkTae-Kyung Kim
    • Sung-Min ParkTae-Kyung Kim
    • H02M7/44
    • H02P23/03H02P2205/01
    • An apparatus and method for controlling an inverter capable of enhancing reliability of current measurement by ensuring an optimal time for which effective voltage vectors are applied to detect a three-phase current according to a phase current and sizes of the effective voltage vectors, the apparatus comprising a space voltage modulator that generates and outputs effective voltage vectors based upon a voltage command value, and a low modulation determiner that determines whether the effective voltage vectors are located within a low modulation region, and outputs a low modulation switching control signal or a normal modulation switching control signal according to the determination.
    • 一种用于控制逆变器的装置和方法,其能够通过确保施加有效电压矢量的最佳时间来根据有效电压矢量的相电流和大小检测三相电流来提高电流测量的可靠性,该装置包括 空间电压调制器,其基于电压指令值产生并输出有效电压矢量;以及低调制确定器,其确定有效电压矢量是否位于低调制区域内,并输出低调制切换控制信号或正常调制 切换控制信号根据确定。
    • 10. 发明申请
    • MULTI INDUCTIVELY COUPLED PLASMA REACTOR AND METHOD THEREOF
    • 多电感耦合等离子体反应器及其方法
    • US20110204023A1
    • 2011-08-25
    • US12715522
    • 2010-03-02
    • No-Hyun HuhGyoo-Dong KimChang-Woo NamSung-Min ParkDae-Kyu Choi
    • No-Hyun HuhGyoo-Dong KimChang-Woo NamSung-Min ParkDae-Kyu Choi
    • C23F1/00C23F1/08
    • H01J37/32165H01J37/321H01J37/3211H01J37/32449
    • Disclosed is a multi-inductively coupled plasma reactor and method thereof. In a multi-inductively coupled plasma reacting method, an etching method to increase a specific portion of a substrate to be processed includes etching a specific portion of a substrate to be processed; and depositing a passivation layer on a surface of the specific portion etched, wherein the etching and depositing steps are repeatedly proceeded, and one of both steps is executed when there is plasma formed by a central plasma source and a peripheral plasma source. According to the multi-inductively coupled plasma reactor and method thereof of the invention, it is possible that plasma is uniformly processed on the entire area of the substrate since the central plasma source and the peripheral source are provided separately. Further, it is possible to form an independent multiple plasma area without electrical interference in the plasma reactor using the interference prevention electrode grounded between the central plasma source and the peripheral plasma source. Further, the plasma formed by the central plasma source and the peripheral plasma source is used to deeply etch a specific portion of the substrate to be processed.
    • 公开了一种多电感耦合等离子体反应器及其方法。 在多电感耦合等离子体反应方法中,用于增加要处理的衬底的特定部分的蚀刻方法包括蚀刻要处理的衬底的特定部分; 以及在蚀刻的特定部分的表面上沉积钝化层,其中反复进行蚀刻和沉积步骤,并且当存在由中心等离子体源和外围等离子体源形成的等离子体时,执行两个步骤之一。 根据本发明的多电感耦合等离子体反应器及其方法,由于中心等离子体源和外围源分别设置,因此可以在衬底的整个区域上均匀地处理等离子体。 此外,可以使用在中心等离子体源和外围等离子体源之间接地的防干扰电极在等离子体反应器中形成无电干扰的独立多等离子体区域。 此外,由中央等离子体源和外围等离子体源形成的等离子体用于深刻蚀刻待处理衬底的特定部分。