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    • 1. 发明授权
    • Coherence microscope using interference of time incoherent light to achieve depth resolution in a measurement specimen
    • 相干显微镜使用时间非相干光的干涉来实现测量样本中的深度分辨率
    • US07400409B2
    • 2008-07-15
    • US10538587
    • 2003-12-16
    • Christoph HaugerHans-Joachim MiesnerLudwin Monz
    • Christoph HaugerHans-Joachim MiesnerLudwin Monz
    • G01B9/02
    • G02B21/0004G01B9/02091G01B2290/65
    • A coherence microscope has a divider (3) that divides light emitted by a light source (1) into measurement light, which is supplied to and reflected by a specimen (13), and reference light. A superimposition device (25, 31) superimposes the measurement light reflected by the specimen (13) with the reference light. A short sensor array (41) detects the light resulting from the superimposition and permits a read-out rate of at least about 60 kHz. The superimposition device has an emission device (25, 31) for emitting the measurement light and the reference light arranged to effect extensive irradiation of the sensor array (41) with superimposed light. The ratio of distances covered by the measurement light and the reference light from the emission device (25, 31) to impingement points on the sensor array (41) varies in the portion of the sensor array (41) that is irradiated with superimposed light.
    • 相干显微镜具有将由光源(1)发射的光分离成被供给到试样(13)并被反射的测量光和参考光的分割器(3)。 叠加装置(25,31)将由试样(13)反射的测量光与参考光重叠。 短传感器阵列(41)检测由叠加产生的光,并允许至少约60kHz的读出速率。 叠加装置具有用于发射测量光的发射装置(25,31)和布置成以叠加的光来广泛照射传感器阵列(41)的参考光。 测量光所覆盖的距离与来自发射装置(25,31)的参考光与传感器阵列(41)上的撞击点的比率在用叠加的光照射的传感器阵列(41)的部分中变化。
    • 2. 发明申请
    • Coherence microscope
    • 相干显微镜
    • US20060056784A1
    • 2006-03-16
    • US10538587
    • 2003-12-16
    • Christoph HaugerHans-Joachim MiesnerLudwin Monz
    • Christoph HaugerHans-Joachim MiesnerLudwin Monz
    • G02B6/04
    • G02B21/0004G01B9/02091G01B2290/65
    • A coherence microscope has a divider (3) that divides light emitted by a light source (1) into measurement light, which is supplied to and reflected by a specimen (13), and reference light. A superimposition device (25, 31) superimposes the measurement light reflected by the specimen (13) with the reference light. A short sensor array (41) detects the light resulting from the superimposition and permits a read-out rate of at least about 60 kHz. The superimposition device has an emission device (25, 31) for emitting the measurement light and the reference light arranged to effect extensive irradiation of the sensor array (41) with superimposed light. The ratio of distances covered by the measurement light and the reference light from the emission device (25, 31) to impingement points on the sensor array (41) varies in the portion of the sensor array (41) that is irradiated with superimposed light.
    • 相干显微镜具有将由光源(1)发射的光分离成被供给到试样(13)并被反射的测量光和参考光的分割器(3)。 叠加装置(25,31)将由试样(13)反射的测量光与参考光重叠。 短传感器阵列(41)检测由叠加产生的光,并允许至少约60kHz的读出速率。 叠加装置具有用于发射测量光的发射装置(25,31)和布置成以叠加的光来广泛照射传感器阵列(41)的参考光。 测量光所覆盖的距离与来自发射装置(25,31)的参考光与传感器阵列(41)上的撞击点的比率在用叠加的光照射的传感器阵列(41)的部分中变化。