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    • 9. 发明授权
    • Laser ablation nozzle assembly
    • 激光消融喷嘴总成
    • US06683277B1
    • 2004-01-27
    • US10325066
    • 2002-12-20
    • Ian MillardKarl Pichler
    • Ian MillardKarl Pichler
    • B23K2600
    • B23K26/123B23K26/142B23K26/1436B23K26/1476
    • A laser ablation system includes a first embodiment of a nozzle assembly where a laser beam is emitted through the nozzle assembly to remove materials on a target. The nozzle assembly includes a nozzle having a top end, and a window placed on the top end of the nozzle. The window includes one or more apertures and the laser beam is emitted through one of those apertures. Another laser ablation system includes a second embodiment of a nozzle assembly where a laser beam is emitted through the nozzle assembly to remove materials on a target. The nozzle assembly includes a nozzle having one or more channels at a top end of the nozzle. The nozzle assembly also includes a window that is placed on the one or more channels. A gas flows through the one or more channels and that gas flow reduces debris deposition on the window. Yet another laser ablation system includes a third embodiment of a nozzle assembly that includes a nozzle that has a central channel aligned longitudinally through which said laser beam travels from a top end of said nozzle to a bottom end of said nozzle. In this embodiment, the central channel of the nozzle is threaded.
    • 激光烧蚀系统包括喷嘴组件的第一实施例,其中激光束通过喷嘴组件发射以去除靶上的材料。 喷嘴组件包括具有顶端的喷嘴和放置在喷嘴的顶端上的窗口。 窗口包括一个或多个孔,并且激光束通过这些孔中的一个发射。 另一激光烧蚀系统包括喷嘴组件的第二实施例,其中激光束通过喷嘴组件发射以去除靶上的材料。 喷嘴组件包括在喷嘴的顶端具有一个或多个通道的喷嘴。 喷嘴组件还包括放置在一个或多个通道上的窗口。 气体流过一个或多个通道,并且气流减少了窗口上的碎屑沉积。 又一种激光烧蚀系统包括喷嘴组件的第三实施例,该喷嘴组件包括喷嘴,该喷嘴具有纵向排列的中心通道,所述激光束从所述喷嘴的顶端行进到所述喷嘴的底端。 在该实施例中,喷嘴的中心通道是螺纹的。