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1. 发明授权

US08848195B2 Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method for determining a property of a substrate 有权
标题翻译：检测方法和装置，光刻设备，光刻处理单元和用于确定基板性质的器件制造方法
公开(公告)号：US08848195B2
公开(公告)日：2014-09-30
申请号：US13123613
申请日：2009-10-22
申请人： Christian Marinus Leewis , Marcus Adrianus Van De Kerkhof , Karel Diederick Van Der Mast , Peter Clement Paul Vanoppen , Ruben Alvarez Sanchez
发明人： Christian Marinus Leewis , Marcus Adrianus Van De Kerkhof , Karel Diederick Van Der Mast , Peter Clement Paul Vanoppen , Ruben Alvarez Sanchez
IPC分类号： G01N21/47 , G03F7/20
CPC分类号： G03F7/70625
摘要： In a method for determining one or more properties of a substrate, scatterometry spectra can be measured from one or more targets on the substrate. Reconstructions of each of said spectra can be performed to derive one or more values for the property of the substrate, by comparing representations of each of the measured spectra with one or more modeled representations of spectra calculated using variable parameter values. At least one parameter in the reconstruction for each spectrum can be linked to the value of the parameter used in the reconstruction for a different spectrum.
摘要翻译：在确定衬底的一个或多个特性的方法中，可以从衬底上的一个或多个靶测量散射光谱。可以通过将每个测量光谱的表示与使用可变参数值计算的光谱的一个或多个建模表示进行比较，来执行每个所述光谱的重建以导出衬底性质的一个或多个值。每个频谱的重建中至少有一个参数可以链接到在不同频谱的重构中使用的参数的值。

2. 发明申请

US20120033223A1 Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method for Determining a Property of a Substrate 有权
标题翻译：检测方法和装置，平版印刷装置，光刻处理单元和用于确定基板特性的装置制造方法
公开(公告)号：US20120033223A1
公开(公告)日：2012-02-09
申请号：US13123613
申请日：2009-10-22
申请人： Christian Marinus Leewis , Marcus Adrianus Van De Kerkhof , Karel Diederick Van Der Mast , Peter Clement Paul Vanoppen , Ruben Alvarez Sanchez
发明人： Christian Marinus Leewis , Marcus Adrianus Van De Kerkhof , Karel Diederick Van Der Mast , Peter Clement Paul Vanoppen , Ruben Alvarez Sanchez
IPC分类号： G01N21/47 , B05C11/00 , C23C16/52
CPC分类号： G03F7/70625
摘要： In a method for determining one or more properties of a substrate, scatterometry spectra can be measured from one or more targets on the substrate. Reconstructions of each of said spectra can be performed to derive one or more values for the property of the substrate, by comparing representations of each of the measured spectra with one or more modeled representations of spectra calculated using variable parameter values. At least one parameter in the reconstruction for each spectrum can be linked to the value of the parameter used in the reconstruction for a different spectrum.
摘要翻译：在确定衬底的一个或多个特性的方法中，可以从衬底上的一个或多个靶测量散射光谱。可以通过将每个测量光谱的表示与使用可变参数值计算的光谱的一个或多个建模表示进行比较，来执行每个所述光谱的重建以导出衬底性质的一个或多个值。每个频谱的重建中至少有一个参数可以链接到在不同频谱的重构中使用的参数的值。

3. 发明授权

US08263584B2 Imidazopyridines 有权
标题翻译：咪唑并吡啶
公开(公告)号：US08263584B2
公开(公告)日：2012-09-11
申请号：US13151310
申请日：2011-06-02
申请人： Daniela Alberati , Ruben Alvarez Sanchez , Konrad Bleicher , Alexander Flohr , Katrin Groebke Zbinden , Matthias Koerner , Bernd Kuhn , Jens-Uwe Peters , Markus Rudolph
发明人： Daniela Alberati , Ruben Alvarez Sanchez , Konrad Bleicher , Alexander Flohr , Katrin Groebke Zbinden , Matthias Koerner , Bernd Kuhn , Jens-Uwe Peters , Markus Rudolph
IPC分类号： A61K31/437 , A61K31/5377 , A61K31/4985 , A61K31/553 , A61K31/541 , C07D519/00 , C07D471/04 , A61P25/22 , A61P25/18
CPC分类号： C07D471/04 , A61K31/437 , A61K31/496 , A61K31/5025 , A61K31/5377 , A61K31/553 , C07D487/04
摘要： The invention is concerned with novel imidazopyridine derivatives of formula (I) wherein R1, R2, R3, R4, R5 and A are as defined in the description and in the claims, as well as physiologically acceptable salts and esters thereof. These compounds inhibit PDE10A and can be used for the treatment of various diseases, including central nervous system disorders such as Alzheimer's disease, Parkinson's disease, and schizophrenia.
摘要翻译：本发明涉及式（I）的新咪唑并吡啶衍生物，其中R 1，R 2，R 3，R 4，R 5和A如说明书和权利要求书中所定义，以及其生理上可接受的盐和酯。这些化合物抑制PDE10A，可用于治疗各种疾病，包括中枢神经系统疾病如阿尔茨海默病，帕金森病和精神分裂症。

4. 发明授权

US09360768B2 Inspection method and apparatus 有权
标题翻译：检验方法和装置
公开(公告)号：US09360768B2
公开(公告)日：2016-06-07
申请号：US13482323
申请日：2012-05-29
申请人： Gerardo Bottiglieri , Elliott Gerard Mc Namara , Ruben Alvarez Sanchez
发明人： Gerardo Bottiglieri , Elliott Gerard Mc Namara , Ruben Alvarez Sanchez
IPC分类号： G01N21/47 , G01N21/956 , G03F7/20 , G06F19/00
CPC分类号： G03F7/70625 , G01N21/47 , G01N21/956 , G01N2021/95615 , G03F7/705 , G03F7/70516 , G03F7/70633
摘要： A method defines one or more monitoring target profiles, collects and stores initial calibration data of the metrology apparatus, compiling a library of spectra that would be observed from inspection of the monitoring target profiles using the metrology apparatus calibrated according to the initial calibration data. Some operations can be performed periodically, e.g., on a daily basis: obtaining current calibration data from the apparatus, modeling the effect of the current calibration data on the metrology apparatus operation, and using the result of the modeling and the contents of the library to determine any differences between one or more values of the initial calibration data and the current calibration data, and how these changes will be translated into changes in the measurement output for a given number of stacks and geometries.
摘要翻译：一种方法定义一个或多个监测目标轮廓，收集和存储计量装置的初始校准数据，编译将使用根据初始校准数据校准的计量装置从监测目标轮廓检查观察到的谱图库。可以定期执行一些操作，例如每天执行：从设备获取当前的校准数据，对当前校准数据对计量仪器操作的影响进行建模，并使用库的建模和内容的结果确定初始校准数据和当前校准数据的一个或多个值之间的任何差异，以及这些变化如何转换为给定数量的堆叠和几何形状的测量输出的变化。

5. 发明申请

US20120330592A1 Inspection Method and Apparatus 有权
标题翻译：检验方法和装置
公开(公告)号：US20120330592A1
公开(公告)日：2012-12-27
申请号：US13482323
申请日：2012-05-29
申请人： Gerardo Bottiglieri , Elliott Gerard Mc Namara , Ruben Alvarez Sanchez
发明人： Gerardo Bottiglieri , Elliott Gerard Mc Namara , Ruben Alvarez Sanchez
IPC分类号： G06F19/00
CPC分类号： G03F7/70625 , G01N21/47 , G01N21/956 , G01N2021/95615 , G03F7/705 , G03F7/70516 , G03F7/70633
摘要： A method defines one or more monitoring target profiles, collects and stores initial calibration data of the metrology apparatus, compiling a library of spectra that would be observed from inspection of the monitoring target profiles using the metrology apparatus calibrated according to the initial calibration data. Some operations can be performed periodically, e.g., on a daily basis: obtaining current calibration data from the apparatus, modeling the effect of the current calibration data on the metrology apparatus operation, and using the result of the modeling and the contents of the library to determine any differences between one or more values of the initial calibration data and the current calibration data, and how these changes will be translated into changes in the measurement output for a given number of stacks and geometries.
摘要翻译：一种方法定义一个或多个监测目标轮廓，收集和存储计量装置的初始校准数据，编译将使用根据初始校准数据校准的计量装置从监测目标轮廓检查观察到的谱图库。可以定期执行一些操作，例如每天执行：从设备获取当前的校准数据，对当前校准数据对计量仪器操作的影响进行建模，并使用库的建模和内容的结果确定初始校准数据和当前校准数据的一个或多个值之间的任何差异，以及这些变化如何转换为给定数量的堆叠和几何形状的测量输出的变化。

6. 发明授权

US09977340B2 Method and apparatus for measuring a structure on a substrate, computer program products for implementing such methods and apparatus 有权
公开(公告)号：US09977340B2
公开(公告)日：2018-05-22
申请号：US13101663
申请日：2011-05-05
申请人： Maria Johanna Hendrika Aben , Hugo Augustinus Joseph Cramer , Noelle Martina Wright , Ruben Alvarez Sanchez , Martijn Jaap Daniel Slob
发明人： Maria Johanna Hendrika Aben , Hugo Augustinus Joseph Cramer , Noelle Martina Wright , Ruben Alvarez Sanchez , Martijn Jaap Daniel Slob
IPC分类号： G06G7/62 , G03F7/20
CPC分类号： G03F7/70633 , G03F7/70483 , G03F7/70491 , G03F7/705 , G03F7/70625
摘要： Diffraction models and scatterometry are used to reconstruct a model of a microscopic structure on a substrate. A plurality of candidate structures are defined, each represented by a plurality of parameters (p1, p2, etc.)). A plurality of model diffraction signals are calculated by simulating illumination of each of the candidate structures. The structure is reconstructed by fitting one or more of the model diffraction signals to a signal detected from the structure. In the generation of the candidate structures, a model recipe is used in which parameters are designated as either fixed or variable. Among the variable parameters, certain parameters are constrained to vary together in accordance with certain constraints, such as linear constraints. An optimized set of constraints, and therefore an optimized model recipe, is determined by reference to a user input designating one or more parameters of interest for a measurement, and by simulating the reconstruction process reconstruction. The optimized model recipe can be determined automatically by a parameter advisor process that simulates reconstruction of a set of reference structures, using a plurality of candidate model recipes. In the generation of the reference structures, restrictions can be applied to exclude unrealistic parameter combinations.

7. 发明授权

US08410117B2 Imidazopyrimidine derivatives 有权
标题翻译：咪唑并嘧啶衍生物
公开(公告)号：US08410117B2
公开(公告)日：2013-04-02
申请号：US13049941
申请日：2011-03-17
申请人： Ruben Alvarez Sanchez , Konrad Bleicher , Alexander Flohr , Luca Gobbi , Katrin Groebke Zbinzen , Matthias Koerner , Bernd Kuhn , Jens-Uwe Peters , Markus Rudolph
发明人： Ruben Alvarez Sanchez , Konrad Bleicher , Alexander Flohr , Luca Gobbi , Katrin Groebke Zbinzen , Matthias Koerner , Bernd Kuhn , Jens-Uwe Peters , Markus Rudolph
IPC分类号： A01N43/90 , A61K31/519 , C07D487/00
CPC分类号： C07D487/04 , C07D519/00
摘要： The invention is concerned with novel imidazopyrimidine derivatives of formula (I) wherein R1, R2 and R8 are as defined in the description and in the claims, as well as physiologically acceptable salts and esters thereof. These compounds inhibit PDE10A and can be used as pharmaceuticals.
摘要翻译：本发明涉及式（I）的新型咪唑并嘧啶衍生物，其中R 1，R 2和R 8如说明书和权利要求书中所定义，以及其生理上可接受的盐和酯。这些化合物抑制PDE10A，可用作药物。

8. 发明申请

US20120123748A1 Method and Apparatus for Measuring a Structure on a Substrate, Computer Program Products for Implementing Such Methods and Apparatus 有权
标题翻译：用于测量基板上的结构的方法和装置，用于实现这种方法和装置的计算机程序产品
公开(公告)号：US20120123748A1
公开(公告)日：2012-05-17
申请号：US13101663
申请日：2011-05-05
申请人： Maria Johanna Hendrika Aben , Hugo Augustinus Joseph Cramer , Noelle Martina Wright , Ruben Alvarez Sanchez , Martijn Jaap Daniel Slob
发明人： Maria Johanna Hendrika Aben , Hugo Augustinus Joseph Cramer , Noelle Martina Wright , Ruben Alvarez Sanchez , Martijn Jaap Daniel Slob
IPC分类号： G06F17/50
CPC分类号： G03F7/70633 , G03F7/70483 , G03F7/70491 , G03F7/705 , G03F7/70625
摘要： Diffraction models and scatterometry are used to reconstruct a model of a microscopic structure on a substrate. A plurality of candidate structures are defined, each represented by a plurality of parameters (p1, p2, etc.)). A plurality of model diffraction signals are calculated by simulating illumination of each of the candidate structures. The structure is reconstructed by fitting one or more of the model diffraction signals to a signal detected from the structure. In the generation of the candidate structures, a model recipe is used in which parameters are designated as either fixed or variable. Among the variable parameters, certain parameters are constrained to vary together in accordance with certain constraints, such as linear constraints. An optimized set of constraints, and therefore an optimized model recipe, is determined by reference to a user input designating one or more parameters of interest for a measurement, and by simulating the reconstruction process reconstruction. The optimized model recipe can be determined automatically by a parameter advisor process that simulates reconstruction of a set of reference structures, using a plurality of candidate model recipes. In the generation of the reference structures, restrictions can be applied to exclude unrealistic parameter combinations.
摘要翻译：衍射模型和散射法用于重建基底上微观结构的模型。定义多个候选结构，每个候选结构由多个参数（p1，p2等）表示）。通过模拟每个候选结构的照明来计算多个模型衍射信号。通过将一个或多个模型衍射信号拟合到从结构检测的信号来重构该结构。在候选结构的生成中，使用模型配方，其中参数被指定为固定的或可变的。在可变参数中，某些参数被限制为根据某些约束（诸如线性约束）一起变化。通过参考指定用于测量的感兴趣的一个或多个参数的用户输入以及通过模拟重建过程重建来确定优化的约束集合以及因此优化的模型配方。优化的模型配方可以由使用多个候选模型配方模拟一组参考结构的重建的参数顾问程序自动确定。在生成参考结构时，可以应用限制来排除不切实际的参数组合。

9. 发明授权

US07893099B2 Cyclopentane derivatives 有权
标题翻译：环戊烷衍生物
公开(公告)号：US07893099B2
公开(公告)日：2011-02-22
申请号：US12791914
申请日：2010-06-02
申请人： David Banner , Simona M. Ceccarelli , Uwe Grether , Wolfgang Haap , Hans Hilpert , Holger Kuehne , Harald Mauser , Jean-Marc Plancher , Ruben Alvarez Sanchez
发明人： David Banner , Simona M. Ceccarelli , Uwe Grether , Wolfgang Haap , Hans Hilpert , Holger Kuehne , Harald Mauser , Jean-Marc Plancher , Ruben Alvarez Sanchez
IPC分类号： A61K31/415 , A61K31/5375 , A61K31/54 , A61K31/495 , A61K31/50 , A61K31/40 , A61K31/435 , C07D231/10 , C07D265/30 , C07D279/12 , C07D205/00 , C07D211/00 , C07D213/00 , C07C255/01
CPC分类号： C07C317/44 , C07C2601/02 , C07C2601/04 , C07C2601/08 , C07D205/04 , C07D207/06 , C07D207/10 , C07D207/16 , C07D211/18 , C07D211/38 , C07D211/46 , C07D211/66 , C07D213/34 , C07D213/61 , C07D213/64 , C07D213/65 , C07D213/68 , C07D213/71 , C07D231/12 , C07D237/08 , C07D237/14 , C07D237/16 , C07D239/26 , C07D249/06 , C07D261/08 , C07D277/26 , C07D279/12 , C07D295/096 , C07D295/185 , C07D309/12 , C07D333/18 , C07D335/02 , C07D401/12 , C07D403/12 , C07D403/14 , C07D405/06 , C07D405/12 , C07D409/12 , C07D491/08 , C07D491/107
摘要： The invention relates to a compound of formula (I) wherein A1 and R1 to R5 are defined as in the description and in the claims. The compound of formula (I) can be used as a medicament.
摘要翻译：本发明涉及式（I）化合物，其中A1和R1至R5如在说明书和权利要求书中所定义。式（I）化合物可以用作药物。

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