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1. 发明授权

US06984556B2 Method of forming an isolation layer and method of manufacturing a trench capacitor 失效
标题翻译：形成隔离层的方法和制造沟槽电容器的方法
公开(公告)号：US06984556B2
公开(公告)日：2006-01-10
申请号：US10483423
申请日：2002-06-24
申请人： Christian Drabe , Jana Haensel , Anke Krasemann , Barbara Lorenz , Thomas Morgenstern , Torsten Schneider , Bruno Spuler
发明人： Christian Drabe , Jana Haensel , Anke Krasemann , Barbara Lorenz , Thomas Morgenstern , Torsten Schneider , Bruno Spuler
IPC分类号： H01L21/8242
CPC分类号： H01L27/10861 , H01L21/31116
摘要： A two-step etch process is used to form a vertical collar oxide within the upper portion of a trench capacitor. The first step uses CF4/SiF4/O2 chemistry and ends when the bottom of the collar within the trench is opened although a thin oxide layer still remains on the surface of the PAD-nitride. The second etch step uses C4F8 chemistry to completely remove the remaining silicon oxide layer. The process provides a good uniformity in thickness of the PAD-nitride layer and sufficient collar oxide thickness in the very top section of the collar oxide. The process is applicable for manufacturing deep trench capacitors for DRAM devices.
摘要翻译：使用两步蚀刻工艺在沟槽电容器的上部形成垂直环形氧化物。第一步使用CF 4 / SiF 4 / O 2化学物质，并且当沟槽内的套环的底部打开时结束，尽管薄氧化物层仍然保留在PAD氮化物的表面上。第二蚀刻步骤使用C 4 S 8 N 8化学物质完全除去剩余的氧化硅层。该方法在环氧化物的最上部提供了PAD-氮化物层的厚度均匀性和足够的环氧化物厚度。该工艺适用于制造用于DRAM器件的深沟槽电容器。

2. 发明申请

US20090303563A1 Method for Structuring a Device Layer of a Substrate 有权
标题翻译：用于构造基板的器件层的方法
公开(公告)号：US20090303563A1
公开(公告)日：2009-12-10
申请号：US12479503
申请日：2009-06-05
申请人： Christian Drabe , Thomas Klose
发明人： Christian Drabe , Thomas Klose
IPC分类号： G02B26/10 , B29D11/00
CPC分类号： B81C1/00682 , B81B2201/042 , G02B26/0833
摘要： Method for structuring a device layer of a substrate, wherein the substrate includes a carrier layer, the device layer and an intermediate layer disposed between the carrier layer and the device layer. Thereby, the intermediate layer is structured for exposing, at least in one portion, a first surface of the carrier layer facing the device layer. Starting from a second surface of the carrier layer opposing the first surface, the thickness of the device layer is reduced to a predetermined thickness at those positions where the intermediate layer is removed.
摘要翻译：用于构造衬底的器件层的方法，其中所述衬底包括载体层，所述器件层和设置在所述载体层和所述器件层之间的中间层。由此，中间层被构造成用于至少在一个部分中暴露载体层的面向器件层的第一表面。从与第一表面相对的载体层的第二表面开始，在去除中间层的那些位置处，器件层的厚度被减小到预定的厚度。

3. 发明申请

US20060250708A1 Micro-optical arrangement 有权
标题翻译：微光学布置
公开(公告)号：US20060250708A1
公开(公告)日：2006-11-09
申请号：US11410313
申请日：2006-04-25
申请人： Harald Schenk , Christian Drabe
发明人： Harald Schenk , Christian Drabe
IPC分类号： G02B5/08 , G02B7/182
CPC分类号： G02B26/0825
摘要： The invention relates to a micro-optical arrangement with which in particular optical properties of an optical element or its influencing of electromagnetic radiation may be changed. Thereby the optical elements with a reflecting surface are preferred. It is the object of the invention to provide for a changeability of optical parameters, in particular of the focal width with small time constants, in an inexpensive manner and with a small required constructional volume. The micro-optical arrangement according to the invention comprises a plate-like optical element onto which electromagnetic radiation is directed on an optically effective surface. The optical element thereby is fixed or clamped at least at one outer edge point. The optical element is elastically deformed due to mass inertia as a result of a translatory movement at least approximately parallel to the optical axis between two reversal points (−z0, z0).
摘要翻译：本发明涉及一种微光学装置，其具体可以改变光学元件的光学特性或其影响电磁辐射的特性。由此，具有反射面的光学元件是优选的。本发明的目的是以便宜的方式并且具有小的所需结构体积来提供光学参数的可变性，特别是具有小的时间常数的焦点宽度的可变性。根据本发明的微光学装置包括板状光学元件，电磁辐射被引导到光学有效表面上。因此，光学元件至少在一个外边缘点被固定或夹紧。光学元件由于质量惯性而弹性变形，这是由于平移至少大致平行于两个反转点之间的光轴的平移运动的结果（-z> 0，z> 0 < ）。

4. 发明授权

US08199390B2 Method for structuring a device layer of a substrate 有权
标题翻译：用于构造衬底的器件层的方法
公开(公告)号：US08199390B2
公开(公告)日：2012-06-12
申请号：US12479503
申请日：2009-06-05
申请人： Christian Drabe , Thomas Klose
发明人： Christian Drabe , Thomas Klose
IPC分类号： G02B26/08
CPC分类号： B81C1/00682 , B81B2201/042 , G02B26/0833
摘要： Method for structuring a device layer of a substrate, wherein the substrate includes a carrier layer, the device layer and an intermediate layer disposed between the carrier layer and the device layer. Thereby, the intermediate layer is structured for exposing, at least in one portion, a first surface of the carrier layer facing the device layer. Starting from a second surface of the carrier layer opposing the first surface, the thickness of the device layer is reduced to a predetermined thickness at those positions where the intermediate layer is removed.
摘要翻译：用于构造衬底的器件层的方法，其中所述衬底包括载体层，所述器件层和设置在所述载体层和所述器件层之间的中间层。由此，中间层被构造成用于至少在一个部分中暴露载体层的面向器件层的第一表面。从与第一表面相对的载体层的第二表面开始，在去除中间层的那些位置处，器件层的厚度被减小到预定的厚度。

5. 发明授权

US07940439B2 Method for generating a micromechanical structure 有权
标题翻译：用于产生微机械结构的方法
公开(公告)号：US07940439B2
公开(公告)日：2011-05-10
申请号：US12058835
申请日：2008-03-31
申请人： Denis Jung , Christian Drabe , Thilo Sandner , Harald Schenk , Thomas Klose , Alexander Wolter
发明人： Denis Jung , Christian Drabe , Thilo Sandner , Harald Schenk , Thomas Klose , Alexander Wolter
IPC分类号： G02B26/08 , H01L21/46
CPC分类号： B81C1/00103 , B81B2203/0384 , B81B2203/04
摘要： In a method for manufacturing a micromechanical structure, first a two-dimensional structure is formed in a substrate. The two-dimensional structure is deflected from the substrate plane by action of force and fixed in the deflected state.
摘要翻译：在微机械结构的制造方法中，首先在基板上形成二维结构。二维结构通过力的作用从基板平面偏转并在偏转状态下固定。

6. 发明授权

US07932788B2 Oscillating, deflectable micromechanical element and method for use thereof 有权
标题翻译：摆动，可偏转微机械元件及其使用方法
公开(公告)号：US07932788B2
公开(公告)日：2011-04-26
申请号：US12298101
申请日：2006-04-24
申请人： Harald Schenk , Alexander Wolter , Thilo Sandner , Christian Drabe , Thomas Klose
发明人： Harald Schenk , Alexander Wolter , Thilo Sandner , Christian Drabe , Thomas Klose
IPC分类号： H03B5/18 , H01L27/14
CPC分类号： B81B3/0078 , B81B2201/042 , B81B2203/0109
摘要： The invention relates to micromechanical elements deflectable in an oscillating manner and to a method for the operation of such elements. In this respect, it is the object of the invention to be able to operate the micromechanical elements in a stable and simple manner on the oscillating deflection while taking account of the respective mechanical resonant frequency. A least one spring element is present on elements in accordance with the invention with which it is held. It is deflected between two reversal points using an electrical AC voltage. The one or more spring element(s) has/have non-linear spring characteristics so that a changed mechanical resonant frequency results in dependence on the respective deflection.
摘要翻译：本发明涉及以振荡方式可偏转的微机械元件以及用于操作这些元件的方法。在这方面，本发明的目的是能够以稳定和简单的方式在考虑到相应的机械共振频率的情况下在振荡偏转上操作微机械元件。在根据本发明的元件上存在至少一个弹簧元件，其被保持在其上。它使用电气交流电压在两个反转点之间偏转。一个或多个弹簧元件具有/具有非线性弹簧特性，使得改变的机械共振频率导致依赖于相应的偏转。

7. 发明授权

US08357944B2 Semiconductor substrate and methods for the production thereof 有权
标题翻译：半导体衬底及其制造方法
公开(公告)号：US08357944B2
公开(公告)日：2013-01-22
申请号：US12063382
申请日：2006-08-10
申请人： Christian Drabe , Alexander Wolter , Roger Steadman , Andreas Bergmann , Gereon Vogtmeier , Ralf Dorscheid
发明人： Christian Drabe , Alexander Wolter , Roger Steadman , Andreas Bergmann , Gereon Vogtmeier , Ralf Dorscheid
IPC分类号： H01L29/18
CPC分类号： H01L21/76898 , H01L23/481 , H01L27/14636 , H01L31/02005 , H01L2223/6622 , H01L2924/0002 , H01L2924/00012 , H01L2924/00
摘要： The invention relates to semiconductor substrates and methods for producing such semiconductor substrates. In this connection, it is the object of the invention to provide semiconductor substrates which can be produced more cost-effectively and with which a high arrangement density as well as good electrical conductivity and closed surfaces can be achieved. In accordance with the invention, an electrically conductive connection is guided from its front side through the substrate up to the rear side. The electrically conductive connection is completely surrounded from the outside. The insulator is formed by an opening which is filled with material. The inner wall is provided with a dielectric coating and/or filled with an electrically insulating or conductive material. The electrically conductive connection is formed with a further opening which is filled with an electrically conductive material and is arranged in the interior of the insulator. The openings are formed with step-free inner walls aligned orthogonally to the front side or tapering continuously in the direction of the rear side.
摘要翻译：本发明涉及半导体衬底及其制造方法。在这方面，本发明的目的是提供可以更经济有效地制造并且可以实现高排列密度以及良好导电性和封闭表面的半导体衬底。根据本发明，导电连接从其前侧通过基板被引导到后侧。导电连接从外部完全包围。绝缘体由填充有材料的开口形成。内壁设置有电介质涂层和/或填充有电绝缘或导电材料。导电连接形成有另外的开口，其填充有导电材料并且布置在绝缘体的内部。开口形成有与前侧正交对准或者在后侧方向连续地逐渐变细的无梯度内壁。

8. 发明申请

US20100295066A1 SEMICONDUCTOR SUBSTRATE AND METHODS FOR THE PRODUCTION THEREOF 有权
标题翻译：半导体基板及其生产方法
公开(公告)号：US20100295066A1
公开(公告)日：2010-11-25
申请号：US12063382
申请日：2006-08-10
申请人： Christian Drabe , Alexander Wolter , Roger Steadman , Andreas Bergmann , Gereon Vogtmeier , Ralf Dorscheid
发明人： Christian Drabe , Alexander Wolter , Roger Steadman , Andreas Bergmann , Gereon Vogtmeier , Ralf Dorscheid
IPC分类号： H01L23/48 , H01L21/70 , H01L31/02 , H01L33/00 , H01L21/768
CPC分类号： H01L21/76898 , H01L23/481 , H01L27/14636 , H01L31/02005 , H01L2223/6622 , H01L2924/0002 , H01L2924/00012 , H01L2924/00
摘要： The invention relates to semiconductor substrates and methods for producing such semiconductor substrates. In this connection, it is the object of the invention to provide semiconductor substrates which can be produced more cost-effectively and with which a high arrangement density as well as good electrical conductivity and closed surfaces can be achieved. In accordance with the invention, an electrically conductive connection is guided from its front side through the substrate up to the rear side. The electrically conductive connection is completely surrounded from the outside. The insulator is formed by an opening which is filled with material. The inner wall is provided with a dielectric coating and/or filled with an electrically insulating or conductive material. The electrically conductive connection is formed with a further opening which is filled with an electrically conductive material and is arranged in the interior of the insulator. The openings are formed with step-free inner walls aligned orthogonally to the front side or tapering continuously in the direction of the rear side.
摘要翻译：本发明涉及半导体衬底及其制造方法。在这方面，本发明的目的是提供可以更经济有效地制造并且可以实现高排列密度以及良好导电性和封闭表面的半导体衬底。根据本发明，导电连接从其前侧通过基板被引导到后侧。导电连接从外部完全包围。绝缘体由填充有材料的开口形成。内壁设置有电介质涂层和/或填充有电绝缘或导电材料。导电连接形成有另外的开口，其填充有导电材料并且布置在绝缘体的内部。开口形成有与前侧正交对准或者在后侧方向连续地逐渐变细的无梯度内壁。

9. 发明申请

US20090250853A1 TORSION RESILIENT ELEMENT FOR HANGING MICROMECHANICAL ELEMENTS WHICH CAN BE DEFLECTED 审中-公开
标题翻译：用于悬挂可扭曲的微小元器件的扭力弹性元件
公开(公告)号：US20090250853A1
公开(公告)日：2009-10-08
申请号：US12297878
申请日：2006-04-24
申请人： Alexander Wolter , Christian Drabe , Thomas Klose
发明人： Alexander Wolter , Christian Drabe , Thomas Klose
IPC分类号： B81B3/00
CPC分类号： B81B3/0078 , B81B2201/042 , B81B2203/0109
摘要： The invention relates to torsion spring elements for the suspension of deflectable micromechanical elements such as reflecting elements pivotable around a rotational axis. It is therefore the object of the invention to provide torsion spring elements for suspensions of deflectable micromechanical elements which can achieve improved properties in operation with respect to known spring elements. Torsion spring elements in accordance with the invention are made so that they have a changing geometrical design in the direction of their longitudinal axis and thereby have non-linear spring characteristics. The longitudinal axis is in this respect aligned between a clamping or support and the deflectable micromechanical element which is held by at least one torsion spring element. In this respect, a torsion spring element in accordance with the invention can have a straight-line region, which is aligned in the direction of the longitudinal axis, and a fork/branching at at least one end face into which the straight-line region merges.
摘要翻译：本发明涉及用于悬挂可偏转微机械元件的扭转弹簧元件，例如围绕旋转轴线可枢转的反射元件。因此，本发明的目的是提供用于可偏转微机械元件的悬架的扭转弹簧元件，其可以相对于已知弹簧元件实现改进的操作性能。根据本发明的扭转弹簧元件被制成使得它们在它们的纵向轴线的方向上具有变化的几何设计，从而具有非线性弹簧特性。在该方面，纵向轴线在夹持件或支撑件与由至少一个扭转弹簧元件保持的可偏转微机械元件之间对齐。在这方面，根据本发明的扭转弹簧元件可以具有在纵向轴线方向上对齐的直线区域和在至少一个端面处的叉/分支，直线区域合并

10. 发明授权

US08511657B2 Torsion spring for micromechanical applications 有权
标题翻译：用于微机械应用的扭转弹簧
公开(公告)号：US08511657B2
公开(公告)日：2013-08-20
申请号：US11484250
申请日：2006-07-11
申请人： Christian Drabe , Thomas Klose
发明人： Christian Drabe , Thomas Klose
IPC分类号： F16F1/14 , F16F1/18
CPC分类号： F16F15/063 , F16F1/14
摘要： The invention relates to the torsion springs for micromechanical applications. They can be used if elements are to be pivoted about an axis in an oscillating fashion. According to the object which is set, the torsion springs are to have an improved linear spring characteristic. The torsion springs according to the invention have a square, rectangular or trapezoidal cross section. A slot which is oriented orthogonally with respect to the longitudinal axis of the torsion spring and another slot which is formed in the torsion spring along its longitudinal axis and which opens into the first slot are formed at a clamping end point.
摘要翻译：本发明涉及用于微机械应用的扭转弹簧。如果元件以摆动方式绕轴旋转，则可以使用它们。根据设定的目的，扭转弹簧具有改进的线性弹簧特性。根据本发明的扭转弹簧具有正方形，矩形或梯形横截面。相对于扭转弹簧的纵向轴线正交定向的狭槽和沿其纵向轴线形成在扭转弹簧中并且开口到第一狭槽中的另一狭槽形成在夹紧端点处。

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