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    • 1. 发明申请
    • X-ray sensitive camera comprising two image receivers and x-ray device
    • X射线敏感摄像机包括两个图像接收器和X射线装置
    • US20060227934A1
    • 2006-10-12
    • US10550304
    • 2004-03-24
    • Christian BeckhausUwe ZellerMartin EckertUlrich Schulze-GanzlinWerner Gunther
    • Christian BeckhausUwe ZellerMartin EckertUlrich Schulze-GanzlinWerner Gunther
    • H05G1/64
    • A61B6/032A61B6/14
    • The invention relates to an X-ray sensitive camera (1, 55) comprising a first X-ray sensitive image receiver (4), for creating a first tomogram with a first depth of field profile, in addition to a second X-ray sensitive image receiver (5) for creating a second tomogram with a second depth of field profile. The invention also relates to an X-ray device comprising an image receiver (4, 5) that is contained in an X-ray sensitive camera (55), in addition to an X-ray emitter (52) with a primary diaphragm (57) and adjusting means (43, 44) for the image receiver and/or X-ray emitter and/or primary diaphragm and/or a combination thereof. The camera is equipped with a second image receiver (5), which can be brought into the beam path (54) of the X-ray emitter using the adjusting means (43, 44).
    • 本发明涉及一种包括第一X射线敏感图像接收器(4)的X射线敏感相机(1,55),用于创建具有第一景深分布的第一断层图像,以及第二X射线敏感图像接收器 图像接收器(5),用于创建具有第二景深轮廓的第二断层图像。 本发明还涉及除了具有初级隔膜(57)的X射线发射器(52)之外,还包括包含在X射线敏感照相机(55)中的图像接收器(4,5)的X射线装置 )和用于图像接收器和/或X射线发射器和/或初级隔膜的调节装置(43,44)和/或其组合。 相机配备有第二图像接收器(5),其可以使用调节装置(43,44)进入X射线发射器的光束路径(54)。
    • 2. 发明申请
    • X-ray sensitive camera comprising two image receivers and X-ray device
    • X射线敏感摄像机包括两个图像接收器和X射线装置
    • US20080144766A1
    • 2008-06-19
    • US12003730
    • 2007-12-31
    • Christian BeckhausUwe ZellerMartin EckertUlrich Schulze-GanzlinWerner Gunther
    • Christian BeckhausUwe ZellerMartin EckertUlrich Schulze-GanzlinWerner Gunther
    • A61B6/00
    • A61B6/032A61B6/14
    • An X-ray-sensitive camera comprising a first X-ray-sensitive image detector for the creation of a first tomographic image with a first depth of focus profile, a second X-ray-sensitive image detector for the creation of a second tomographic image with a second depth of focus profile, and an adjustment device for moving as desired the first image detector or the second image detector into proper alignment with an X-ray emitter for the creation of a respective X-ray image, the second depth of focus profile being smaller than the first depth of focus profile, the image-sensitive active surface of the second image detector being at least twice as large as an image-sensitive active surface of the first image detector in a first dimension, and/or the second image detector is not more than half as large as the first image detector in a second dimension, the first and second image detectors being disposed in a common casing with the camera, and the second image detector is disposed alongside the first image detector.
    • 一种X射线敏感照相机,包括用于创建具有第一焦点深度分布的第一层析图像的第一X射线敏感图像检测器,用于创建第二断层图像的第二X射线敏感图像检测器 具有第二深度焦点轮廓的调整装置,以及用于根据需要移动第一图像检测器或第二图像检测器以与X射线发射器正确对准的调整装置,用于创建相应的X射线图像,第二深度焦点 所述第二图像检测器的所述图像敏感活性表面的尺寸小于所述第一深度焦点轮廓,所述第二图像检测器的图像敏感活性表面是第一尺寸中的所述第一图像检测器的图像敏感活性表面的至少两倍,和/ 图像检测器不超过第二维度中的第一图像检测器的一半,第一和第二图像检测器与相机一起设置在公共壳体中,并且第二图像检测器与第二图像检测器一起设置 e第一图像检测器。
    • 3. 发明授权
    • X-ray sensitive camera comprising two image receivers and X-ray device
    • X射线敏感摄像机包括两个图像接收器和X射线装置
    • US07559692B2
    • 2009-07-14
    • US12003730
    • 2007-12-31
    • Christian BeckhausUwe ZellerMartin EckertUlrich Schulze-GanzlinWerner Günther
    • Christian BeckhausUwe ZellerMartin EckertUlrich Schulze-GanzlinWerner Günther
    • G01N23/083H01L27/146
    • A61B6/032A61B6/14
    • An X-ray-sensitive camera comprising a first X-ray-sensitive image detector for the creation of a first tomographic image with a first depth of focus profile, a second X-ray-sensitive image detector for the creation of a second tomographic image with a second depth of focus profile, and an adjustment device for moving as desired the first image detector or the second image detector into proper alignment with an X-ray emitter for the creation of a respective X-ray image, the second depth of focus profile being smaller than the first depth of focus profile, the image-sensitive active surface of the second image detector being at least twice as large as an image-sensitive active surface of the first image detector in a first dimension, and/or the second image detector is not more than half as large as the first image detector in a second dimension, the first and second image detectors being disposed in a common casing with the camera, and the second image detector is disposed alongside the first image detector.
    • 一种X射线敏感照相机,包括用于创建具有第一焦点深度分布的第一层析图像的第一X射线敏感图像检测器,用于创建第二断层图像的第二X射线敏感图像检测器 具有第二深度焦点轮廓的调整装置,以及用于根据需要移动第一图像检测器或第二图像检测器以与X射线发射器正确对准的调整装置,用于创建相应的X射线图像,第二深度焦点 所述第二图像检测器的所述图像敏感活性表面的尺寸小于所述第一深度焦点轮廓,所述第二图像检测器的图像敏感活性表面是第一尺寸中的所述第一图像检测器的图像敏感活性表面的至少两倍,和/ 图像检测器不超过第二维度中的第一图像检测器的一半,第一和第二图像检测器与相机一起设置在公共壳体中,并且第二图像检测器与第二图像检测器一起设置 e第一图像检测器。
    • 4. 发明授权
    • X-ray sensitive camera comprising two image receivers and X-ray device
    • X射线敏感摄像机包括两个图像接收器和X射线装置
    • US07322746B2
    • 2008-01-29
    • US10550304
    • 2004-03-24
    • Christian BeckhausUwe ZellerMartin EckertUlrich Schulze-GanzlinWerner Günther
    • Christian BeckhausUwe ZellerMartin EckertUlrich Schulze-GanzlinWerner Günther
    • G21N23/083H05G1/00
    • A61B6/032A61B6/14
    • The invention relates to an X-ray sensitive camera (1, 55) comprising a first X-ray sensitive image receiver (4), for creating a first tomogram with a first depth of field profile, in addition to a second X-ray sensitive image receiver (5) for creating a second tomogram with a second depth of field profile. The invention also relates to an X-ray device comprising an image receiver (4, 5) that is contained in an X-ray sensitive camera (55), in addition to an X-ray emitter (52) with a primary diaphragm (57) and adjusting means (43, 44) for the image receiver and/or X-ray emitter and/or primary diaphragm and/or a combination thereof. The camera is equipped with a second image receiver (5), which can be brought into the beam path (54) of the X-ray emitter using the adjusting means (43, 44).
    • 本发明涉及一种包括第一X射线敏感图像接收器(4)的X射线敏感相机(1,55),用于创建具有第一景深分布的第一断层图像,以及第二X射线敏感图像接收器 图像接收器(5),用于创建具有第二景深轮廓的第二断层图像。 本发明还涉及除了具有初级隔膜(57)的X射线发射器(52)之外,还包括包含在X射线敏感照相机(55)中的图像接收器(4,5)的X射线装置 )和用于图像接收器和/或X射线发射器和/或初级隔膜的调节装置(43,44)和/或其组合。 相机配备有第二图像接收器(5),其可以使用调节装置(43,44)进入X射线发射器的光束路径(54)。
    • 7. 发明授权
    • Test fail analysis on VLSI chips
    • VLSI芯片测试故障分析
    • US08180142B2
    • 2012-05-15
    • US12326166
    • 2008-12-02
    • Martin EckertGeorg GoeckeMarta JungingerKlaus KempterMarkus Ulbricht
    • Martin EckertGeorg GoeckeMarta JungingerKlaus KempterMarkus Ulbricht
    • G06K9/03
    • G06T7/001G06T2207/30148
    • Compact graphical representations of common test fail signatures and process related test fails are provided through methods of selecting, calculating and/or presenting information. The input may be a list of failing tests on a sample of devices under test from chip and/or wafer process fails. The failing tests are identified and then other tests that fail at the same time may be identified. Several graphical outputs are provided, including all possible combinations between test fails and between test fails and process fails. The dependencies are printed as sorted two dimensional bitmaps that are compact representations of the results using color codes. Subtraction of two independent bitmaps is provided, which eliminates common properties and emphasizes differences between multiple bitmaps which allows for quick identification of differences of process fails potentially different between the two different bitmaps indicating potential root causes for the selected one of the test fails.
    • 通过选择,计算和/或呈现信息的方法提供常见测试失败签名和过程相关测试失败的紧凑图形表示。 输入可以是从芯片和/或晶片处理失败的被测器件的样本的失败测试的列表。 确定失败的测试,然后可以确定同时失败的其他测试。 提供了几个图形输出,包括测试失败和测试失败和进程失败之间的所有可能的组合。 依赖关系作为排序的二维位图打印,这些位图是使用颜色代码的结果的紧凑表示。 提供了两个独立位图的减法,这消除了通用属性,并且强调了多个位图之间的差异,这允许快速识别两个不同位图之间的差异的过程失败,这两个不同的位图表示所选择的一个测试失败的潜在根本原因。