会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 10. 发明授权
    • Method for manufacturing multi-layer package substrates
    • 制造多层封装基板的方法
    • US06743659B2
    • 2004-06-01
    • US10150084
    • 2002-05-20
    • Moriss KungKwun-Yao Ho
    • Moriss KungKwun-Yao Ho
    • H01L2144
    • H01L21/486H01L21/4857H05K3/4069H05K3/4602H05K2201/0347H05K2201/096H05K2203/0191
    • A method for manufacturing multi-layer package substrates is shown. A substrate with a first side and a second side is first provided, and a layer of release film is formed on the first side and second side of the substrate. After drilling a plurality of through holes on the substrate bonded to the release film and plugging the through holes with a conductive material, the release film is removed. A first copper film is formed on the first and second side of the substrate. First, circuit layer patterns are formed on the first and second side of the substrate through photolithography and etching processes. After coating an build-up layer on the first and second side of the substrate and drilling the build-up layers with a laser to form counter vias on the first side and second side of the substrate, a copper seed layer is formed on the inner surfaces of the counter vias. Second circuit layer patterns are formed on the first side and second side of the substrate. Finally, contact pads are formed on the first side and second side of the substrate.
    • 示出了制造多层封装衬底的方法。 首先设置具有第一侧和第二侧的基板,并且在基板的第一侧面和第二侧上形成剥离膜层。 在与剥离膜接合的基板上钻出多个通孔并用导电材料堵塞通孔之后,去除脱模膜。 在基板的第一和第二侧上形成第一铜膜。 首先,通过光刻和蚀刻工艺在衬底的第一和第二侧上形成电路层图案。 在基板的第一和第二侧上涂覆积层之后,用激光钻积层,在基板的第一面和第二面上形成反向通孔,在内层形成铜籽晶层 计数器通孔的表面。 在衬底的第一侧面和第二侧上形成第二电路层图案。 最后,在衬底的第一侧和第二侧上形成接触焊盘。