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1. 发明授权

US5949546A Interference apparatus for measuring absolute and differential motions of same or different testing surface 失效
标题翻译：用于测量相同或不同测试表面的绝对和差分运动的干涉仪
公开(公告)号：US5949546A
公开(公告)日：1999-09-07
申请号：US856283
申请日：1997-05-14
申请人： Chih-Kung Lee , Giin-Yuan Wu , Wen-Jong Wu , Kun-Sheng Yeh , Chin-Fa Lee
发明人： Chih-Kung Lee , Giin-Yuan Wu , Wen-Jong Wu , Kun-Sheng Yeh , Chin-Fa Lee
IPC分类号： G01B9/02 , G01B11/14
CPC分类号： G01B9/02081 , G01B11/14 , G01B9/02045 , G01B2290/45 , G01B2290/70
摘要： An interference apparatus is disclosed wherein the high-visibility quadrature interference signals are obtained by making a pair of polarization beamsplitter, a 45-degree oriented quarter-waveplate and four light-beam detected photodiodes. A three-dimensional interference optical configuration is made. The test-surface light beam and reference light beams are traveled on this optical configuration. The test-surface light beam and reference light beams have orthogonally linearly polarization state with each other. After they pass through the quarter-waveplate, one right circularly polarized light beam and one left circularly polarized light beam are produced. The vector sum of these two circularly polarized light beams is again a linearly polarized light beam which is then divided into two light beams by a non-polarization beamsplitter. A pair of polarization beamsplitters, whose axes are 45 degrees apart, are utilized to create the 90 degrees phase difference of the light beam intensity signal measured at the photodiodes.
摘要翻译：公开了一种干涉装置，其中通过制造一对偏振分束器，45度定向四分之一波片和四个光束检测光电二极管来获得高可见度正交干涉信号。进行三维干涉光学配置。测试表面光束和参考光束在该光学配置下行进。测试面光束和参考光束具有彼此正交的线偏振状态。在它们通过四分之一波片之后，产生一个右圆偏振光束和一个左圆偏振光束。这两个圆偏振光束的矢量和又是直线偏振光束，然后通过非偏振分束器将其分成两个光束。一对偏振分束器的轴分开45度，用于产生在光电二极管处测量的光束强度信号的90度相位差。

2. 发明授权

US06919561B2 Diffraction laser encoder apparatus 有权
$Diffraction laser encoder apparatus$
标题翻译：衍射激光编码器装置
公开(公告)号：US06919561B2
公开(公告)日：2005-07-19
申请号：US10775857
申请日：2004-02-09
申请人： Chih-Kung Lee , Liang-Bin Yu , Chyan-Chyi Wu , Shu-Sheng Lee , Wen-Jong Wu , Ming-Hua Wen , Shih-Jui Chen , Giin-Yuan Wu
发明人： Chih-Kung Lee , Liang-Bin Yu , Chyan-Chyi Wu , Shu-Sheng Lee , Wen-Jong Wu , Ming-Hua Wen , Shih-Jui Chen , Giin-Yuan Wu
IPC分类号： G01D5/38 , H01J3/14 , H01J5/16 , H01J40/14
CPC分类号： G01D5/38
摘要： A diffraction laser encoder apparatus for positional and movement information measurement of a target made with a diffraction grating. The diffraction laser encoder has a laser light source for generating a source beam. A polarization beam splitter assembly comprises a polarization beam splitter for receiving the source beam for splitting a P-polarization component and an S-polarization component of the source beam into parallel and offset beams. A focusing lens focuses the P-polarization component and the S-polarization component beams onto the target diffraction grating and returning diffracted P-polarization and diffracted S-polarization beams back into the polarization beam splitter for generating a detector beam coaxially containing the diffracted P-polarization and the diffracted S-polarization beams. A detector assembly receives the detector beam for electrical processing and analysis for resolving the positional and movement information. In the process, phase information contained in the diffraction signal returned by the target is analyzed.
摘要翻译：一种用衍射光栅制作的靶的位置和运动信息测量的衍射激光编码器装置。衍射激光编码器具有用于产生源光束的激光光源。偏振分束器组件包括偏振分束器，用于接收源光束，用于将源极光束的P偏振分量和S偏振分量分离成平行和偏移光束。聚焦透镜将P偏振分量和S偏振分量光束聚焦到目标衍射光栅上，并将衍射的P偏振和衍射S偏振光束返回到偏振分束器中，以产生同轴地包含衍射P- 偏振和衍射S偏振光束。检测器组件接收用于电处理和分析的检测器束，用于解析位置和运动信息。在该过程中，分析由目标返回的衍射信号中包含的相位信息。

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