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    • 2. 发明申请
    • Fabrication tool for bonding
    • 用于粘接的加工工具
    • US20070274669A1
    • 2007-11-29
    • US11413333
    • 2006-04-28
    • Chien-Hua ChenTroy SchwinabartWilliam Atkinson
    • Chien-Hua ChenTroy SchwinabartWilliam Atkinson
    • G02B6/00
    • H01L21/67092
    • A fabrication tool presses a first device surface against a second device surface after the first and the second device surfaces have been plasma activated, to bond the first device surface with the second device surface. The fabrication tool includes a bonding piston to exert force on the first device surface to press the first device surface against the second device surface. The fabrication tool also includes a pressure plate situated between the bonding piston and the first device surface. The fabrication tool further includes a mechanism to ensure that the force exerted by the bonding piston on the first device surface via the pressure plate is initially exerted at one or more first locations on the first device surface and subsequently exerted at one or more second locations on the first device surface.
    • 在第一和第二装置表面已被等离子体激活之后,制造工具将第一装置表面压靠第二装置表面,以将第一装置表面与第二装置表面结合。 制造工具包括粘合活塞,以在第一装置表面施加力以将第一装置表面压靠第二装置表面。 制造工具还包括位于接合活塞和第一装置表面之间的压力板。 制造工具还包括机构,以确保由第一装置表面经由压板施加的结合活塞的力最初施加在第一装置表面上的一个或多个第一位置上,随后在一个或多个第二位置上施加 第一个设备表面。
    • 5. 发明申请
    • Micro-optoelectromechanical system packages for a light modulator and methods of making the same
    • 用于光调制器的微光机电系统封装及其制造方法
    • US20060146426A1
    • 2006-07-06
    • US11029316
    • 2005-01-04
    • Chien-Hua ChenDavid CraigCharles Haluzak
    • Chien-Hua ChenDavid CraigCharles Haluzak
    • G02B7/02
    • H01L31/0203H01L2224/48091H04N5/7458H01L2924/00014
    • A micro-optoelectromechanical system (MOEMS) package for a light modulator includes a sealed modulator package containing a light modulator sealed under a first transparent lid; a secondary, larger package containing the sealed modulator package, the secondary package comprising a seal and a second transparent lid; and an optical material disposed between the first transparent lid and the second transparent lid, where the optical material is a solid or liquid. An alternatively micro-optoelectromechanical system (MOEMS) package for a light modulator includes a sealed modulator package containing a light modulator sealed under a first transparent lid; a secondary, larger package containing the sealed modulator package; and a desiccant or getter material disposed inside the secondary package with the modulator package.
    • 用于光调制器的微光电机电系统(MOEMS)封装包括密封的调制器封装,其包含密封在第一透明盖下的光调制器; 包含密封调制器封装件的次级较大封装,所述二次封装包括密封件和第二透明盖; 以及设置在第一透明盖和第二透明盖之间的光学材料,其中光学材料是固体或液体。 用于光调制器的替代的微光电机电系统(MOEMS)封装包括密封的调制器封装,其包含密封在第一透明盖下的光调制器; 包含密封调制器封装的二次,较大封装; 以及设置在具有调制器封装的二次封装内的干燥剂或吸气材料。