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1. 发明申请

US20070298583A1 METHOD FOR FORMING A SHALLOW TRENCH ISOLATION REGION 审中-公开
标题翻译：形成浅层分离区的方法
公开(公告)号：US20070298583A1
公开(公告)日：2007-12-27
申请号：US11426650
申请日：2006-06-27
申请人： Chia-Wei Wu , Chen-Wei Liao , Jung-Yu Hsieh , Ling-Wuu Yang , Chin-Ta Su , Chi-Tung Huang
发明人： Chia-Wei Wu , Chen-Wei Liao , Jung-Yu Hsieh , Ling-Wuu Yang , Chin-Ta Su , Chi-Tung Huang
IPC分类号： H01L21/76
CPC分类号： H01L21/76224
摘要： A method for forming a shallow trench isolation region (STI) is disclosed. The method comprises the steps of sequentially forming a pad oxide layer and a nitride silicon layer over a provided substrate. Next, the pad oxide layer, the nitride silicon layer, and the substrate are partially etched to form a trench. An oxide liner and a nitride liner are then formed in the trench. Subsequently, a two-stage high-density plasma chemical vapor deposition process is performed to form a shallow trench isolation region.
摘要翻译：公开了一种用于形成浅沟槽隔离区域（STI）的方法。该方法包括以下步骤：在所提供的衬底上顺序地形成衬垫氧化物层和氮化硅层。接下来，对衬垫氧化物层，氮化物硅层和衬底进行部分蚀刻以形成沟槽。然后在沟槽中形成氧化物衬垫和氮化物衬垫。随后，进行两级高密度等离子体化学气相沉积工艺以形成浅沟槽隔离区域。

2. 发明授权

US07199018B2 Plasma assisted pre-planarization process 有权
标题翻译：等离子体辅助预平面化过程
公开(公告)号：US07199018B2
公开(公告)日：2007-04-03
申请号：US10837528
申请日：2004-04-30
申请人： Yung-Tai Hung , Chun-Fu Chen , Yun-Chi Yang , Chin-Hsiang Lin , Chen-Wei Liao
发明人： Yung-Tai Hung , Chun-Fu Chen , Yun-Chi Yang , Chin-Hsiang Lin , Chen-Wei Liao
IPC分类号： H91L21/76
CPC分类号： H01L21/31116 , H01L21/31055 , H01L21/76224
摘要： The present invention is related to methods of processing a semiconductor device. A plasma vapor deposition process is used to fill a trench with an oxide layer, wherein sharp corners are formed by the oxide layer. A pre-planarization sputtering process is performed to reduce the oxide layer corner sharpness. A planarization process is performed using polishing.
摘要翻译：本发明涉及半导体器件的处理方法。使用等离子体气相沉积工艺来填充具有氧化物层的沟槽，其中通过氧化物层形成尖角。进行预平面化溅射工艺以减少氧化物层拐角锐度。使用抛光进行平坦化处理。

3. 发明申请

US20050003668A1 Plasma assisted pre-planarization process 有权
标题翻译：等离子体辅助预平面化过程
公开(公告)号：US20050003668A1
公开(公告)日：2005-01-06
申请号：US10837528
申请日：2004-04-30
申请人： Yung-Tai Hung , Chun-Fu Chen , Yun-Chi Yang , Chin-Hsiang Lin , Chen-Wei Liao
发明人： Yung-Tai Hung , Chun-Fu Chen , Yun-Chi Yang , Chin-Hsiang Lin , Chen-Wei Liao
IPC分类号： H01L21/302 , H01L21/3105 , H01L21/311 , H01L21/762
CPC分类号： H01L21/31116 , H01L21/31055 , H01L21/76224
摘要： The present invention is related to methods of processing a semiconductor device. A plasma vapor deposition process is used to fill a trench with an oxide layer, wherein sharp corners are formed by the oxide layer. A pre-planarization sputtering process is performed to reduce the oxide layer corner sharpness. A planarization process is performed using polishing.
摘要翻译：本发明涉及半导体器件的处理方法。使用等离子体气相沉积工艺来填充具有氧化物层的沟槽，其中通过氧化物层形成尖角。进行预平面化溅射工艺以减少氧化物层拐角锐度。使用抛光进行平坦化处理。

4. 发明授权

US08723379B2 Geared generator for an electric vehicle 失效
标题翻译：用于电动车辆的齿轮发电机
公开(公告)号：US08723379B2
公开(公告)日：2014-05-13
申请号：US13284856
申请日：2011-10-28
申请人： Ho-Yo Liao , Chen-Wei Liao
发明人： Ho-Yo Liao , Chen-Wei Liao
IPC分类号： B62J6/12 , B62M6/40 , B62M6/60 , H02K21/22 , H02K7/116
CPC分类号： H02K7/183 , H02K7/116 , Y02E10/725 , Y02T10/641
摘要： A geared generator for an electric vehicle has a body, a gearing device, a hub device and an electromotor. The body has two mounting boards, a battery and a commutator connected to the battery. The gearing device is connected to the body and has a primary tube, a minor tube, a gear-up segment, an output shaft, a mounting jacket, a stator mount and a motor stator. The gear-up segment is rotatably mounted between the gear disks and has three transmission shafts, three planet gear wheels and multiple bearings. The hub device is mounted around the tubes between the mounting boards and has two hub disks and a hub ring. The hub ring has a spacing disk and two side rings. The electromotor is connected to the gearing device and has a base, a coil stator, an eccentric flywheel, a fan and a protecting hood.
摘要翻译：用于电动车辆的齿轮传动发电机具有主体，传动装置，轮毂装置和电动机。主体有两个安装板，一个电池和一个连接到电池的换向器。齿轮传动装置连接到主体，并具有主管，小管，传动部分，输出轴，安装护套，定子安装件和电动机定子。传动部分可旋转地安装在齿轮盘之间，并具有三个传动轴，三个行星齿轮和多个轴承。轮毂装置安装在安装板之间的管周围，并具有两个轮毂盘和轮毂环。轮毂环有一个间隔盘和两个侧环。电动机连接到齿轮传动装置，并具有基座，线圈定子，偏心飞轮，风扇和保护罩。

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