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    • 2. 发明申请
    • MANUFACTURING METHOD OF THIN FILM TRANSISTOR
    • 薄膜晶体管的制造方法
    • US20070122949A1
    • 2007-05-31
    • US11306105
    • 2005-12-16
    • Chia-Nan ShenWen-Chun YehChia-Chien ChenBing-Wei WuHung-Chi Liao
    • Chia-Nan ShenWen-Chun YehChia-Chien ChenBing-Wei WuHung-Chi Liao
    • H01L21/84
    • H01L27/127H01L27/1214H01L27/1288
    • A manufacturing method of a thin film transistor is provided. A buffer layer is formed on a substrate, and then a first and a second poly-silicon island are formed thereon. A gate-insulating layer is formed on the substrate, and a first and a second gate are formed thereon. A sacrificed layer is formed on the substrate and a photo-resist layer is formed thereon. The sacrificed layer above the first poly-silicon island is removed by using the photo-resist layer as a mask. A first ion implantation process is performed to form a first source/drain. The photo-resist layer is removed and a second ion implantation process is performed to form a second source/drain. At the same time, the second ion implantation process is used to implant ions into the buffer layer below the two sides of the second gate. A lightly-doped ion implantation process is performed after removing the sacrificed layer.
    • 提供了薄膜晶体管的制造方法。 在衬底上形成缓冲层,然后在其上形成第一和第二多晶硅岛。 在基板上形成栅极绝缘层,在其上形成第一和第二栅极。 在基板上形成牺牲层,并在其上形成光致抗蚀剂层。 通过使用光致抗蚀剂层作为掩模去除第一多晶硅岛上方的牺牲层。 执行第一离子注入工艺以形成第一源极/漏极。 去除光致抗蚀剂层,并执行第二离子注入工艺以形成第二源极/漏极。 同时,使用第二离子注入工艺将离子注入到位于第二栅极两侧下方的缓冲层中。 在去除牺牲层后进行轻掺杂离子注入工艺。
    • 3. 发明申请
    • THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF
    • 薄膜晶体管及其制造方法
    • US20090057679A1
    • 2009-03-05
    • US12168163
    • 2008-07-07
    • Chin-Chuan LaiWen-Chun Yeh
    • Chin-Chuan LaiWen-Chun Yeh
    • H01L29/04H01L21/336
    • H01L29/4908H01L29/66757H01L29/78621
    • A manufacturing method of a TFT is provided. A polysilicon island, a gate insulating layer and a gate are sequentially formed on a substrate. LDD regions are formed in the polysilicon island below two sides of the gate, while the polysilicon island below the gate is a channel region. A metal oxidation process is performed to form a gate oxidation layer on the gate. A source and a drain are formed in the polysilicon island below two sides of the gate oxidation layer. A dielectric layer is formed on the gate insulating layer. Portions of the dielectric layer and the gate insulating layer are removed to expose a portion of the source and drain, and a patterned dielectric layer and a patterned gate insulating layer are formed. A source and a drain conductive layers electrically respectively connected to the source and the drain are formed on the patterned dielectric layer.
    • 提供了TFT的制造方法。 在基板上依次形成多晶硅岛,栅极绝缘层和栅极。 LDD区域形成在栅极两侧以下的多晶硅岛中,栅极下方的多晶硅岛是沟道区。 进行金属氧化处理以在栅极上形成栅极氧化层。 源极和漏极形成在栅极氧化层的两侧下方的多晶硅岛中。 在栅极绝缘层上形成介电层。 除去介电层和栅极绝缘层的一部分以露出源极和漏极的一部分,并且形成图案化的电介质层和图案化的栅极绝缘层。 电荷分别连接到源极和漏极的源极和漏极导电层形成在图案化的介电层上。
    • 5. 发明授权
    • Display rack
    • 展示架
    • US06302283B1
    • 2001-10-16
    • US09621539
    • 2000-07-21
    • Wen-Chun Yeh
    • Wen-Chun Yeh
    • A47F500
    • A47F5/116
    • The present invention relates to a display rack primarily including a main frame made of light-weight plastic corrugated board and a number of movable partitions supported by a number of supporting pieces fixed on the main frame so that the main frame is divided by the partitions into a number of holding rooms. The present invention is characterized in that the corrugated board of the main frame has a plurality of grooved rails longitudinally disposed in parallel. The supporting pieces are made of hard material and include at least one blocking extension strip at one side thereof which is vertical to the surface of the supporting pieces. The surface of the supporting piece is fitted with a locking groove near the bottom end of the blocking extension strip in order that the protruding blocking extension strip of the supporting piece is able to be inserted into the grooved rails while the locking groove near the bottom end of the blocking extension strip is fixed on the surface of the main frame. Accordingly, stable supporting elements on which the partitions are placed are created.
    • 本发明涉及一种显示架,主要包括由轻质塑料瓦楞纸板制成的主框架,以及多个可移动分隔件,其由固定在主框架上的多个支撑件支撑,使得主框架被分隔件分割成 一些举办房间。 本发明的特征在于,主框架的波纹板具有纵向纵向设置的多个槽槽轨道。 支撑件由硬质材料制成,并且在其一侧垂直于支撑件的表面包括至少一个阻挡延伸条。 支撑件的表面在阻挡延伸条的底端附近具有锁定槽,以便支撑件的突出的阻挡延伸条能够插入带槽的轨道中,而靠近底端的锁定槽 阻挡延伸条固定在主框架的表面上。 因此,产生了分隔件放置在其上的稳定的支撑元件。