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    • 1. 发明授权
    • Method of installing valves in a micro-pump
    • 在微型泵中安装阀门的方法
    • US06749407B2
    • 2004-06-15
    • US10225895
    • 2002-08-22
    • Chenggang XieJoseph W. BostaphXunhu Dai
    • Chenggang XieJoseph W. BostaphXunhu Dai
    • F04B1700
    • F04B43/046Y10T137/0491Y10T137/6086Y10T137/7838
    • An exemplary method for making a micropump device is disclosed as providing inter alia a substrate (300), an inlet opening (310), and outlet opening (340), a pump chamber (370) and flapper valves (350, 360). The fluid inlet channel (310) is generally configured to flow a fluid through/around the inlet opening flapper valve (350). The outlet opening flapper valve (360) generally provides means for preventing or otherwise decreasing the incidence of outlet fluid re-entering either the pumping cavity (370) and/or the fluid inlet channel (310). Accordingly, the reduction of backflow generally tends to enhance overall pumping efficiency. Disclosed features and specifications may be variously controlled, adapted or otherwise optionally modified to improve micropump operation in any microfluidic application. Exemplary embodiments of the present invention representatively provide for substantially self-priming gas/liquid micropumps that may be readily integrated with existing portable ceramic technologies for the improvement of device package form factors, weights and other manufacturing and/or device performance metrics.
    • 公开了一种用于制造微型泵装置的示例性方法,其特别是提供了一种衬底(300),一个入口开口(310)和出口开口(340),一个泵室(370)和挡板阀(350,360)。 流体入口通道(310)通常构造成使流体流过/通过入口开口挡板(350)。 出口打开挡板阀(360)通常提供用于防止或以其他方式减少出口流体再次进入泵送空腔(370)和/或流体入口通道(310)的入口的装置。 因此,回流的减少通常趋向于提高整体泵送效率。 公开的特征和规格可以被不同地控制,适应或以其他方式任意地修改以改善任何微流体应用中的微泵操作。 本发明的示例性实施例代表性地提供了可以容易地与现有便携式陶瓷技术集成的基本上自吸气/液体微泵,以改进装置包装形状因子,重量以及其他制造和/或装置性能度量。
    • 3. 发明授权
    • Micropump with integrated pressure sensor
    • 具有集成压力传感器的微型泵
    • US06986649B2
    • 2006-01-17
    • US10411031
    • 2003-04-09
    • Xunhu DaiChenggang Xie
    • Xunhu DaiChenggang Xie
    • F04B43/04
    • F04B15/08A61M5/14224A61M2205/0294F04B43/043
    • An exemplary system and method for manufacturing micropump systems having integrated piezoresistive sensors is disclosed as including inter alia: a substrate, an inlet channel, an outlet channel, a pumping cavity, a first valve for permitting fluid flow from the inlet channel to the pumping cavity and restricting backflow of purged fluid from the pumping cavity to the inlet channel; a second valve for permitting fluid flow from the pumping cavity to an outlet channel and restricting backflow of purged fluid from the outlet channel to the pumping cavity; a pump actuator element; a pressure sensing cavity surface capable of at least partial mechanical deformation; a plurality of piezoresistors disposed within the sensing cavity; a plurality of contact pads; a plurality of conductive pathways connecting the piezoresistors and the contact pads; and a substantially monolithic device package, wherein the sensing cavity is substantially contained within the micropump device package. Disclosed features and specifications may be variously controlled, adapted or otherwise optionally modified to improve micropump operation in any microfluidic application. Exemplary embodiments of the present invention representatively provide for piezoresistive pressure sensors that may be readily integrated with existing portable ceramic technologies for the improvement of device package form factors, weights and other manufacturing and/or device performance metrics.
    • 公开了一种用于制造具有集成压阻传感器的微型泵系统的示例性系统和方法,其包括:基板,入口通道,出口通道,泵送腔,用于允许流体从入口通道流到泵送腔的第一阀 并且限制净化流体从泵送腔向回流通道的回流; 第二阀,用于允许流体从泵送腔流到出口通道,并限制净化流体从出口通道回流到泵送腔; 泵致动器元件; 能够至少部分机械变形的压力感测腔表面; 设置在感测腔内的多个压敏电阻; 多个接触垫; 连接压敏电阻和接触垫的多个导电路径; 以及基本上单片的器件封装,其中感测腔基本上包含在微泵装置封装内。 公开的特征和规格可以被不同地控制,适应或以其他方式任意地修改以改善任何微流体应用中的微泵操作。 本发明的示例性实施例代表性地提供压阻式压力传感器,其可以容易地与现有便携式陶瓷技术集成,以改进装置包装形状因子,重量以及其它制造和/或装置性能度量。
    • 6. 发明授权
    • High breakdown field emission device with tapered cylindrical spacers
    • 具有锥形圆柱形间隔件的高击穿场发射装置
    • US5777432A
    • 1998-07-07
    • US838494
    • 1997-04-07
    • Chenggang Xie
    • Chenggang Xie
    • H01J29/02H01J29/06H01J31/12H01J1/62
    • H01J29/028H01J29/06H01J31/127H01J2329/8625
    • A field emission device (100) includes a supporting substrate (110) having a major surface; a cathode (111) disposed on the major surface of the supporting substrate (110); a dielectric layer (112) disposed on the cathode (111); a gate extraction electrode (114) disposed on the dielectric layer (112); the cathode (111), the dielectric layer (112), and the gate extraction electrode (114) defining a spacer well (132); an anode plate (104) opposing the gate extraction electrode (114); a spacer (106) extending between the cathode (111) at the spacer well (132) and the anode plate (104); a first spacer shield (108) disposed within the spacer well (132) and surrounding the spacer (106); and a second spacer shield (108) affixed to the anode plate (104) and surrounding the spacer (106).
    • 场发射器件(100)包括具有主表面的支撑衬底(110) 设置在所述支撑基板(110)的主表面上的阴极(111); 布置在阴极(111)上的电介质层(112); 设置在电介质层(112)上的栅极引出电极(114); 阴极(111),电介质层(112)和栅极引出电极(114),限定间隔阱(132); 与栅极引出电极(114)相对的阳极板(104); 在间隔阱(132)的阴极(111)和阳极板(104)之间延伸的间隔物(106); 设置在所述间隔阱(132)内并围绕所述间隔物(106)的第一间隔屏蔽件(108); 以及固定到所述阳极板(104)并围绕所述间隔件(106)的第二间隔屏蔽件(108)。