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    • 1. 发明授权
    • Embedded piezoelectric resonator
    • 嵌入式压电谐振器
    • US6093997A
    • 2000-07-25
    • US128124
    • 1998-08-03
    • Charles ZimnickiJames F. Caruba
    • Charles ZimnickiJames F. Caruba
    • H01L41/053H03H9/10H03H9/17H05K1/18H01L41/04
    • H03H9/1014H01L41/053H03H9/0533H03H9/0547H05K1/182
    • A piezoelectric resonator (12) is embedded within an electrically insulating substrate assembly (36), such as a multilayer printed circuit board. Electrical conductors (22,24) extend from electrodes of the resonator (12) through holes (32) in upper and lower layers (26,29) of the substrate assembly (36) and connect to electrical traces (34). The lower layer (29) has a pocket which forms a cavity (38) within the substrate assembly (36) adapted to contain the piezoelectric resonator (12). The conductors (22,24) support the resonator (12) such that the resonator (12) does not contact the assembly (36). As the resonator is substantially larger than associated electrical components, embedding it within a substrate eliminates the size penalty that is normally required to mount a large piezoelectric resonator.
    • 压电谐振器(12)嵌入电绝缘基板组件(36)内,例如多层印刷电路板。 电导体(22,24)从谐振器(12)的电极通过衬底组件(36)的上层和下层(26,29)中的孔(32)延伸并连接到电迹线(34)。 下层(29)具有在适于容纳压电谐振器(12)的衬底组件(36)内形成空腔(38)的口袋。 导体(22,24)支撑谐振器(12),使得谐振器(12)不接触组件(36)。 由于谐振器基本上大于相关联的电气部件,将其嵌入衬底中消除了安装大压电谐振器通常需要的尺寸损失。
    • 2. 发明授权
    • Piezoelectric resonator using sacrificial layer and method of tuning same
    • 使用牺牲层的压电谐振器及其调谐方法
    • US06249074B1
    • 2001-06-19
    • US08918616
    • 1997-08-22
    • Charles ZimnickiJames F. CarubaPiyush ChaudhariTheodore Lind
    • Charles ZimnickiJames F. CarubaPiyush ChaudhariTheodore Lind
    • H01L4108
    • H03H3/04H03H2003/0428
    • A piezoelectric resonator (10) having a sacrificial mass-loading layer (16). Material is removed from the mass-loading layer (16) to raise a resonator frequency to a desired target. The sacrificial layer (16) is of a dense material, such as silver or gold, but is of such a relative thin layer that it can be used on high frequency aluminum electrodes (14) of a resonator (10) without increasing adverse spurious frequency problems. It is not necessary that the mass-loading layer (16) be conductive. In addition, the silver or gold sacrificial layer (16) can be removed by ion milling at practical and economical rates, unlike aluminum or aluminum oxide. Preferably, a diffusion barrier (18) is interposed between the electrodes (14) and the mass-loading layer (16).
    • 一种具有牺牲质量加载层(16)的压电谐振器(10)。 将材料从质量加载层(16)移除,以将谐振器频率提高到期望的目标。 牺牲层(16)具有诸如银或金的致密材料,但是具有这样的相对薄的层,其可以在谐振器(10)的高频铝电极(14)上使用,而不增加不利的杂散频率 问题。 质量加载层(16)不必导电。 此外,与铝或氧化铝不同,银或金牺牲层(16)可以通过离子铣削以实际和经济的速率除去。 优选地,在电极(14)和质量加载层(16)之间插入扩散阻挡层(18)。
    • 3. 发明授权
    • Electrode edge wave patterns for piezoelectric resonator
    • 压电谐振器的电极边缘波形图
    • US5903087A
    • 1999-05-11
    • US920442
    • 1997-08-29
    • John E. MattsonJames F. CarubaCharles ZimnickiBeverly A. Carroll
    • John E. MattsonJames F. CarubaCharles ZimnickiBeverly A. Carroll
    • H01L41/09H03H9/13H03H9/19H01L41/08
    • H03H9/132
    • A resonator (104) including a piezoelectric plate (102) with an electrode (108) having a random pattern (100) along a portion of an edge of the electrode (108). The random pattern (100) dampens or destructively interferes with undesirable and inharmonic vibrational modes. For example, a rectangular AT-cut quartz resonator, which vibrates in a thickness-shear mode may also possess undesirable flexure and face-shear modes. These modes not only present undesirable spurious frequencies, they also change over temperature, disturbing a frequency-ternperature response of the resonator. The random pattern (100) causes diffuse and/or specular scattering to reduce these undesirable modes, providing a more uniform frequency-temperature response which is beneficial in temperature compensated crystal oscillator applications.
    • 一种谐振器(104),包括具有电极(108)的压电板(102),所述电极具有沿所述电极(108)的边缘部分的随机图案(100)。 随机图案(100)抑制或破坏性地干扰不期望的和不协调的振动模式。 例如,以厚度剪切模式振动的矩形AT切割石英谐振器也可能具有不期望的弯曲和面剪切模式。 这些模式不仅存在不期望的杂散频率,它们也随温度变化,从而扰乱谐振器的频率 - 温度响应。 随机图案(100)引起扩散和/或镜面散射以减少这些不期望的模式,提供更均匀的频率 - 温度响应,这在温度补偿晶体振荡器应用中是有益的。
    • 9. 发明授权
    • Piezoelectric resonator with grid-like electrodes
    • 压电谐振器,带栅格状电极
    • US5519279A
    • 1996-05-21
    • US315048
    • 1994-09-29
    • Charles Zimnicki
    • Charles Zimnicki
    • H03H9/13H01L41/08
    • H03H9/132
    • A piezoelectric resonator (100) with an attenuated spurious response. The resonator (100) includes a piezoelectric crystal plate (102) having opposite surfaces (104, 106), electrodeS (108, 114) positioned in overlying relationship on each of the opposite surfaces (104, 106), the electrodes (108, 114) being substantially coextensive and opposite, and providing a primary frequency mode of operation and spurious modes upon suitable energization, and the electrodes (108, 114) having a grid-like structure (124) to provide a substantially uniform distribution of electrical charges over an electroded region (126).
    • 具有衰减杂散响应的压电谐振器(100)。 谐振器(100)包括具有相对表面(104,106)的压电晶体板(102),在每个相对表面(104,106)上以重叠关系定位的电极(108,114),电极(108,114) )基本上共同延伸并且相反,并且在合适的通电时提供初级频率操作模式和寄生模式,并且具有格栅状结构(124)的电极(108,114)以提供基本均匀的电荷分布 电极区域(126)。