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    • 2. 发明授权
    • Reduced area intersection between electrode and programming element
    • 电极与编程元件之间的减少交点
    • US07572666B2
    • 2009-08-11
    • US10438146
    • 2003-05-13
    • Charles H. DennisonAlice T. WangKanaiyalal Chaturbhai PatelJenn C. Chow
    • Charles H. DennisonAlice T. WangKanaiyalal Chaturbhai PatelJenn C. Chow
    • H01L21/00
    • H01L27/1021H01L21/761H01L27/24
    • A method comprising forming a first dielectric layer over an electrode formed to a first contact point on a substrate, the electrode having a contact area; patterning the first dielectric layer into a body, a thickness of the first dielectric layer defining a side wall; forming at least one spacer along the side wall of the first dielectric body, the at least one spacer overlying a portion of the contact area; forming a second dielectric layer on the contact area; removing the at least one spacer; and forming a material comprising a second contact point to the contact area. An apparatus comprising a volume of programmable material; a conductor; and an electrode disposed between the volume of programmable material and the conductor, the electrode having a contact area coupled to the volume of programmable material.
    • 一种方法,包括在形成于基底上的第一接触点的电极上形成第一介电层,所述电极具有接触面积; 将第一介电层图案化成体,第一介电层的厚度限定侧壁; 沿着所述第一电介质体的侧壁形成至少一个间隔物,所述至少一个间隔件覆盖所述接触区域的一部分; 在所述接触区域上形成第二电介质层; 去除所述至少一个间隔物; 以及形成包括接触区域的第二接触点的材料。 一种包括一定量的可编程材料的装置; 指挥 以及设置在所述可编程材料的体积和所述导体之间的电极,所述电极具有耦合到所述可编程材料的体积的接触面积。