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    • 6. 发明授权
    • Electrodepositable photoimageable compositions with improved edge
coverage
    • 具有改善的边缘覆盖的可电沉积的可光成像组合物
    • US5721088A
    • 1998-02-24
    • US580017
    • 1995-12-20
    • James W. MartinCharles F. Kahle, II
    • James W. MartinCharles F. Kahle, II
    • G03F7/032G03F7/039G03F7/16H05K3/00G03F7/004
    • G03F7/032G03F7/039G03F7/164H05K3/0076Y10S430/136
    • This invention provides an improved electrodepositable photoimageable resist composition which includes a photosensitive composition and a microgel. The photosensitive composition can be either a negative-acting or a positive-acting photoresist. Moreover, with regard to each of these, the photoresist component can be either cationic or anionic. The microgel includes a plurality of crosslinked organic particles which can form a stable aqueous dispersion. Moreover, the microgel is present in an amount ranging from between about 0.1 to about 30 weight percent. These weight percentages are based upon the total weight of the resin solids in the photoimageable resist composition. At these concentrations, the microgels promote edge coverage, but do not significantly reduce the photosensitivity and developability properties of the photosensitive composition with which they are combined.
    • 本发明提供一种改进的可电沉积光致成像抗蚀剂组合物,其包括光敏组合物和微凝胶。 光敏组合物可以是负性作用或正性光致抗蚀剂。 此外,关于这些中的每一个,光致抗蚀剂组分可以是阳离子或阴离子的。 微凝胶包括可以形成稳定的水分散体的多个交联的有机颗粒。 此外,微凝胶以约0.1至约30重量%的量存在。 这些重量百分数是基于光致成像抗蚀剂组合物中的树脂固体的总重量。 在这些浓度下,微凝胶促进边缘覆盖,但不会显着降低与它们组合的光敏组合物的光敏性和显影性。