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    • 1. 发明申请
    • SCANNING PROBE MICROSCOPY TIPS COMPOSED OF NANOPARTICLES AND METHODS TO FORM SAME
    • 扫描探针组成的纳米微粒及其形成方法
    • US20070256480A1
    • 2007-11-08
    • US11775316
    • 2007-07-10
    • Charles BlackAdam CohenChristopher MurrayRobert Sandstrom
    • Charles BlackAdam CohenChristopher MurrayRobert Sandstrom
    • G01B5/28
    • G01Q70/16G01Q70/14Y10S977/924Y10T428/254
    • A structure and method for improving the spatial resolution of a scanning probe microscope (SPM) tip, which has been coated with a layer of chemically-synthesized nanoparticles. The nanoparticles are either single-species or heterogeneous, such that the single-species nanoparticles can be either ferromagnetic, paramagnetic, superparamagnetic, antiferromagnetic, ferrimagnetic, magneto-optic, ferroelectric, piezoelectric, superconducting, semiconducting, magnetically-doped semiconducting, insulating, fluorescent, or chemically catalytic. The layer of nanoparticles is at least two nanoparticles thick, or alternatively, is a single layer of nanoparticles thick, or alternatively, is a single layer of nanoparticles thick and covers only the tip apex portion of the tip, or alternatively, only a single nanoparticle is affixed to the tip apex. Alternatively, the layer of nanoparticles is transformed into an electrically-continuous magnetic film by annealing at a high temperature.
    • 用于改善扫描探针显微镜(SPM)尖端的空间分辨率的结构和方法,其已经涂覆有化学合成的纳米颗粒层。 纳米颗粒是单种或非均质的,使得单种纳米颗粒可以是铁磁性,顺磁性,超顺磁性,反铁磁性,亚铁磁性,磁光学,铁电体,压电,超导,半导体,磁掺杂半导体,绝缘,荧光 ,或化学催化。 纳米颗粒层是至少两个纳米颗粒厚度,或者可选地,是单层纳米颗粒的厚度,或者可选地,单层纳米颗粒是厚的,并且仅覆盖尖端的顶端部分,或者仅仅是单个纳米颗粒 贴在尖端顶端。 或者,通过在高温下退火将纳米颗粒层转变成电连续的磁性膜。
    • 8. 发明申请
    • Microprobe tips and methods for making
    • 微型笔尖和制作方法
    • US20060109016A1
    • 2006-05-25
    • US11244817
    • 2005-10-06
    • Vacit AratAdam CohenDennis SmalleyEzekiel KruglickRichard ChenKieun Kim
    • Vacit AratAdam CohenDennis SmalleyEzekiel KruglickRichard ChenKieun Kim
    • G01R31/02
    • G01R1/06711G01R1/06716G01R1/06733G01R1/06744G01R3/00
    • Multilayer test probe structures are electrochemically fabricated via depositions of one or more materials in a plurality of overlaying and adhered layers. In some embodiments each probe structure may include a plurality of contact arms or contact tips that are used for contacting a specific pad or plurality of pads wherein the arms and/or tips are configured in such away so as to provide a scrubbing motion (e.g. a motion perpendicular to a primary relative movement motion between a probe carrier and the IC) as the probe element or array is made to contact an IC, or the like, and particularly when the motion between the probe or probes and the IC occurs primarily in a direction that is perpendicular to a plane of a surface of the IC. In some embodiments arrays of multiple probes are provided and even formed in desired relative position simultaneously.
    • 多层测试探针结构通过在多个覆盖层和粘附层中的一种或多种材料的沉积进行电化学制造。 在一些实施例中,每个探针结构可以包括用于接触特定垫或多个垫的多个接触臂或接触尖端,其中臂和/或尖端被配置成如此远离以提供擦洗运动(例如, 当探针元件或阵列与探针载体和IC之间的初级相对移动运动垂直的运动)与IC等接触时,特别是当探针或探针与IC之间的运动主要发生在 方向垂直于IC的表面的平面。 在一些实施例中,多个探针的阵列被提供并且甚至同时形成在期望的相对位置。