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    • 3. 发明授权
    • Method for forming metal interconnection line in semiconductor device
    • 在半导体器件中形成金属互连线的方法
    • US07135403B2
    • 2006-11-14
    • US10878288
    • 2004-06-29
    • Chang-Soo Park
    • Chang-Soo Park
    • H01L21/4763
    • H01L21/76843H01L21/76856H01L21/76876H01L21/76879
    • Disclosed is a method for forming a metal interconnection line in a semiconductor device. The method includes the steps of: forming an inter-layer insulation layer on a substrate, the inter-layer insulation layer having at least one contact hole exposing a portion of the substrate; forming a barrier metal layer on a bottom of said at least one contact hole and an upper surface of the inter-layer insulation layer; forming an amorphous seed layer on said at least one contact hole; converting portions of the seed layer disposed on an upper part of said at least one contact hole into a metal deposition blocking layer; selectively forming at least one adhesion layer on the bottom and sidewalls of said at least one contact hole by using the seed layer; and selectively forming at least one plug inside of said at least one contact hole.
    • 公开了一种在半导体器件中形成金属互连线的方法。 该方法包括以下步骤:在衬底上形成层间绝缘层,所述层间绝缘层具有暴露衬底的一部分的至少一个接触孔; 在所述至少一个接触孔的底部和所述层间绝缘层的上表面上形成阻挡金属层; 在所述至少一个接触孔上形成无定形晶种层; 将设置在所述至少一个接触孔的上部的种子层的部分转换成金属沉积阻挡层; 通过使用种子层选择性地在所述至少一个接触孔的底部和侧壁上形成至少一个粘附层; 并且在所述至少一个接触孔内选择性地形成至少一个塞子。
    • 7. 发明授权
    • Apparatus and method for gating data on a control channel in a CDMA communication system
    • 用于在CDMA通信系统中的控制信道上门控数据的装置和方法
    • US07006482B1
    • 2006-02-28
    • US09677342
    • 2000-10-02
    • Ho-Kyu ChoiChang-Soo ParkSung-Oh HwangHyun-Woo LeeJae-Min AhnYoun-Sun KimHi-Chan MoonSeong-ill Park
    • Ho-Kyu ChoiChang-Soo ParkSung-Oh HwangHyun-Woo LeeJae-Min AhnYoun-Sun KimHi-Chan MoonSeong-ill Park
    • H04B7/216
    • H04W52/56H04B2201/70709H04J13/00H04W52/16H04W52/44H04W52/58
    • A method for transmitting control data on a downlink and/or uplink channel in a base station and/or mobile station in a mobile communication system. In one embodiment, the base station determines whether there is downlink channel data to transmit to a mobile station. If there is no data to be transmitted over the downlink channel for a predetermined time period, the base station drives a random gating position selector to determine a random gating slot position, gates on the control data at the determined slot position, and gates off the control data at other slot positions. The random position selector determines the gating slot position by calculating a value x by multiplying a system frame number (SFN) of a received signal by a specific integer; selecting n bits starting from a position which is at an x-chip distance from the start point of a scrambling code, which has a period equal to one frame, before a plurality of gating durations used in generating a downlink signal; and determining a gating slot position of a corresponding gating slot group by performing a modulo operation on the selected n bits, where the module operation is by the number of slots in a gating slot group.
    • 一种用于在移动通信系统中的基站和/或移动台中的下行链路和/或上行链路信道上发送控制数据的方法。 在一个实施例中,基站确定是否存在要向移动台发送的下行链路信道数据。 如果在预定时间段内没有要通过下行链路信道发送的数据,则基站驱动随机门控位置选择器以确定随机门控时隙位置,在所确定的时隙位置对控制数据进行门控,并关闭 在其他插槽位置控制数据。 随机位置选择器通过将接收信号的系统帧号(SFN)乘以特定整数来计算值x来确定选通时隙位置; 在用于生成下行链路信号的多个选通持续时间之前,从具有周期等于一帧的扰码开始点处的x码片距离的位置开始选择n个比特; 以及通过对所选择的n位执行模运算来确定对应的门控时隙组的门控时隙位置,其中模块操作是通过门控时隙组中的时隙数量。
    • 8. 发明申请
    • Method for forming metal interconnection line in semiconductor device
    • 在半导体器件中形成金属互连线的方法
    • US20050085070A1
    • 2005-04-21
    • US10878288
    • 2004-06-29
    • Chang-Soo Park
    • Chang-Soo Park
    • H01L21/28H01L21/4763H01L21/768
    • H01L21/76843H01L21/76856H01L21/76876H01L21/76879
    • Disclosed is a method for forming a metal interconnection line in a semiconductor device. The method includes the steps of: forming an inter-layer insulation layer on a substrate, the inter-layer insulation layer having at least one contact hole exposing a portion of the substrate; forming a barrier metal layer on a bottom of said at least one contact hole and an upper surface of the inter-layer insulation layer; forming an amorphous seed layer on said at least one contact hole; converting portions of the seed layer disposed on an upper part of said at least one contact hole into a metal deposition blocking layer; selectively forming at least one adhesion layer on the bottom and sidewalls of said at least one contact hole by using the seed layer; and selectively forming at least one plug inside of said at least one contact hole.
    • 公开了一种在半导体器件中形成金属互连线的方法。 该方法包括以下步骤:在衬底上形成层间绝缘层,所述层间绝缘层具有暴露衬底的一部分的至少一个接触孔; 在所述至少一个接触孔的底部和所述层间绝缘层的上表面上形成阻挡金属层; 在所述至少一个接触孔上形成无定形晶种层; 将设置在所述至少一个接触孔的上部的种子层的部分转换成金属沉积阻挡层; 通过使用种子层选择性地在所述至少一个接触孔的底部和侧壁上形成至少一个粘附层; 并且在所述至少一个接触孔内选择性地形成至少一个塞子。
    • 9. 发明授权
    • Apparatus and method for gated transmission in a CDMA communication system
    • CDMA通信系统中门控传输的装置和方法
    • US06747963B1
    • 2004-06-08
    • US09547886
    • 2000-04-12
    • Chang-Soo ParkJae-Min AhnHyun-Woo Lee
    • Chang-Soo ParkJae-Min AhnHyun-Woo Lee
    • H04B7216
    • H04W52/58H04B1/707H04W28/06H04W52/42H04W52/44H04W52/60H04W72/1273
    • A method and device for gating the transmission of dedicated control channels in a CDMA communication system is disclosed. In the device and method, if a base station (mobile station) determines whether there is no data to transmit to a mobile station (base station) for predetermined period of time, the base station (mobile station) gates transmission of control information according to a predetermined pattern on a dedicated control channel, which channel is used for transmitting control information to the mobile station (base station). Control information transmitted from the base station to the mobile station includes Transport Format Combination Indicator (TFCI), Transmit Power Control (TPC), and a pilot symbol. Control information transmitted from the mobile station to the base station includes TFCI, TPC, a pilot symbol, and FeedBack Information (FBI) for information about a transmit diversity antenna system. In a downlink DPCCH, transmission of the TFCI, TPC and pilot symbol is transmitted discontinuously at every predetermined nth slot out of the total slots of a frame during gated transmission. Alternatively, transmission of the pilot symbol can be transmitted discontinuously at every predetermined nth slot and the TFCI and the TPC at every (n+1)th slot. In an uplink DPCCH, the TFCI, TPC, FBI and pilot symbol are transmitted discontinuously at a specific slot during gated transmission. In addition, the TPC for power control can be continuously transmitted for full rate power control when there is traffic data for transmission.
    • 公开了一种在CDMA通信系统中选通专用控制信道的传输的方法和装置。 在该装置和方法中,如果基站(移动台)在预定时间段内确定是否没有向移动台(基站)发送的数据,则基站(移动台)根据 在专用控制信道上的预定模式,该信道用于向移动台(基站)发送控制信息。 从基站发送到移动台的控制信息包括传输格式组合指示符(TFCI),发射功率控制(TPC)和导频符号。 从移动站发送到基站的控制信息包括用于关于发射分集天线系统的信息的TFCI,TPC,导频符号和反馈信息(FBB)。 在下行链路DPCCH中,在门控传输期间,在帧的总时隙中的每个预定第n个时隙,TFCI,TPC和导频符号的传输是不连续的。 或者,导频符号的传输可以在每个预定的第n个时隙不连续地发送,并且可以在第(n + 1)个时隙发送TFCI和TPC。 在上行链路DPCCH中,在门控发送期间,TFCI,TPC,FBI和导频符号在特定时隙不连续地发送。 另外,当存在用于传输的业务数据时,用于功率控制的TPC可以被连续发送用于全速率功率控制。