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    • 3. 发明授权
    • Beam pen lithography
    • 光笔光刻
    • US09021611B2
    • 2015-04-28
    • US13202142
    • 2010-02-18
    • Chad A. MirkinGengfeng ZhengFengwei Huo
    • Chad A. MirkinGengfeng ZhengFengwei Huo
    • G03F7/20
    • G03F7/2051G03F7/70291G03F7/70383G03F7/70466G03F7/70525G03F7/70958
    • The disclosure relates to methods of beam pen lithography using a tip array having a plurality of transparent, elastomeric, reversibly-deformable tips coated with a blocking layer and apertures defined in the blocking layer to expose tip ends of the tips in the array. The tip array can be used to perform a photolithography process in which the tips are illuminated with a radiation that is channeled through the tips and out the apertures to expose a photosensitive substrate. Also disclosed are tip arrays formed of polymers and gels, apparatus including the tip arrays and radiation sources, and related apparatus for selectively masking tips in the tip array from radiation emitted from the radiation source.
    • 本公开涉及使用具有多个透明,弹性,可逆变形的尖端的尖端阵列的光笔笔光刻方法,所述尖端涂覆有阻挡层和限定在阻挡层中的孔,以暴露阵列中尖端的尖端。 尖端阵列可以用于执行光刻工艺,其中尖端被通过尖端引导的辐射照射并且出射孔以暴露感光基底。 还公开了由聚合物和凝胶形成的尖端阵列,包括尖端阵列和辐射源的装置以及用于从辐射源发射的辐射中选择性地遮蔽尖端阵列中的尖端的相关装置。