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1. 发明授权

US07442977B2 Gated field effect devices 失效
标题翻译：门控场效应器件
公开(公告)号：US07442977B2
公开(公告)日：2008-10-28
申请号：US11253461
申请日：2005-10-19
申请人： Cem Basceri , H. Montgomery Manning , Gurtej S. Sandhu , Kunal R. Parekh
发明人： Cem Basceri , H. Montgomery Manning , Gurtej S. Sandhu , Kunal R. Parekh
IPC分类号： H01L27/108
CPC分类号： H01L29/4983 , H01L21/28194 , H01L29/512 , H01L29/517
摘要： This invention includes gated field effect devices, and methods of forming gated field effect devices. In one implementation, a gated field effect device includes a pair of source/drain regions having a channel region therebetween. A gate is received proximate the channel region between the source/drain regions. The gate has a gate width between the source/drain regions. A gate dielectric is received intermediate the channel region and the gate. The gate dielectric has at least two different regions along the width of the gate. The different regions are characterized by different materials which are effective to define the two different regions to have different dielectric constants k. Other aspects and implementations are contemplated.
摘要翻译：本发明包括门控场效应器件，以及形成门控场效应器件的方法。在一种实施方案中，门控场效应器件包括在其间具有沟道区的一对源/漏区。在源极/漏极区域之间的沟道区域附近接收栅极。栅极在源极/漏极区之间具有栅极宽度。栅极电介质被接收在沟道区域和栅极之间。栅极电介质沿着栅极的宽度具有至少两个不同的区域。不同的区域由不同的材料表征，其有效地限定两个不同的区域以具有不同的介电常数k。考虑了其他方面和实现。

2. 发明授权

US07767525B2 Methods of forming vertical transistor structures 有权
公开(公告)号：US07767525B2
公开(公告)日：2010-08-03
申请号：US11486524
申请日：2006-07-13
申请人： H. Montgomery Manning , Kunal R. Parekh , Cem Basceri , Gurtej S. Sandhu
发明人： H. Montgomery Manning , Kunal R. Parekh , Cem Basceri , Gurtej S. Sandhu
IPC分类号： H01L21/336
CPC分类号： H01L29/66787 , H01L27/10808 , H01L27/10876
摘要： The invention includes methods in which an angled implant is utilized to self-align a source/drain region implant with the top edge of a gateline of a vertical transistor structure. The invention also includes methods in which an angled implant is utilized to implant dopant beneath the gateline of a vertical transistor structure. Vertical transistor structures formed in accordance with methodology of the present invention can be incorporated into various types of integrated circuitry, including, for example, DRAM arrays.

3. 发明授权

US07687358B2 Methods of forming a gated device 有权
标题翻译：形成门控装置的方法
公开(公告)号：US07687358B2
公开(公告)日：2010-03-30
申请号：US11171873
申请日：2005-06-30
申请人： Cem Basceri , H. Montgomery Manning , Gurtej S. Sandhu , Kunal R. Parekh
发明人： Cem Basceri , H. Montgomery Manning , Gurtej S. Sandhu , Kunal R. Parekh
IPC分类号： H01L21/336
CPC分类号： H01L29/4983 , H01L21/28194 , H01L29/512 , H01L29/517
摘要： This invention includes gated field effect devices, and methods of forming gated field effect devices. In one implementation, a gated field effect device includes a pair of source/drain regions having a channel region therebetween. A gate is received proximate the channel region between the source/drain regions. The gate has a gate width between the source/drain regions. A gate dielectric is received intermediate the channel region and the gate. The gate dielectric has at least two different regions along the width of the gate. The different regions are characterized by different materials which are effective to define the two different regions to have different dielectric constants k. Other aspects and implementations are contemplated.
摘要翻译：本发明包括门控场效应器件，以及形成门控场效应器件的方法。在一种实施方案中，门控场效应器件包括在其间具有沟道区的一对源/漏区。在源极/漏极区域之间的沟道区域附近接收栅极。栅极在源极/漏极区之间具有栅极宽度。栅极电介质被接收在沟道区域和栅极之间。栅极电介质沿着栅极的宽度具有至少两个不同的区域。不同的区域由不同的材料表征，其有效地限定两个不同的区域以具有不同的介电常数k。考虑了其他方面和实现。

4. 发明授权

US07846798B2 Methods of forming vertical transistor structures 有权
标题翻译：形成垂直晶体管结构的方法
公开(公告)号：US07846798B2
公开(公告)日：2010-12-07
申请号：US11486512
申请日：2006-07-13
申请人： H. Montgomery Manning , Kunal R. Parekh , Cem Basceri , Gurtej S. Sandhu
发明人： H. Montgomery Manning , Kunal R. Parekh , Cem Basceri , Gurtej S. Sandhu
IPC分类号： H01L21/336
CPC分类号： H01L29/66787 , H01L27/10808 , H01L27/10876
摘要： The invention includes methods in which an angled implant is utilized to self-align a source/drain region implant with the top edge of a gateline of a vertical transistor structure. The invention also includes methods in which an angled implant is utilized to implant dopant beneath the gateline of a vertical transistor structure. Vertical transistor structures formed in accordance with methodology of the present invention can be incorporated into various types of integrated circuitry, including, for example, DRAM arrays.
摘要翻译：本发明包括这样的方法，其中使用成角度的注入来使源极/漏极区域注入与垂直晶体管结构的天线的顶部边缘自对准。本发明还包括其中使用成角度的植入物以在垂直晶体管结构的栅极下注入掺杂剂的方法。根据本发明的方法形成的垂直晶体管结构可以结合到各种类型的集成电路中，包括例如DRAM阵列。

5. 发明授权

US07161203B2 Gated field effect device comprising gate dielectric having different K regions 有权
标题翻译：门极场效应器件包括具有不同K区域的栅极电介质
公开(公告)号：US07161203B2
公开(公告)日：2007-01-09
申请号：US10861744
申请日：2004-06-04
申请人： Cem Basceri , H. Montgomery Manning , Gurtej S. Sandhu , Kunal R. Parekh
发明人： Cem Basceri , H. Montgomery Manning , Gurtej S. Sandhu , Kunal R. Parekh
IPC分类号： H01L27/108
CPC分类号： H01L29/4983 , H01L21/28194 , H01L29/512 , H01L29/517
摘要： This invention includes gated field effect devices, and methods of forming gated field effect devices. In one implementation, a gated field effect device includes a pair of source/drain regions having a channel region therebetween. A gate is received proximate the channel region between the source/drain regions. The gate has a gate width between the source/drain regions. A gate dielectric is received intermediate the channel region and the gate. The gate dielectric has at least two different regions along the width of the gate. The different regions are characterized by different materials which are effective to define the two different regions to have different dielectric constants k. Other aspects and implementations are contemplated.
摘要翻译：本发明包括门控场效应器件，以及形成门控场效应器件的方法。在一种实施方案中，门控场效应器件包括在其间具有沟道区的一对源/漏区。在源极/漏极区域之间的沟道区域附近接收栅极。栅极在源极/漏极区之间具有栅极宽度。栅极电介质被接收在沟道区域和栅极之间。栅极电介质沿着栅极的宽度具有至少两个不同的区域。不同的区域由不同的材料表征，其有效地限定两个不同的区域以具有不同的介电常数k。考虑了其他方面和实现。

6. 发明授权

US08409933B2 Methods of forming conductive contacts to source/drain regions and methods of forming local interconnects 有权
公开(公告)号：US08409933B2
公开(公告)日：2013-04-02
申请号：US13302231
申请日：2011-11-22
申请人： Cem Basceri , Gurtej S. Sandhu , H. Montgomery Manning
发明人： Cem Basceri , Gurtej S. Sandhu , H. Montgomery Manning
IPC分类号： H01L21/82 , H01L21/338 , H01L21/326
CPC分类号： H01L21/76823 , H01L21/28512 , H01L21/76895 , Y10T428/12542
摘要： The invention comprises methods of forming a conductive contact to a source/drain region of a field effect transistor, and methods of forming local interconnects. In one implementation, a method of forming a conductive contact to a source/drain region of a field effect transistor includes providing gate dielectric material intermediate a transistor gate and a channel region of a field effect transistor. At least some of the gate dielectric material extends to be received over at least one source/drain region of the field effect transistor. The gate dielectric material received over the one source/drain region is exposed to conditions effective to change it from being electrically insulative to being electrically conductive and in conductive contact with the one source/drain region. Other aspects and implementations are contemplated.

7. 发明授权

US08084142B2 Methods of forming conductive contacts to source/drain regions and methods of forming local interconnects 有权
标题翻译：向源极/漏极区形成导电接触的方法以及形成局部互连的方法
公开(公告)号：US08084142B2
公开(公告)日：2011-12-27
申请号：US11525762
申请日：2006-09-21
申请人： Cem Basceri , Gurtej S. Sandhu , H. Montgomery Manning
发明人： Cem Basceri , Gurtej S. Sandhu , H. Montgomery Manning
IPC分类号： H01L21/44 , H01L21/4763 , H01L29/40
CPC分类号： H01L21/76823 , H01L21/28512 , H01L21/76895 , Y10T428/12542
摘要： The invention comprises methods of forming a conductive contact to a source/drain region of a field effect transistor, and methods of forming local interconnects. In one implementation, a method of forming a conductive contact to a source/drain region of a field effect transistor includes providing gate dielectric material intermediate a transistor gate and a channel region of a field effect transistor. At least some of the gate dielectric material extends to be received over at least one source/drain region of the field effect transistor. The gate dielectric material received over the one source/drain region is exposed to conditions effective to change it from being electrically insulative to being electrically conductive and in conductive contact with the one source/drain region. Other aspects and implementations are contemplated.
摘要翻译：本发明包括形成对场效应晶体管的源极/漏极区的导电接触的方法，以及形成局部互连的方法。在一个实施方案中，形成到场效应晶体管的源/漏区的导电接触的方法包括在晶体管栅极和场效应晶体管的沟道区之间提供栅介质材料。至少一些栅极电介质材料延伸以在场效应晶体管的至少一个源极/漏极区域上接收。接收在一个源极/漏极区域上的栅极电介质材料暴露于有效地将其从电绝缘转变为导电并与一个源极/漏极区域导电接触的条件。考虑了其他方面和实现。

8. 发明授权

US07923308B2 Methods of forming conductive contacts to source/drain regions and methods of forming local interconnects 有权
公开(公告)号：US07923308B2
公开(公告)日：2011-04-12
申请号：US11478715
申请日：2006-06-30
申请人： Cem Basceri , Gurtej S. Sandhu , H. Montgomery Manning
发明人： Cem Basceri , Gurtej S. Sandhu , H. Montgomery Manning
IPC分类号： H01L21/332 , H01L21/336 , H01L21/4763
CPC分类号： H01L21/76823 , H01L21/28512 , H01L21/76895 , Y10T428/12542
摘要： The invention comprises methods of forming a conductive contact to a source/drain region of a field effect transistor, and methods of forming local interconnects. In one implementation, a method of forming a conductive contact to a source/drain region of a field effect transistor includes providing gate dielectric material intermediate a transistor gate and a channel region of a field effect transistor. At least some of the gate dielectric material extends to be received over at least one source/drain region of the field effect transistor. The gate dielectric material received over the one source/drain region is exposed to conditions effective to change it from being electrically insulative to being electrically conductive and in conductive contact with the one source/drain region. Other aspects and implementations are contemplated.

9. 发明授权

US07572710B2 Methods of forming conductive contacts to source/drain regions and methods of forming local interconnects 失效
标题翻译：向源极/漏极区形成导电接触的方法以及形成局部互连的方法
公开(公告)号：US07572710B2
公开(公告)日：2009-08-11
申请号：US11525707
申请日：2006-09-21
申请人： Cem Basceri , Gurtej S. Sandhu , H. Montgomery Manning
发明人： Cem Basceri , Gurtej S. Sandhu , H. Montgomery Manning
IPC分类号： H01L21/338 , H01L21/337 , H01L21/8238 , H01L21/8234 , H01L21/8242 , H01L21/8222 , H01L21/20 , H01L21/4763
CPC分类号： H01L21/76823 , H01L21/28512 , H01L21/76895 , Y10T428/12542
摘要： The invention comprises methods of forming a conductive contact to a source/drain region of a field effect transistor, and methods of forming local interconnects. In one implementation, a method of forming a conductive contact to a source/drain region of a field effect transistor includes providing gate dielectric material intermediate a transistor gate and a channel region of a field effect transistor. At least some of the gate dielectric material extends to be received over at least one source/drain region of the field effect transistor. The gate dielectric material received over the one source/drain region is exposed to conditions effective to change it from being electrically insulative to being electrically conductive and in conductive contact with the one source/drain region. Other aspects and implementations are contemplated.
摘要翻译：本发明包括形成对场效应晶体管的源极/漏极区的导电接触的方法，以及形成局部互连的方法。在一个实施方案中，形成到场效应晶体管的源/漏区的导电接触的方法包括在晶体管栅极和场效应晶体管的沟道区之间提供栅介质材料。至少一些栅极电介质材料延伸以在场效应晶体管的至少一个源极/漏极区域上接收。接收在一个源极/漏极区域上的栅极电介质材料暴露于有效地将其从电绝缘转变为导电并与一个源极/漏极区域导电接触的条件。考虑了其他方面和实现。

10. 发明申请

US20120070955A1 Methods of Forming Conductive Contacts to Source/Drain Regions and Methods of Forming Local Interconnects 有权
标题翻译：形成导电接触器到源/排放区域的方法和形成局部互连的方法
公开(公告)号：US20120070955A1
公开(公告)日：2012-03-22
申请号：US13302231
申请日：2011-11-22
申请人： Cem Basceri , Gurtej S. Sandhu , H. Montgomery Manning
发明人： Cem Basceri , Gurtej S. Sandhu , H. Montgomery Manning
IPC分类号： H01L21/02
CPC分类号： H01L21/76823 , H01L21/28512 , H01L21/76895 , Y10T428/12542
摘要： The invention comprises methods of forming a conductive contact to a source/drain region of a field effect transistor, and methods of forming local interconnects. In one implementation, a method of forming a conductive contact to a source/drain region of a field effect transistor includes providing gate dielectric material intermediate a transistor gate and a channel region of a field effect transistor. At least some of the gate dielectric material extends to be received over at least one source/drain region of the field effect transistor. The gate dielectric material received over the one source/drain region is exposed to conditions effective to change it from being electrically insulative to being electrically conductive and in conductive contact with the one source/drain region. Other aspects and implementations are contemplated.
摘要翻译：本发明包括形成对场效应晶体管的源极/漏极区的导电接触的方法，以及形成局部互连的方法。在一个实施方案中，形成到场效应晶体管的源/漏区的导电接触的方法包括在晶体管栅极和场效应晶体管的沟道区之间提供栅介质材料。至少一些栅极电介质材料延伸以在场效应晶体管的至少一个源极/漏极区域上接收。接收在一个源极/漏极区域上的栅极电介质材料暴露于有效地将其从电绝缘转变为导电并与一个源极/漏极区域导电接触的条件。考虑了其他方面和实现。

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