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1. 发明申请

US20080296305A1 Fluid Storage and Purification Method and System 审中-公开
标题翻译：流体储存和净化方法与系统
公开(公告)号：US20080296305A1
公开(公告)日：2008-12-04
申请号：US11772174
申请日：2007-06-30
申请人： Carrie L. Wyse , Robert Torres , Andrew R. Millward , Richard D. Noble , Jason Edward Bara , Douglas Gin
发明人： Carrie L. Wyse , Robert Torres , Andrew R. Millward , Richard D. Noble , Jason Edward Bara , Douglas Gin
IPC分类号： C07D403/04 , C07D233/58 , B65D90/02
CPC分类号： F17C11/00 , C01B7/01 , C01B7/20 , C01B13/0281 , C07D403/06 , C07D403/12 , F17C11/005 , Y10T137/0318
摘要： A method and device for storing and dispensing a fluid includes providing a vessel configured for selective dispensing of the fluid therefrom. Provided within a vessel is a nancomposite material comprising an imidazolium surfactant and an integral solvent that is essential to the formation of the nancomposite material. The fluid is contacted with the nanocomposite material for take-up of the fluid by the polymerized nanocomposite material. The fluid is released from the nanocomposite material and dispensed from the vessel.
摘要翻译：用于存储和分配流体的方法和装置包括提供构造用于从其中选择性地分配流体的容器。提供在容器内的是纳米复合材料，其包含咪唑表面活性剂和对形成纳米复合材料至关重要的整体溶剂。流体与纳米复合材料接触，用于通过聚合的纳米复合材料吸收流体。流体从纳米复合材料释放并从容器中分配。

2. 发明授权

US07955416B2 Polymerized polymeric fluid storage and purification method and system 失效
标题翻译：聚合聚合物流体储存和净化方法及系统
公开(公告)号：US07955416B2
公开(公告)日：2011-06-07
申请号：US12329440
申请日：2008-12-05
申请人： Carrie L. Wyse , Robert Torres , Andrew R. Millward
发明人： Carrie L. Wyse , Robert Torres , Andrew R. Millward
IPC分类号： B01D53/04 , B65D81/00
CPC分类号： B01D15/00 , B01D53/0407 , B01D53/1493 , B01D2252/30 , B01D2253/102 , B01D2253/108 , B01D2253/11 , B01D2253/202 , B01D2253/204 , B01D2257/104 , B01D2257/2047 , B01D2257/302 , B01D2257/404 , B01D2257/502 , B01D2257/504 , B01D2257/80 , B01D2259/4525 , B01J20/26 , F17C11/00 , Y02C10/08 , Y10S95/90
摘要： A method of storing and dispensing a fluid includes providing a vessel configured for selective dispensing of the fluid therefrom. A polymerized polymeric material is provided within the vessel. The fluid is contacted with the polymerized polymeric material for take-up of the fluid by the polymerized polymeric material. The fluid is released from the polymerized polymeric material and dispensed from the vessel.
摘要翻译：存储和分配流体的方法包括提供构造用于从其中选择性地分配流体的容器。在容器内提供聚合的聚合材料。流体与聚合的聚合材料接触，用于通过聚合的聚合物材料吸收流体。流体从聚合的聚合物材料中释放并从容器中分配。

3. 发明申请

US20100140175A1 POLYMERIZED POLYMERIC FLUID STORAGE AND PURIFICATION METHOD AND SYSTEM 失效
标题翻译：聚合聚合物流体储存和纯化方法与系统
公开(公告)号：US20100140175A1
公开(公告)日：2010-06-10
申请号：US12329440
申请日：2008-12-05
申请人： Carrie L. Wyse , Robert Torres , Andrew R. Millward
发明人： Carrie L. Wyse , Robert Torres , Andrew R. Millward
IPC分类号： B01D15/04 , C07K1/14 , B01D39/00 , B67D5/60 , C07H1/06
CPC分类号： B01D15/00 , B01D53/0407 , B01D53/1493 , B01D2252/30 , B01D2253/102 , B01D2253/108 , B01D2253/11 , B01D2253/202 , B01D2253/204 , B01D2257/104 , B01D2257/2047 , B01D2257/302 , B01D2257/404 , B01D2257/502 , B01D2257/504 , B01D2257/80 , B01D2259/4525 , B01J20/26 , F17C11/00 , Y02C10/08 , Y10S95/90
摘要： A method of storing and dispensing a fluid includes providing a vessel configured for selective dispensing of the fluid therefrom. A polymerized polymeric material is provided within the vessel. The fluid is contacted with the polymerized polymeric material for take-up of the fluid by the polymerized polymeric material. The fluid is released from the polymerized polymeric material and dispensed from the vessel.
摘要翻译：存储和分配流体的方法包括提供构造用于从其中选择性地分配流体的容器。在容器内提供聚合的聚合材料。流体与聚合的聚合材料接触，用于通过聚合的聚合物材料吸收流体。流体从聚合的聚合物材料中释放并从容器中分配。

4. 发明申请

US20140060571A1 IN-SITU GENERATION OF THE MOLECULAR ETCHER CARBONYL FLUORIDE OR ANY OF ITS VARIANTS AND ITS USE 有权
标题翻译：分子氧化碳氟化物或任何其变体及其使用的现场生成
公开(公告)号：US20140060571A1
公开(公告)日：2014-03-06
申请号：US13831613
申请日：2013-03-15
申请人： Glenn Mitchell , Ramkumar Subramanian , Carrie L. Wyse , Robert Torres, JR.
发明人： Glenn Mitchell , Ramkumar Subramanian , Carrie L. Wyse , Robert Torres, JR.
IPC分类号： B01J19/08 , B08B7/00 , B01J19/12
CPC分类号： B01J19/087 , B01J19/081 , B01J19/088 , B01J19/123 , B01J19/125 , B01J19/126 , B01J19/127 , B01J19/128 , B01J19/129 , B01J2219/0883 , B01J2219/0892 , C01B31/00 , C01B32/00 , C01B32/80 , C23C16/4405 , H01L21/31116 , Y02C20/30 , Y02P70/605
摘要： The molecular etcher carbonyl fluoride (COF2) or any of its variants, are provided for, according to the present invention, to increase the efficiency of etching and/or cleaning and/or removal of materials such as the unwanted film and/or deposits on the chamber walls and other components in a process chamber or substrate (collectively referred to herein as “materials”). The methods of the present invention involve igniting and sustaining a plasma, whether it is a remote or in-situ plasma, by stepwise addition of additives, such as but not limited to, a saturated, unsaturated or partially unsaturated perfluorocarbon compound (PFC) having the general formula (CyFz) and/or an oxide of carbon (COx) to a nitrogen trifluoride (NF3) plasma into a chemical deposition chamber (CVD) chamber, thereby generating COF2. The NF3 may be excited in a plasma inside the CVD chamber or in a remote plasma region upstream from the CVD chamber. The additive(s) may be introduced upstream or downstream of the remote plasma such that both NF3 and the additive(s) (and any plasma-generated effluents) are present in the CVD chamber during cleaning.
摘要翻译：根据本发明，提供分子蚀刻剂碳酰氟（COF 2）或其任何变体，以提高蚀刻和/或清洁和/或去除诸如不需要的膜和/或沉积物之类的材料的效率处理室或基板（这里统称为“材料”）中的室壁和其它部件。本发明的方法包括通过逐步添加添加剂，例如但不限于饱和的，不饱和的或部分不饱和的全氟化碳化合物（PFC）来点燃和维持等离子体，无论是远距离还是原位等离子体，其具有通式（CyFz）和/或碳（COx）与三氟化氮（NF3）等离子体的氧化物进入化学沉积室（CVD）室，从而产生COF 2。 NF 3可以在CVD室内的等离子体中或在CVD室上游的远程等离子体区域中被激发。添加剂可以被引入远程等离子体的上游或下游，使得NF 3和添加剂（和任何等离子体产生的流出物）在清洁期间都存在于CVD室中。

5. 发明授权

US07670490B2 Fluid storage and purification method and system 失效
标题翻译：流体储存和净化方法和系统
公开(公告)号：US07670490B2
公开(公告)日：2010-03-02
申请号：US11155303
申请日：2005-06-17
申请人： Carrie L. Wyse , Robert Torres, Jr. , Tadaharu Watanabe , Joseph V. Vininski
发明人： Carrie L. Wyse , Robert Torres, Jr. , Tadaharu Watanabe , Joseph V. Vininski
IPC分类号： B01D11/00
CPC分类号： F17C11/00 , B01D11/0288 , G06Q99/00 , Y10T137/0318 , Y10T137/0379 , Y10T137/0396
摘要： A method of storing and dispensing a fluid includes providing a vessel configured for selective dispensing of the fluid therefrom. The vessel contains an ionic liquid therein. The fluid is contacted with the ionic liquid for take-up of the fluid by the ionic liquid. There is substantially no chemical change in the ionic liquid and the fluid. The fluid is released from the ionic liquid and dispensed from the vessel.
摘要翻译：存储和分配流体的方法包括提供构造用于从其中选择性地分配流体的容器。容器中含有离子液体。流体与离子液体接触，用于通过离子液体吸收流体。离子液体和流体基本上没有化学变化。流体从离子液体中释放并从容器中分配。

6. 发明申请

US20080211118A1 FLUID STORAGE AND DISPENSING APPARATUS 审中-公开
标题翻译：流体储存和分配装置
公开(公告)号：US20080211118A1
公开(公告)日：2008-09-04
申请号：US12050446
申请日：2008-03-18
申请人： Carrie L. Wyse , Robert Torres , Tadaharu Watanabe , Joseph V. Vininski
发明人： Carrie L. Wyse , Robert Torres , Tadaharu Watanabe , Joseph V. Vininski
IPC分类号： B01F3/04
CPC分类号： F17C11/00 , B01D11/0288 , G06Q99/00 , Y10T137/0318 , Y10T137/0379 , Y10T137/0396
摘要： A method of storing and dispensing a fluid includes providing a vessel configured for selective dispensing of the fluid therefrom. The vessel contains an ionic liquid therein. The fluid is contacted with the ionic liquid for take-up of the fluid by the ionic liquid. There is substantially no chemical change in the ionic liquid and the fluid. The fluid is released from the ionic liquid and dispensed from the vessel.
摘要翻译：存储和分配流体的方法包括提供构造用于从其中选择性地分配流体的容器。容器中含有离子液体。流体与离子液体接触，用于通过离子液体吸收流体。离子液体和流体基本上没有化学变化。流体从离子液体中释放并从容器中分配。

7. 发明授权

US08425978B2 Fluorine compounds for doping conductive oxide thin films 失效
标题翻译：用于掺杂导电氧化物薄膜的氟化合物
公开(公告)号：US08425978B2
公开(公告)日：2013-04-23
申请号：US12884490
申请日：2010-09-17
申请人： Tim Gessert , Xiaonan Li , Teresa M. Barnes , Robert Torres, Jr. , Carrie L. Wyse
发明人： Tim Gessert , Xiaonan Li , Teresa M. Barnes , Robert Torres, Jr. , Carrie L. Wyse
IPC分类号： C23C16/00 , C23C16/08
CPC分类号： C23C16/45523 , C23C16/407 , C23C16/50
摘要： Methods of forming a conductive fluorine-doped metal oxide layer on a substrate by chemical vapor deposition are described. The methods may include heating the substrate in a processing chamber, and introducing a metal-containing precursor and a fluorine-containing precursor to the processing chamber. The methods may also include adding an oxygen-containing precursor to the processing chamber. The precursors are reacted to deposit the fluorine-doped metal oxide layer on the substrate. Methods may also include forming the conductive fluorine-doped metal oxide layer by plasma-assisted chemical vapor deposition. These methods may include providing the substrate in a processing chamber, and introducing a metal-containing precursor, and a fluorine-containing precursor to the processing chamber. A plasma may be formed that includes species from the metal-containing precursor and the fluorine-containing precursor. The species may react to deposit the fluorine-doped metal oxide layer on the substrate.
摘要翻译：描述了通过化学气相沉积在衬底上形成导电氟掺杂金属氧化物层的方法。所述方法可以包括在处理室中加热衬底，并将含金属的前体和含氟前体引入到处理室中。所述方法还可以包括向处理室中加入含氧前体。使前体反应以在衬底上沉积氟掺杂的金属氧化物层。方法还可以包括通过等离子体辅助化学气相沉积形成导电性氟掺杂金属氧化物层。这些方法可以包括在处理室中提供衬底，并将含金属的前体和含氟前体引入处理室。可以形成包括来自含金属的前体和含氟前体的物质的等离子体。该物质可以反应以在衬底上沉积氟掺杂的金属氧化物层。

8. 发明申请

US20090317317A1 Fluid Storage and Purification Method and System 失效
标题翻译：流体储存和净化方法与系统
公开(公告)号：US20090317317A1
公开(公告)日：2009-12-24
申请号：US12551627
申请日：2009-09-01
申请人： Carrie L. Wyse , Robert Torres, JR. , Joseph V. Vininski
发明人： Carrie L. Wyse , Robert Torres, JR. , Joseph V. Vininski
IPC分类号： B01D19/00 , C01B6/10 , C01B33/08 , C01B25/00 , C01B6/00 , C01B7/07
CPC分类号： F17C11/00 , B01D11/0288 , G06Q99/00 , Y10T137/0318 , Y10T137/0379 , Y10T137/0396
摘要： A method of storing and dispensing a fluid includes providing a vessel configured for selective dispensing of the fluid therefrom. A solvent mixture comprising an ionic liquid and a cosolvent is provided within the vessel. The fluid is contacted with the solvent mixture for take-up of the fluid by the solvent mixture. The fluid is released from the ionic liquid and dispensed from the vessel.
摘要翻译：存储和分配流体的方法包括提供构造用于从其中选择性地分配流体的容器。在容器内提供包含离子液体和助溶剂的溶剂混合物。流体与溶剂混合物接触，以通过溶剂混合物吸收流体。流体从离子液体中释放并从容器中分配。

9. 发明授权

US08142549B2 Purification of fluorine containing gases and systems and materials thereof 有权
标题翻译：含氟气体的净化及其系统及其材料
公开(公告)号：US08142549B2
公开(公告)日：2012-03-27
申请号：US12411646
申请日：2009-03-26
申请人： Andrew Millward , Joseph V. Vininski , Robert Torres, Jr. , Tadaharu Wantanbe , Carrie L. Wyse , Mark Raynor , Dan Davia , Praveen Jha
发明人： Andrew Millward , Joseph V. Vininski , Robert Torres, Jr. , Tadaharu Wantanbe , Carrie L. Wyse , Mark Raynor , Dan Davia , Praveen Jha
IPC分类号： B01D53/02
CPC分类号： B01D53/261 , B01D53/04 , B01D2253/102 , B01D2257/2045 , B01D2257/2066 , B01D2257/50
摘要： A method of reducing moisture in a fluorine-containing gas is described. The method may include the steps of providing a purifier material that includes elemental carbon, and flowing the unpurified fluorine-containing gas having an unpurified moisture concentration over or through the carbon-based purifier material. At least a portion of the moisture is captured in the purifier material so that a purified fluorine-containing gas that emerges downstream of the purifier material has a reduced moisture concentration that is about 50% or less of the unpurified moisture concentration.
摘要翻译：描述了一种减少含氟气体中的水分的方法。该方法可以包括以下步骤：提供包括元素碳的净化剂材料，并且将未纯化的水分浓度的未纯化的含氟气体流过碳基净化器材料。至少一部分水分被捕获在净化器材料中，使得出现在净化器材料下游的纯化的含氟气体的水分浓度降低了未经净化的水分浓度的约50％或更少。

10. 发明申请

US20080210633A1 FLUID STORAGE AND PURIFICATION METHOD 失效
标题翻译：流体储存和净化方法
公开(公告)号：US20080210633A1
公开(公告)日：2008-09-04
申请号：US12050472
申请日：2008-03-18
申请人： Carrie L. Wyse , Robert Torres , Tadaharu Watanabe , Joseph V. Vininski
发明人： Carrie L. Wyse , Robert Torres , Tadaharu Watanabe , Joseph V. Vininski
IPC分类号： B01D15/04
CPC分类号： F17C11/00 , B01D11/0288 , G06Q99/00 , Y10T137/0318 , Y10T137/0379 , Y10T137/0396
摘要： A method of storing and dispensing a fluid includes providing a vessel configured for selective dispensing of the fluid therefrom. The vessel contains an ionic liquid therein. The fluid is contacted with the ionic liquid for take-up of the fluid by the ionic liquid. There is substantially no chemical change in the ionic liquid and the fluid. The fluid is released from the ionic liquid and dispensed from the vessel.
摘要翻译：存储和分配流体的方法包括提供构造用于从其中选择性地分配流体的容器。容器中含有离子液体。流体与离子液体接触，用于通过离子液体吸收流体。离子液体和流体基本上没有化学变化。流体从离子液体中释放并从容器中分配。

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