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1. 发明申请

US20150083911A1 Method of Detecting Electrons, an Electron-Detector and an Inspection System 有权
标题翻译：检测电子的方法，电子检测器和检查系统
公开(公告)号：US20150083911A1
公开(公告)日：2015-03-26
申请号：US14498290
申请日：2014-09-26
申请人： Carl Zeiss Microscopy GmbH
发明人： Dirk Zeidler , Jörg Jacobi
IPC分类号： H01J37/244 , H01J37/22 , H01J37/28
CPC分类号： H01J37/244 , H01J37/226 , H01J37/28 , H01J37/285 , H01J2237/15 , H01J2237/2443 , H01J2237/24507 , H01J2237/2857
摘要： An electron-detector comprises a scintillator plate 207, electron optics 204 for directing a plurality of electron beams 9 onto the scintillator plate so that the electron beams are incident onto the scintillator plate at locations of incidence disposed at a distance from each other, a light detector 237 comprising a plurality of light receiving areas 235 disposed at a distance from each other, and light optics for generating a first light-optical image of at least a portion of the scintillator plate at a region 243 where the light receiving areas of the light detector are disposed so that, by the imaging, each of the locations of incidence is associated with a light receiving area; and wherein the electron optics comprise an electron beam deflector 255 for displacing the locations of incidence of the electron beams on the scintillator plate in a direction orthogonal to a normal 249 of a surface 208 of the scintillator plate.
摘要翻译：电子检测器包括闪烁体板207，用于将多个电子束9引导到闪烁体板上的电子光学器件204，使得电子束在彼此间隔一定距离的入射位置处入射到闪烁体板上，检测器237包括彼此间隔设置的多个光接收区域235，以及用于在区域243处产生闪烁体板的至少一部分的第一光学图像的光学光学器件，其中光的光接收区域检测器被设置成使得通过成像，每个入射位置与光接收区域相关联; 并且其中电子光学器件包括电子束偏转器255，用于将闪烁体板上的电子束的入射位置沿与闪烁体板的表面208的法线249正交的方向移位。

2. 发明授权

US09336982B2 Method of detecting electrons, an electron-detector and an inspection system 有权
标题翻译：检测电子的方法，电子检测器和检查系统
公开(公告)号：US09336982B2
公开(公告)日：2016-05-10
申请号：US14498290
申请日：2014-09-26
申请人： Carl Zeiss Microscopy GmbH
发明人： Dirk Zeidler , Jörg Jacobi
IPC分类号： H01J37/26 , H01J37/244 , H01J37/22 , H01J37/28 , H01J37/285
CPC分类号： H01J37/244 , H01J37/226 , H01J37/28 , H01J37/285 , H01J2237/15 , H01J2237/2443 , H01J2237/24507 , H01J2237/2857
摘要： An electron-detector comprises a scintillator plate 207, electron optics 204 for directing a plurality of electron beams 9 onto the scintillator plate so that the electron beams are incident onto the scintillator plate at locations of incidence disposed at a distance from each other, a light detector 237 comprising a plurality of light receiving areas 235 disposed at a distance from each other, and light optics for generating a first light-optical image of at least a portion of the scintillator plate at a region 243 where the light receiving areas of the light detector are disposed so that, by the imaging, each of the locations of incidence is associated with a light receiving area; and wherein the electron optics comprise an electron beam deflector 255 for displacing the locations of incidence of the electron beams on the scintillator plate in a direction orthogonal to a normal 249 of a surface 208 of the scintillator plate.
摘要翻译：电子检测器包括闪烁体板207，用于将多个电子束9引导到闪烁体板上的电子光学器件204，使得电子束在彼此间隔一定距离的入射位置处入射到闪烁体板上，检测器237包括彼此间隔设置的多个光接收区域235，以及用于在区域243处产生闪烁体板的至少一部分的第一光学图像的光学光学器件，其中光的光接收区域检测器被设置成使得通过成像，每个入射位置与光接收区域相关联; 并且其中电子光学器件包括电子束偏转器255，用于将闪烁体板上的电子束的入射位置沿与闪烁体板的表面208的法线249正交的方向移位。

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