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1. 发明申请

US20200174384A1 LITHOGRAPHY APPARATUS, DETERMINATION METHOD, AND METHOD OF MANUFACTURING AN ARTICLE 审中-公开
公开(公告)号：US20200174384A1
公开(公告)日：2020-06-04
申请号：US16691334
申请日：2019-11-21
申请人： CANON KABUSHIKI KAISHA
发明人： Koshiro Arahara , Kazumasa Tanaka
IPC分类号： G03F9/00
摘要： Provided is a lithography apparatus capable of detecting the abnormal holding of an original in a shorter period of time. The lithography apparatus is configured to form a pattern on a substrate through use of the original, and includes: a holding unit configured to hold the original on which a first mark is formed; a measuring unit configured to pick up an image of the first mark; and a control unit configured to: cause the measuring unit to obtain the image of the first mark on the original held by the holding unit with a focus position of the measuring unit being adjusted to a reference position; and determine that the original is being abnormally held by the holding unit when a change in a first contrast, which is a contrast of the image of the first mark with respect to a reference contrast, falls out of an allowable range.

2. 发明申请

US20220183551A1 OPTICAL COHERENCE TOMOGRAPHY APPARATUS, CONTROL METHOD FOR OPTICAL COHERENCE TOMOGRAPHY APPARATUS, AND COMPUTER READABLE STORAGE MEDIUM 有权
公开(公告)号：US20220183551A1
公开(公告)日：2022-06-16
申请号：US17546084
申请日：2021-12-09
申请人： CANON KABUSHIKI KAISHA
发明人： Kazumasa Tanaka , Hiroki Uchida , Yoshihiko Iwase , Osamu Sagano , Ritsuya Tomita
IPC分类号： A61B3/10 , A61B5/00 , G01B9/02091
摘要： The optical coherence tomography apparatus is an optical coherence tomography apparatus that obtains a tomographic image of an eye to be examined by using combined light obtained by combining (a) return light from the eye to be examined irradiated with measurement light and (b) reference light, the optical coherence tomography apparatus including an optical path length difference changing unit arranged to change an optical path length difference between the measurement light and the reference light, a driving unit arranged to drive the optical path length difference changing unit, a determining unit configured to determine, using a learned model, a driving amount of the driving unit from the obtained tomographic image, and a controlling unit configured to control the driving unit using the determined driving amount.

3. 发明申请

US20140232846A1 IMAGE ACQUISITION APPARATUS AND IMAGE ACQUISITION SYSTEM 审中-公开
标题翻译：图像采集设备和图像采集系统
公开(公告)号：US20140232846A1
公开(公告)日：2014-08-21
申请号：US14184519
申请日：2014-02-19
申请人： CANON KABUSHIKI KAISHA
发明人： Kazumasa Tanaka
IPC分类号： G02B21/36
CPC分类号： G02B21/361 , G02B21/365
摘要： An image acquisition apparatus includes an imaging optical system configured to form an image of an object, a re-imaging optical system configured to re-form the image of the object formed by the imaging optical system, a reflecting member arranged on an optical path between the imaging optical system and the re-imaging optical system, an image sensor configured to capture the image of the object re-formed by the re-imaging optical system to output image data, a first driving unit configured to change a tilt of the reflecting member with respect to an optical axis of the imaging optical system, a control unit configured to control the first driving unit according to a shape of the object, and a correction unit configured to correct a positional displacement of the image in an in-plane direction according to the change in the tilt of the reflecting member.
摘要翻译：一种图像获取装置包括被配置为形成物体的图像的成像光学系统，被配置为重新形成由成像光学系统形成的物体的图像的再成像光学系统;反射部件，成像光学系统和再成像光学系统，被配置为捕获由再成像光学系统重新形成的对象的图像以输出图像数据的图像传感器;第一驱动单元，被配置为改变反射的倾斜相对于成像光学系统的光轴构成的控制单元，被配置为根据物体的形状来控制第一驱动单元的控制单元，以及校正单元，被配置为校正图像在面内方向上的位置偏移根据反射构件的倾斜度的变化。

4. 发明授权

US11819275B2 Optical coherence tomography apparatus, control method for optical coherence tomography apparatus, and computer-readable storage medium 有权
公开(公告)号：US11819275B2
公开(公告)日：2023-11-21
申请号：US17546084
申请日：2021-12-09
申请人： CANON KABUSHIKI KAISHA
发明人： Kazumasa Tanaka , Hiroki Uchida , Yoshihiko Iwase , Osamu Sagano , Ritsuya Tomita
IPC分类号： G01B9/02 , A61B3/10 , G01B9/02091 , A61B5/00
CPC分类号： A61B3/102 , A61B5/0066 , G01B9/02091
摘要： The optical coherence tomography apparatus is an optical coherence tomography apparatus that obtains a tomographic image of an eye to be examined by using combined light obtained by combining (a) return light from the eye to be examined irradiated with measurement light and (b) reference light, the optical coherence tomography apparatus including an optical path length difference changing unit arranged to change an optical path length difference between the measurement light and the reference light, a driving unit arranged to drive the optical path length difference changing unit, a determining unit configured to determine, using a learned model, a driving amount of the driving unit from the obtained tomographic image, and a controlling unit configured to control the driving unit using the determined driving amount.

5. 发明授权

US11275319B2 Lithography apparatus, determination method, and method of manufacturing an article 有权
公开(公告)号：US11275319B2
公开(公告)日：2022-03-15
申请号：US16691334
申请日：2019-11-21
申请人： CANON KABUSHIKI KAISHA
发明人： Koshiro Arahara , Kazumasa Tanaka
IPC分类号： G03F9/00
摘要： Provided is a lithography apparatus capable of detecting the abnormal holding of an original in a shorter period of time. The lithography apparatus is configured to form a pattern on a substrate through use of the original, and includes: a holding unit configured to hold the original on which a first mark is formed; a measuring unit configured to pick up an image of the first mark; and a control unit configured to: cause the measuring unit to obtain the image of the first mark on the original held by the holding unit with a focus position of the measuring unit being adjusted to a reference position; and determine that the original is being abnormally held by the holding unit when a change in a first contrast, which is a contrast of the image of the first mark with respect to a reference contrast, falls out of an allowable range.

6. 发明申请

US20150130922A1 OBJECTIVE OPTICAL SYSTEM AND IMAGE ACQUISITION APPARATUS 审中-公开
标题翻译：目标光学系统和图像采集设备
公开(公告)号：US20150130922A1
公开(公告)日：2015-05-14
申请号：US14533261
申请日：2014-11-05
申请人： CANON KABUSHIKI KAISHA
发明人： Kazumasa Tanaka , Yasuyuki Unno
IPC分类号： G02B21/36
CPC分类号： G02B21/361
摘要： The objective optical system includes a first optical system configured to collimate a divergent light flux from an object, a second optical system configured to converge the light flux from the first optical system, a beam splitter disposed between the first optical system and the second optical system, a reflector disposed on a side where the light flux from the second optical system is condensed and configured to reflect the light flux, and a third optical system configured to converge the light flux reflected by the reflector and then passing through the second optical system and the beam splitter. When a direction in which the light flux travels in the objective optical system is defined as an optical axis direction, positions of respective portions of the reflector in the optician axis direction are each changeable.
摘要翻译：物镜光学系统包括：第一光学系统，被配置为准直来自物体的发散光束;第二光学系统，被配置为会聚来自第一光学系统的光束;分束器，设置在第一光学系统和第二光学系统之间设置在来自第二光学系统的光束被冷凝并被配置为反射光束的一侧的反射器;以及第三光学系统，被配置为会聚由反射器反射的光束，然后通过第二光学系统，分束器。当物镜光学系统中光束行进的方向被定义为光轴方向时，反射器在眼镜轴方向上各部分的位置各自是可变的。

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