会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 7. 发明申请
    • Apparatus to vary dimensions of a substrate during nano-scale manufacturing
    • 用于在纳米级制造期间改变衬底尺寸的装置
    • US20060001857A1
    • 2006-01-05
    • US11142839
    • 2005-06-01
    • Anshuman CheralaByung-Jin ChoiPawan NimmakayalaMario MeisslSidlgata Sreenivasan
    • Anshuman CheralaByung-Jin ChoiPawan NimmakayalaMario MeisslSidlgata Sreenivasan
    • G03B27/58
    • G03F7/0002B82Y10/00
    • The present invention is directed toward a system to vary dimensions of a substrate, such as a template having a patterned mold. To that end, the system includes a substrate chuck adapted to position the substrate in a region; a pliant member; and an actuator sub-assembly elastically coupled to the substrate chuck through the pliant member. The actuator assembly includes a plurality of lever sub-assemblies, one of which includes a body lying in the region and spaced-apart from an opposing body associated with one of the remaining lever sub-assemblies of the plurality of lever sub-assemblies. One of the plurality of lever assemblies is adapted to vary a distance between the body and the opposing body. In this manner, compressive forces may be applied to the template to remove unwanted magnification or other distortions in the pattern on the mold. The pliant member is configured to attenuate a magnitude of resulting forces sensed by the substrate chuck generated in response to the compressive forces.
    • 本发明涉及一种改变基底的尺寸的系统,例如具有图案化模具的模板。 为此,系统包括适于将衬底定位在区域中的衬底卡盘; 柔顺的会员 以及致动器子组件,其通过柔性构件弹性地联接到基板卡盘。 所述致动器组件包括多个杠杆子组件,其中一个杆子组件包括位于所述区域中并与与所述多个杠杆子组件中的剩余杠杆子组件之一相关联的相对主体间隔开的主体。 多个杠杆组件中的一个适于改变主体和相对主体之间的距离。 以这种方式,可以对模板施加压缩力以去除模具上的图案中的不期望的放大或其它变形。 柔性构件被构造成衰减由响应于压缩力产生的基板卡盘感测的结果力的大小。
    • 10. 发明申请
    • System for magnification and distortion correction during nano-scale manufacturing
    • 纳米尺寸制造中的放大和失真校正系统
    • US20050270516A1
    • 2005-12-08
    • US10999898
    • 2004-11-30
    • Anshuman CheralaByung-Jin ChoiPawan NimmakayalaMario MeisslSidlgata Sreenivasan
    • Anshuman CheralaByung-Jin ChoiPawan NimmakayalaMario MeisslSidlgata Sreenivasan
    • B29C43/02B81C99/00G03B27/58G03F7/00
    • G03F7/0002B82Y10/00B82Y40/00G03B27/58
    • The present invention is directed toward a system to vary dimensions of a substrate, such as a template having a patterned mold. To that end, the system includes a substrate chuck adapted to position the substrate in a region; a pliant member; and an actuator sub-assembly elastically coupled to the substrate chuck through the pliant member. The actuator assembly includes a plurality of lever sub-assemblies, one of which includes a body lying in the region and spaced-apart from an opposing body associated with one of the remaining lever sub-assemblies of the plurality of lever sub-assemblies. One of the plurality of lever assemblies is adapted to vary a distance between the body and the opposing body. In this manner, compressive forces may be applied to the template to remove unwanted magnification or other distortions in the pattern on the mold. The pliant member is configured to attenuate a magnitude of resulting forces sensed by the substrate chuck generated in response to the compressive forces.
    • 本发明涉及一种改变基底的尺寸的系统,例如具有图案化模具的模板。 为此,系统包括适于将衬底定位在区域中的衬底卡盘; 柔顺的会员 以及致动器子组件,其通过柔性构件弹性地联接到基板卡盘。 所述致动器组件包括多个杠杆子组件,其中一个杆子组件包括位于所述区域中并与与所述多个杠杆子组件中的剩余杠杆子组件之一相关联的相对主体间隔开的主体。 多个杠杆组件中的一个适于改变主体和相对主体之间的距离。 以这种方式,可以对模板施加压缩力以去除模具上的图案中的不期望的放大或其它变形。 柔性构件被构造成衰减由响应于压缩力产生的基板卡盘感测的结果力的大小。