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1. 发明申请

US20050275251A1 Compliant device for nano-scale manufacturing 有权
标题翻译：符合纳米级制造的器件
公开(公告)号：US20050275251A1
公开(公告)日：2005-12-15
申请号：US11142838
申请日：2005-06-01
申请人： Byung-Jin Choi , Sidlgata Sreenivasan
发明人： Byung-Jin Choi , Sidlgata Sreenivasan
IPC分类号： A47C1/024 , A47C1/0355 , A47C3/00 , A47D1/02 , B60N2/02 , G03F7/00 , A47C1/038
CPC分类号： G03F7/0002 , B29C43/021 , B29C2043/025 , B29C2043/5858 , B82Y10/00 , B82Y40/00 , Y10S977/887
摘要： The present invention is directed to a compliant device comprising a support body, a floating body, and a plurality of flexure arms. Each of the plurality of flexure arms is connected between the support body and the floating body to transfer a load therebetween in parallel. To that end, the flexure arms have first and second sets of flexure joints. The first set of flexure joints facilitate rotational movement of said flexure arm about a first axis extending along a first direction. The second set of flexure joints are arranged to facilitate rotational movement of the flexure arm about a second axis, extending along a second direction that is transverse to the first direction. The flexure joints are revolute joints.
摘要翻译：本发明涉及一种包括支撑体，浮体和多个弯曲臂的柔性装置。多个挠曲臂中的每一个连接在支撑体和浮体之间，以在它们之间平行地传送负载。为此，弯曲臂具有第一组和第二组挠曲接头。第一组弯曲接头便于围绕围绕第一方向延伸的第一轴线的所述弯曲臂的旋转运动。第二组弯曲接头被布置成便于弯曲臂围绕第二轴线的旋转运动，第二轴线沿着横向于第一方向的第二方向延伸。挠性接头是旋转接头。

2. 发明申请

US20070287081A1 METHOD FOR OBTAINING FORCE COMBINATIONS FOR TEMPLATE DEFORMATION USING NULLSPACE AND METHODS OPTIMIZATION TECHNIQUES 有权
标题翻译：使用空位获取模板变形的力组合的方法和方法优化技术
公开(公告)号：US20070287081A1
公开(公告)日：2007-12-13
申请号：US11695469
申请日：2007-04-02
申请人： Anshuman Cherala , Sidlgata Sreenivasan , Byung-Jin Choi , Ecron Thompson
发明人： Anshuman Cherala , Sidlgata Sreenivasan , Byung-Jin Choi , Ecron Thompson
IPC分类号： G03F9/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , G03F7/703 , G03F7/70633 , G03F7/70783 , G03F9/7003 , G03F9/7092
摘要： The present invention is directed towards a method for determining deformation parameters that a patterned device would undergo to minimize dimensional variations between a recorded pattern thereon and a reference pattern, the method including, inter alia, comparing spatial variation between features of the recorded pattern with respect to corresponding features of the reference pattern; and determining deformation forces to apply to the patterned device to attenuate the dimensional variations, with the forces having predetermined constraints, wherein a summation of a magnitude of the forces is substantially zero and a summation of moment of the forces is substantially zero.
摘要翻译：本发明涉及一种用于确定图案化装置将经历以使其上的记录图案与参考图案之间的尺寸变化最小化的变形参数的方法，该方法尤其包括将记录图案的特征与相对于参考图案的相应特征; 以及确定施加到所述图案化装置上的变形力以衰减所述尺寸变化，其中所述力具有预定的约束，其中所述力的大小的总和基本上为零，并且所述力的力矩的总和基本上为零。

3. 发明申请

US20060005657A1 Method and system to control movement of a body for nano-scale manufacturing 审中-公开
标题翻译：用于控制身体运动的方法和系统用于纳米级制造
公开(公告)号：US20060005657A1
公开(公告)日：2006-01-12
申请号：US11142825
申请日：2005-06-01
申请人： Byung-Jin Choi , Sidlgata Sreenivasan
发明人： Byung-Jin Choi , Sidlgata Sreenivasan
IPC分类号： G05G11/00
CPC分类号： G03F7/0002 , B29C43/021 , B29C59/022 , B29C2043/025 , B29C2043/5858 , B29C2059/023 , B82Y10/00 , B82Y40/00 , Y10T74/20341
摘要： The present invention is directed towards a method and system of controlling movement of a body coupled to an actuation system that features translating movement of the body in a plane extending by imparting angular motion in the actuation system with respect to two spaced-apart axes. Specifically, rotational motion is generated in two spaced-apart planes, one of which extends parallel to the plane in which the body translates. This facilitates proper orientation of the body with respect to a surface spaced-apart therefrom.
摘要翻译：本发明涉及一种控制耦合到致动系统的主体的运动的方法和系统，其特征在于，通过相对于两个间隔开的轴线在致动系统中施加角运动而延伸的平面中的本体运动。具体地说，在两个间隔开的平面中产生旋转运动，其中一个平行于主体平移的平面。这有助于身体相对于与其间隔开的表面的适当取向。

4. 发明申请

US20050185169A1 Method and system to measure characteristics of a film disposed on a substrate 有权
标题翻译：测量设置在基板上的膜的特性的方法和系统
公开(公告)号：US20050185169A1
公开(公告)日：2005-08-25
申请号：US10782187
申请日：2004-02-19
申请人： Ian McMackin , Philip Schumaker , Byung-Jin Choi , Sidlgata Sreenivasan , Michael Watts
发明人： Ian McMackin , Philip Schumaker , Byung-Jin Choi , Sidlgata Sreenivasan , Michael Watts
IPC分类号： B81C1/00 , B81C99/00 , G01N21/84 , G03F7/00 , G03F7/20 , G01N21/88
CPC分类号： G03F7/0002 , B29C43/003 , B29C2043/025 , B81C1/0046 , B81C99/004 , B82Y10/00 , B82Y40/00 , G01N21/8422 , G03F7/70625 , G03F7/7065
摘要： The present invention is directed to providing a method and system to measure characteristics of a film disposed on a substrate. The method includes identifying a plurality of processing regions on the film; measuring characteristics of a subset of the plurality of processing regions, defining measured characteristics; determining a variation of one of the measured characteristics; and associating a cause of the variations based upon a comparison of the one of the measured characteristics to measured characteristics associated with the remaining processing regions of the subset. The system carries out the aforementioned method.
摘要翻译：本发明旨在提供一种测量设置在基底上的膜的特性的方法和系统。该方法包括识别胶片上的多个处理区域; 测量所述多个处理区域的子集的特征，定义测量的特征; 确定测量特征之一的变化; 并且基于所测量的特征之一与与所述子集的剩余处理区域相关联的测量特征的比较来将所述变化的原因相关联。系统执行上述方法。

5. 发明申请

US20070026542A1 FORMATION OF CONDUCTIVE TEMPLATES EMPLOYING INDIUM TIN OXIDE 有权
标题翻译：形成使用氧化铅的导电模板
公开(公告)号：US20070026542A1
公开(公告)日：2007-02-01
申请号：US11470829
申请日：2006-09-07
申请人： Sidlgata Sreenivasan , Ian McMackin , Byung-Jin Choi , Ronald Voisin
发明人： Sidlgata Sreenivasan , Ian McMackin , Byung-Jin Choi , Ronald Voisin
IPC分类号： H01L21/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , C03C17/3417 , C03C2217/77 , C03C2218/31 , C03C2218/328
摘要： The present invention is directed to a method forming conductive templates that includes providing a substrate; forming a mesa on the substrate; and forming a plurality of recessions and projections on the mesa with a nadir of the recessions comprising electrically conductive material and the projections comprising electrically insulative material. It is desired that the mesa be substantially transparent to a predetermined wavelength of radiation, for example ultraviolet radiation. As a result, it is desired to form the electrically conductive material from a material that allows ultraviolet radiation to propagate therethrough. In the present invention indium tin oxide is a suitable material from which to form the electrical conductive material.
摘要翻译：本发明涉及一种形成导电模板的方法，其包括提供衬底; 在基板上形成台面; 以及在所述台面上形成多个凹陷和突出部，其中所述凹陷的最低点包括导电材料，并且所述突起包括电绝缘材料。期望台面对于预定波长的辐射例如紫外线辐射基本上是透明的。结果，期望由允许紫外线辐射传播的材料形成导电材料。在本发明中，氧化铟锡是形成导电材料的合适材料。

6. 发明申请

US20060172549A1 Method of separating a mold from a solidified layer disposed on a substrate 有权
公开(公告)号：US20060172549A1
公开(公告)日：2006-08-03
申请号：US11108208
申请日：2005-04-18
申请人： Byung-Jin Choi , Anshuman Cherala , Yeong-jun Choi , Mario Meissl , Sidlgata Sreenivasan , Norman Schumaker , Xiaoming Lu , Ian McMackin , Daniel Babbs
发明人： Byung-Jin Choi , Anshuman Cherala , Yeong-jun Choi , Mario Meissl , Sidlgata Sreenivasan , Norman Schumaker , Xiaoming Lu , Ian McMackin , Daniel Babbs
IPC分类号： H01L21/31 , H01L21/469
CPC分类号： H01L21/6875 , B82Y10/00 , B82Y40/00 , G03F7/0002 , H01L21/6838 , Y10S977/887
摘要： The present invention is directed towards a method of separating a mold, included in a template, from a layer disposed on a substrate, the method including, inter alia, applying a separation force to the template to separate the template from the layer; and facilitating localized deformation in the substrate to reduce the separation force required to achieve separation.

7. 发明申请

US20060001857A1 Apparatus to vary dimensions of a substrate during nano-scale manufacturing 有权
标题翻译：用于在纳米级制造期间改变衬底尺寸的装置
公开(公告)号：US20060001857A1
公开(公告)日：2006-01-05
申请号：US11142839
申请日：2005-06-01
申请人： Anshuman Cherala , Byung-Jin Choi , Pawan Nimmakayala , Mario Meissl , Sidlgata Sreenivasan
发明人： Anshuman Cherala , Byung-Jin Choi , Pawan Nimmakayala , Mario Meissl , Sidlgata Sreenivasan
IPC分类号： G03B27/58
CPC分类号： G03F7/0002 , B82Y10/00
摘要： The present invention is directed toward a system to vary dimensions of a substrate, such as a template having a patterned mold. To that end, the system includes a substrate chuck adapted to position the substrate in a region; a pliant member; and an actuator sub-assembly elastically coupled to the substrate chuck through the pliant member. The actuator assembly includes a plurality of lever sub-assemblies, one of which includes a body lying in the region and spaced-apart from an opposing body associated with one of the remaining lever sub-assemblies of the plurality of lever sub-assemblies. One of the plurality of lever assemblies is adapted to vary a distance between the body and the opposing body. In this manner, compressive forces may be applied to the template to remove unwanted magnification or other distortions in the pattern on the mold. The pliant member is configured to attenuate a magnitude of resulting forces sensed by the substrate chuck generated in response to the compressive forces.
摘要翻译：本发明涉及一种改变基底的尺寸的系统，例如具有图案化模具的模板。为此，系统包括适于将衬底定位在区域中的衬底卡盘; 柔顺的会员以及致动器子组件，其通过柔性构件弹性地联接到基板卡盘。所述致动器组件包括多个杠杆子组件，其中一个杆子组件包括位于所述区域中并与与所述多个杠杆子组件中的剩余杠杆子组件之一相关联的相对主体间隔开的主体。多个杠杆组件中的一个适于改变主体和相对主体之间的距离。以这种方式，可以对模板施加压缩力以去除模具上的图案中的不期望的放大或其它变形。柔性构件被构造成衰减由响应于压缩力产生的基板卡盘感测的结果力的大小。

8. 发明申请

US20050275311A1 Compliant device for nano-scale manufacturing 审中-公开
标题翻译：符合纳米级制造的器件
公开(公告)号：US20050275311A1
公开(公告)日：2005-12-15
申请号：US10858179
申请日：2004-06-01
申请人： Byung-Jin Choi , Sidlgata Sreenivasan
发明人： Byung-Jin Choi , Sidlgata Sreenivasan
IPC分类号： G03F7/00 , H01L41/04 , H01L41/06
CPC分类号： G03F7/0002 , B29C43/021 , B29C2043/025 , B29C2043/5858 , B82Y10/00 , B82Y40/00
摘要： The present invention is directed to a compliant device comprising a support body, a floating body, and a plurality of flexure arms. Each of the plurality of transfer arms is connected between the support body and the floating body to transfer a load therebetween in parallel. To that end, the flexure arms having first and second sets of flexure joints. The first set of flexure joints facilitating rotational movement of said flexure arm about a first axis extending along a first direction. The second set of flexure joints arranged to facilitate rotational movement of the flexure arm about a second axis, extending along a second direction that is transverse to the first direction. The flexure joints are revolute joints.
摘要翻译：本发明涉及一种包括支撑体，浮体和多个弯曲臂的柔性装置。多个传送臂中的每一个连接在支撑体和浮体之间，以平行地传送其间的载荷。为此，挠曲臂具有第一组和第二组挠曲接头。所述第一组挠曲接头促使所述挠曲臂围绕沿着第一方向延伸的第一轴线的旋转运动。所述第二组挠曲接头被布置成便于所述挠曲臂围绕第二轴线的旋转运动，所述第二轴线沿着横向于所述第一方向的第二方向延伸。挠性接头是旋转接头。

9. 发明申请

US20050274219A1 Method and system to control movement of a body for nano-scale manufacturing 审中-公开
标题翻译：用于控制身体运动的方法和系统用于纳米级制造
公开(公告)号：US20050274219A1
公开(公告)日：2005-12-15
申请号：US10858100
申请日：2004-06-01
申请人： Byung-Jin Choi , Sidlgata Sreenivasan
发明人： Byung-Jin Choi , Sidlgata Sreenivasan
IPC分类号： G03F7/00 , G03F9/00 , G05G11/00
CPC分类号： G03F7/0002 , B29C43/021 , B29C2043/025 , B29C2043/5858 , B82Y10/00 , B82Y40/00 , G03F9/00 , Y10T74/20341 , Y10T74/20348 , Y10T74/20354
摘要： The present invention is directed towards a method and system of controlling movement of a body coupled to an actuation system that features translating movement of the body in a plane extending by imparting angular motion in the actuation system with respect to two spaced-apart axes. Specifically, rotational motion is generated in two spaced-apart planes, one of which extending parallel to the plane in which the body translates. This facilitates proper orientation of body with respect to a surface spaced-apart therefrom.
摘要翻译：本发明涉及一种控制耦合到致动系统的主体的运动的方法和系统，其特征在于，通过相对于两个间隔开的轴线在致动系统中施加角运动而延伸的平面中的本体运动。具体地，在两个间隔开的平面中产生旋转运动，平面中的一个平行于主体平移的平面。这有助于本体相对于与其间隔开的表面的正确取向。

10. 发明申请

US20050270516A1 System for magnification and distortion correction during nano-scale manufacturing 审中-公开
标题翻译：纳米尺寸制造中的放大和失真校正系统
公开(公告)号：US20050270516A1
公开(公告)日：2005-12-08
申请号：US10999898
申请日：2004-11-30
申请人： Anshuman Cherala , Byung-Jin Choi , Pawan Nimmakayala , Mario Meissl , Sidlgata Sreenivasan
发明人： Anshuman Cherala , Byung-Jin Choi , Pawan Nimmakayala , Mario Meissl , Sidlgata Sreenivasan
IPC分类号： B29C43/02 , B81C99/00 , G03B27/58 , G03F7/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , G03B27/58
摘要： The present invention is directed toward a system to vary dimensions of a substrate, such as a template having a patterned mold. To that end, the system includes a substrate chuck adapted to position the substrate in a region; a pliant member; and an actuator sub-assembly elastically coupled to the substrate chuck through the pliant member. The actuator assembly includes a plurality of lever sub-assemblies, one of which includes a body lying in the region and spaced-apart from an opposing body associated with one of the remaining lever sub-assemblies of the plurality of lever sub-assemblies. One of the plurality of lever assemblies is adapted to vary a distance between the body and the opposing body. In this manner, compressive forces may be applied to the template to remove unwanted magnification or other distortions in the pattern on the mold. The pliant member is configured to attenuate a magnitude of resulting forces sensed by the substrate chuck generated in response to the compressive forces.
摘要翻译：本发明涉及一种改变基底的尺寸的系统，例如具有图案化模具的模板。为此，系统包括适于将衬底定位在区域中的衬底卡盘; 柔顺的会员以及致动器子组件，其通过柔性构件弹性地联接到基板卡盘。所述致动器组件包括多个杠杆子组件，其中一个杆子组件包括位于所述区域中并与与所述多个杠杆子组件中的剩余杠杆子组件之一相关联的相对主体间隔开的主体。多个杠杆组件中的一个适于改变主体和相对主体之间的距离。以这种方式，可以对模板施加压缩力以去除模具上的图案中的不期望的放大或其它变形。柔性构件被构造成衰减由响应于压缩力产生的基板卡盘感测的结果力的大小。

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