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    • 4. 发明申请
    • MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
    • 半导体器件的制造方法
    • US20090160084A1
    • 2009-06-25
    • US12158289
    • 2006-12-28
    • Bunshi KuratomiFukumi ShimizuTakafumi Nishita
    • Bunshi KuratomiFukumi ShimizuTakafumi Nishita
    • B29C45/00
    • H01L21/565H01L23/49541H01L2924/0002H01L2924/00
    • A lead frame is equipped between an upper die with which a gate port and an air vent part are not formed in a cavity part 12a and a lower die in which a gate port 15f is formed in one place of a corner of a cavity part 15a and an air vent part is not formed. After decompressing the inside of the die formed of the cavity parts 12a and 15a by clamping the upper die and the lower die with the clamp pressure of intermediate pressure, mold resin is allowed to flow in the die. Residual air is exhausted while allowing mold resin to flow in the die formed of the cavity parts 12a and 15a by once clamping the upper die and the lower die with low-pressure clamp pressure. Then, the mold resin which filled up in the die formed of the cavity parts 12a and 15a is formed by clamping the upper die and the lower die with high-pressure clamp pressure.
    • 在空腔部分12a中没有形成门口和排气部的上模具之间设有引线框架,在空腔部分15a的角部的一个位置形成有栅极端口15f的下模具 并且不形成排气部。 在通过用中间压力的夹持压力夹紧上模和下模对由空腔部分12a和15a形成的模具的内部进行减压之后,使模制树脂在模具中流动。 残留的空气被排出,同时通过在低压夹紧压力下一次夹紧上模和下模,同时允许模制树脂在由空腔部分12a和15a形成的模具中流动。 然后,通过用高压夹持压力夹紧上模和下模,形成填充在由空腔部分12a和15a形成的模具中的模制树脂。