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    • 1. 发明申请
    • Lithographic projection apparatus, gas purging method, device manufacturing method and purge gas supply system related application
    • 平版印刷设备,气体净化方法,装置制造方法和吹扫气体供应系统相关应用
    • US20060285091A1
    • 2006-12-21
    • US11396823
    • 2006-04-03
    • Bipin ParekhRobert ZellerRussell HolmesJeffrey Spiegelman
    • Bipin ParekhRobert ZellerRussell HolmesJeffrey Spiegelman
    • G03B27/52
    • G03F7/70933G02B27/0006
    • A lithographic projection apparatus includes a support configured to support a patterning device, the patterning device configured to pattern a projection beam according to a desired pattern. The apparatus has a substrate table configured to hold a substrate, a projection system configured to project the patterned beam onto a target portion of the substrate. The apparatus also has a purge pas supply system configured to provide a purge gas near a surface of a component of the lithographic projection apparatus. The purge gas supply system includes a purge gas mixture generator configured to generate a purge gas mixture which includes at least one purging gas and moisture. The purge gas mixture generator has a moisturizer configured to add the moisture to the purge gas and a purge gas mixture outlet connected to the purge gas mixture generator configured to supply the purge gas mixture near the surface.
    • 平版印刷投影装置包括被配置为支撑图案形成装置的支撑件,所述图案形成装置被配置为根据期望的图案来图案化投影光束。 该装置具有被配置为保持基板的基板台,配置成将图案化的光束投影到基板的目标部分上的投影系统。 该设备还具有净化气体供应系统,其构造成在光刻投影设备的部件的表面附近提供净化气体。 净化气体供应系统包括净化气体混合物发生器,其被配置为产生包括至少一个净化气体和水分的净化气体混合物。 净化气体混合物发生器具有保湿剂,其被配置为将湿气添加到净化气体中,以及净化气体混合物出口,其连接到净化气体混合物发生器,其构造成在表面附近提供净化气体混合物。
    • 2. 发明申请
    • Lithographic projection apparatus, gas purging method, device manufacturing method and purge gas supply system
    • 平版印刷设备,气体净化方法,装置制造方法和吹扫气体供应系统
    • US20070030463A1
    • 2007-02-08
    • US10565486
    • 2004-07-21
    • Bipin ParekhJeffrey SpiegelmanRobert ZellerRussell Holmes
    • Bipin ParekhJeffrey SpiegelmanRobert ZellerRussell Holmes
    • G03B27/52
    • G02B27/0006G03F7/70933
    • A lithographic projection apparatus (1) includes a support configured to support a patterning device (MA), the patterning device configured to pattern the projection beam according to a desired pattern. The apparatus has a substrate (W) table configure to hold a substrate, a projection system configured to project the patterned beam onto a target portion of the substrate. The apparatus also has a purge gas supply system (100) configured to provide a purge gas near a surface of a component of the lithographic projection apparatus. The purge gas supply system (100) includes a purge gas mixture generator (120) configured to generate a purge gas mixture which includes at least one purging gas and moisture. The purge gas mixture generator has a moisturizer (150) configured to add the moisture to the purge gas and a purge gas mixture outlet (130) connected to the purge gas mixture generator (120) configured to supply the purge gas mixture near the surface.
    • 光刻投影设备(1)包括被配置为支撑图案形成装置(MA)的支撑件,所述图案形成装置被配置成根据期望的图案对投影光束进行图案化。 该装置具有构造成保持基板的基板(W)台,配置成将图案化的光束投影到基板的目标部分上的投影系统。 该设备还具有净化气体供应系统(100),其构造成在光刻投影设备的部件的表面附近提供净化气体。 净化气体供应系统(100)包括净化气体混合物发生器(120),其被配置为产生包括至少一个净化气体和湿气的净化气体混合物。 净化气体混合物发生器具有配置成将湿气添加到净化气体中的保湿剂(150)和连接到净化气体混合物发生器(120)的净化气体混合物出口(130),其构造成在表面附近提供净化气体混合物。
    • 8. 发明授权
    • Blend door assembly for climate control systems
    • 用于气候控制系统的混合门组件
    • US06224480B1
    • 2001-05-01
    • US09392705
    • 1999-09-09
    • Vu LeBipin ParekhFred Butler
    • Vu LeBipin ParekhFred Butler
    • B60H102
    • B60H1/00692
    • An assembly 10 for controlling the temperature of air flowing into the passenger compartment of a vehicle has a frame 20, an arcuate door 40, and an actuation assembly 50. The frame 20 defines an opening 21 through which air flows into the passenger compartment of the vehicle. The frame 20 also includes opposite arcuate tracks 25, 26. The arcuate door 40 moves to control airflow through the opening 21 and has side edges 41, 42 which are slidably received in the opposite arcuate tracks 25, 26. The arcuate door 40 and the opposite arcuate tracks 25, 26 maintain the same center of curvature during the sliding of the arcuate door 40 in the opposite arcuate tracks 25, 26. The actuation assembly 50 moves the arcuate door 40 along the opposite arcuate tracks 25, 26.
    • 用于控制流入车辆的乘客舱的空气的温度的组件10具有框架20,弓形门40和致动组件50.框架20限定开口21,空气流入室内的空气 车辆。 框架20还包括相对的弧形轨道25,26。弧形门40移动以控制通过开口21的气流,并且具有可滑动地容纳在相对的弧形轨道25,26中的侧边缘41,42。弓形门40和 相对的弧形轨道25,26在弓形门40在相对的弧形轨道25,26中滑动期间保持相同的曲率中心。致动组件50沿着相对的弧形轨道25,26移动弓形门40。