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    • 3. 发明授权
    • Positional measurement with normalized signal processing
    • 采用归一化信号处理进行位置测量
    • US06317200B1
    • 2001-11-13
    • US09548918
    • 2000-04-13
    • Mao WangJohn C. Tsai
    • Mao WangJohn C. Tsai
    • G01C308
    • G01S17/10G01D5/26G01S7/4811G01S7/4812
    • A measurement apparatus (10, 110) and methods to perform positional types of measurement with normalization respective to either or both of light beam (16, 116) intensity and measurement target (12, 112) reflectivity. A light source, such as a laser diode (14, 114), produces a light beam (16, 116) which is directed at the measurement target (12, 112). One or more beamsplitters (28, 120, 124) in the path of the light beam (16, 116) direct sample portions into one or more photodetectors (32, 36, 122, 128) to obtain either or both of illumination and reflectivity sample values. A portion of the light beam (16, 116) which is reflected by the measurement target (12, 112) is passed through and restricted by an aperture (26, 132) and then detected by a position sensitive detector (38, 134) to obtain a position value. The position value may then be normalized based on either or both of the illumination and reflectivity sample values.
    • 测量装置(10,110)以及对光束(16,116)强度和测量目标(12,112)之一或两者进行归一化的位置测量类型的测量装置(10,110)反射率。 诸如激光二极管(14,114)的光源产生指向测量目标(12,112)的光束(16,116)。 在光束(16,116)的路径中的一个或多个分束器(28,120,124)将样本部分引导到一个或多个光电检测器(32,36,122,128)中以获得照明和反射率样本中的任一个或两者 价值观。 由测量对象(12,112)反射的光束(16,116)的一部分被孔径(26,132)通过并被一个位置敏感检测器(38,134)检测到 获得位置值。 然后可以基于照明和反射率样本值中的一个或两者来归一化位置值。