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1. 发明申请

US20120161577A1 Acoustic Wave Guide Device and Method for Minimizing Trimming Effects and Piston Mode Instabilities 有权
标题翻译：声波引导装置和最小化修剪效果和活塞模式不稳定性的方法
公开(公告)号：US20120161577A1
公开(公告)日：2012-06-28
申请号：US13041653
申请日：2011-03-07
申请人： Benjamin P. Abbott , Robert Aigner , Alan S. Chen , Kevin Gamble , Julien Gratier , Taeho Kook , Marc Solal , Kurt G. Steiner
发明人： Benjamin P. Abbott , Robert Aigner , Alan S. Chen , Kevin Gamble , Julien Gratier , Taeho Kook , Marc Solal , Kurt G. Steiner
IPC分类号： H03H9/25 , H02K15/00 , H01L41/18
CPC分类号： H03H9/02858 , H03H9/1452 , H03H9/1457 , Y10T29/42 , Y10T29/49009
摘要： An acoustic wave device operable as a piston mode wave guide includes electrodes forming an interdigital transducer on a surface of the piezoelectric substrate, wherein each of the plurality of electrodes is defined as having a transversely extending center region and transversely opposing edge regions for guiding an acoustic wave longitudinally through the transducer. A Silicon Oxide overcoat covers the transducer and a Silicon Nitride layer covers the Silicon Oxide overcoat within only the center and edge regions. The thickness of the Silicon Nitride layer is sufficient for providing a frequency modification to the acoustic wave within the center region and is optimized with a positioning of a Titanium strip within each of the opposing edge regions. The Titanium strip reduces the acoustic wave velocity within the edge regions with the velocity in the edge regions being less than the wave velocity within the transducer center region.
摘要翻译：可用作活塞模式波导的声波装置包括在压电基板的表面上形成叉指式换能器的电极，其中多个电极中的每一个被限定为具有横向延伸的中心区域和横向相对的边缘区域，用于引导声学通过传感器纵向波动。氧化硅外涂层覆盖换能器，氮化硅层仅覆盖中心和边缘区域内的氧化硅外涂层。氮化硅层的厚度足以对中心区域内的声波提供频率修正，并且通过在每个相对的边缘区域内定位钛带来优化。钛带减少了边缘区域内的声波速度，边缘区域中的速度小于换能器中心区域内的波速。

2. 发明授权

US08294331B2 Acoustic wave guide device and method for minimizing trimming effects and piston mode instabilities 有权
标题翻译：声波导引装置和减少修剪效果和活塞模式不稳定性的方法
公开(公告)号：US08294331B2
公开(公告)日：2012-10-23
申请号：US13041653
申请日：2011-03-07
申请人： Benjamin P. Abbott , Robert Aigner , Alan S. Chen , Julien Gratier , Taeho Kook , Marc Solal , Kurt G. Steiner
发明人： Benjamin P. Abbott , Robert Aigner , Alan S. Chen , Julien Gratier , Taeho Kook , Marc Solal , Kurt G. Steiner
IPC分类号： H03H9/25 , H01L41/22
CPC分类号： H03H9/02858 , H03H9/1452 , H03H9/1457 , Y10T29/42 , Y10T29/49009
摘要： An acoustic wave device operable as a piston mode wave guide includes electrodes forming an interdigital transducer on a surface of the piezoelectric substrate, wherein each of the plurality of electrodes is defined as having a transversely extending center region and transversely opposing edge regions for guiding an acoustic wave longitudinally through the transducer. A Silicon Oxide overcoat covers the transducer and a Silicon Nitride layer covers the Silicon Oxide overcoat within only the center and edge regions. The thickness of the Silicon Nitride layer is sufficient for providing a frequency modification to the acoustic wave within the center region and is optimized with a positioning of a Titanium strip within each of the opposing edge regions. The Titanium strip reduces the acoustic wave velocity within the edge regions with the velocity in the edge regions being less than the wave velocity within the transducer center region.
摘要翻译：可用作活塞模式波导的声波装置包括在压电基板的表面上形成叉指式换能器的电极，其中多个电极中的每一个被限定为具有横向延伸的中心区域和横向相对的边缘区域，用于引导声学通过传感器纵向波动。氧化硅外涂层覆盖换能器，氮化硅层仅覆盖中心和边缘区域内的氧化硅外涂层。氮化硅层的厚度足以对中心区域内的声波提供频率修正，并且通过在每个相对的边缘区域内定位钛带来优化。钛带减少了边缘区域内的声波速度，边缘区域中的速度小于换能器中心区域内的波速。

3. 发明授权

US07939987B1 Acoustic wave device employing reflective elements for confining elastic energy 有权
标题翻译：使用反射元件限制弹性能的声波装置
公开(公告)号：US07939987B1
公开(公告)日：2011-05-10
申请号：US12256494
申请日：2008-10-23
申请人： Marc Solal , Robert Aigner , Julien Gratier , Taeho Kook , Benjamin P. Abbott
发明人： Marc Solal , Robert Aigner , Julien Gratier , Taeho Kook , Benjamin P. Abbott
IPC分类号： H03H9/145 , H03H9/25
CPC分类号： H03H9/02866 , H03H9/02118 , H03H9/02645
摘要： An acoustic wave device includes electrodes carried on a surface of a piezoelectric material and an array of reflective obstacles such that elastic energy resulting from a piezoelectric effect is preferentially directed along a primary wave propagation path. The array of reflective obstacles are positioned generally parallel to the surface of the piezoelectric material and redirect acoustic waves typically reflected in other than a desirable direction to along a desired direction generally along the primary propagation path. The obstacles improve performance for SAW and BAW devices by effecting reflected energy and suppressing spurious modes.
摘要翻译：声波装置包括承载在压电材料的表面上的电极和反射障碍物的阵列，使得由压电效应产生的弹性能量优先沿着主波传播路径引导。反射障碍物的阵列大致平行于压电材料的表面定位，并且通常沿着主要传播路径重定向通常沿期望方向反射的声波沿期望的方向。障碍通过实现反射能量和抑制杂散模式来改善SAW和BAW器件的性能。

4. 发明申请

US20130106535A1 HIGH COUPLING, LOW LOSS SAW FILTER AND ASSOCIATED METHOD 有权
标题翻译：高耦合，低损耗滤波器及相关方法
公开(公告)号：US20130106535A1
公开(公告)日：2013-05-02
申请号：US13282371
申请日：2011-10-26
申请人： Benjamin P. Abbott , Alan Chen , Taeho Kook , Kurt Steiner , Robert Aigner , Suzanne Combe , Timothy Daniel , Natalya F. Naumenko , Julien Gratier
发明人： Benjamin P. Abbott , Alan Chen , Taeho Kook , Kurt Steiner , Robert Aigner , Suzanne Combe , Timothy Daniel , Natalya F. Naumenko , Julien Gratier
IPC分类号： H03H9/64
CPC分类号： H03H9/25 , H03H9/02157 , H03H9/02559 , H03H9/02834
摘要： Disclosed embodiments include a surface acoustic wave device having electrode period, electrode width, and/or ratio of electrode width to electrode period varied in a prescribed manner.
摘要翻译：公开的实施例包括具有电极周期，电极宽度和/或电极宽度与电极周期的比例以规定方式变化的弹性表面波器件。

5. 发明授权

US08035464B1 Bonded wafer SAW filters and methods 有权
标题翻译：粘结晶片SAW滤波器和方法
公开(公告)号：US08035464B1
公开(公告)日：2011-10-11
申请号：US12398711
申请日：2009-03-05
申请人： Benjamin P. Abbott , Robert Aigner , Julien Gratier , Taeho Kook
发明人： Benjamin P. Abbott , Robert Aigner , Julien Gratier , Taeho Kook
IPC分类号： H03H9/64
CPC分类号： H03H9/02574 , H03H9/02559 , H03H9/02866
摘要： Improved coupling coefficients and desirable filter characteristics are exhibited in a SAW filter including an electrode pattern deposited on a piezoelectric substrate bonded directly to an anti-reflective layer, wherein the anti-reflective layer is bonded to a carrier through an adhesive layer such that a preselected thickness of the anti-reflective layer is sufficient for enhancing an acoustic match between the piezoelectric substrate and the adhesive layer.
摘要翻译：改进的耦合系数和期望的滤波器特性表现在包括沉积在直接结合到抗反射层上的压电基片上的电极图案的SAW滤波器中，其中抗反射层通过粘合剂层结合到载体，使得预选抗反射层的厚度足以增强压电基片和粘合剂层之间的声匹配。

6. 发明授权

US08552819B2 High coupling, low loss saw filter and associated method 有权
标题翻译：高耦合，低损耗滤波器及相关方法
公开(公告)号：US08552819B2
公开(公告)日：2013-10-08
申请号：US13282371
申请日：2011-10-26
申请人： Benjamin P. Abbott , Alan Chen , Taeho Kook , Kurt Steiner , Robert Aigner , Suzanne Combe , Timothy Daniel , Natalya F. Naumenko , Julien Gratier
发明人： Benjamin P. Abbott , Alan Chen , Taeho Kook , Kurt Steiner , Robert Aigner , Suzanne Combe , Timothy Daniel , Natalya F. Naumenko , Julien Gratier
IPC分类号： H03H9/00
CPC分类号： H03H9/25 , H03H9/02157 , H03H9/02559 , H03H9/02834
摘要： Disclosed embodiments include a surface acoustic wave device having electrode period, electrode width, and/or ratio of electrode width to electrode period varied in a prescribed manner.
摘要翻译：公开的实施例包括具有电极周期，电极宽度和/或电极宽度与电极周期的比例以规定方式变化的弹性表面波器件。

7. 发明申请

US20110068655A1 PISTON MODE ACOUSTIC WAVE DEVICE AND METHOD PROVIDING A HIGH COUPLING FACTOR 有权
标题翻译：活塞式振动波装置及提供高耦合因子的方法
公开(公告)号：US20110068655A1
公开(公告)日：2011-03-24
申请号：US12564305
申请日：2009-09-22
申请人： Marc Solal , Julien Gratier , Robert Aigner , Kevin Gamble
发明人： Marc Solal , Julien Gratier , Robert Aigner , Kevin Gamble
IPC分类号： H01L41/047
CPC分类号： H03H9/02858 , H03H9/1452 , H03H9/1457
摘要： An interdigital transducer includes an edge gap length between ends of electrodes and the opposing busbar increased sufficiently for reducing or even eliminating tunneling effects through the gap. As a result, a wave velocity of the acoustic wave within the longitudinally extending edge regions is less than the wave velocity within the transducer center region, and the wave velocity within the opposing gap regions is greater than a velocity in the transducer center region, thus an essentially flat propagation mode results within the aperture of the transducer. A SAW transducer or a SAW resonator on a high coupling substrate will thus guide the energy in the transducer region without a need for apodization. Higher equivalent coupling factors as well as lower losses are obtained.
摘要翻译：叉指换能器包括电极端部之间的边缘间隙长度，并且相对的母线充分增加以减少甚至消除通过间隙的隧道效应。结果，纵向延伸的边缘区域内的声波的波速小于换能器中心区域内的波速，相对间隙区域内的波速大于换能器中心区域的速度，因此在传感器的孔内产生基本平坦的传播模式。因此，高耦合衬底上的SAW换能器或SAW谐振器将引导换能器区域中的能量而不需要变迹。获得较高的等效耦合系数以及较低的损耗。

8. 发明授权

US07939989B2 Piston mode acoustic wave device and method providing a high coupling factor 有权
标题翻译：活塞式声波装置及方法提供高耦合系数
公开(公告)号：US07939989B2
公开(公告)日：2011-05-10
申请号：US12564305
申请日：2009-09-22
申请人： Marc Solal , Julien Gratier , Robert Aigner , Kevin Gamble
发明人： Marc Solal , Julien Gratier , Robert Aigner , Kevin Gamble
IPC分类号： H03H9/25
CPC分类号： H03H9/02858 , H03H9/1452 , H03H9/1457
摘要： An interdigital transducer includes an edge gap length between ends of electrodes and the opposing busbar increased sufficiently for reducing or even eliminating tunneling effects through the gap. As a result, a wave velocity of the acoustic wave within the longitudinally extending edge regions is less than the wave velocity within the transducer center region, and the wave velocity within the opposing gap regions is greater than a velocity in the transducer center region, thus an essentially flat propagation mode results within the aperture of the transducer. A SAW transducer or a SAW resonator on a high coupling substrate will thus guide the energy in the transducer region without a need for apodization. Higher equivalent coupling factors as well as lower losses are obtained.
摘要翻译：叉指换能器包括电极端部之间的边缘间隙长度，并且相对的母线充分增加以减少甚至消除通过间隙的隧道效应。结果，纵向延伸的边缘区域内的声波的波速小于换能器中心区域内的波速，相对间隙区域内的波速大于换能器中心区域的速度，因此在传感器的孔内产生基本平坦的传播模式。因此，高耦合衬底上的SAW换能器或SAW谐振器将引导换能器区域中的能量而不需要变迹。获得较高的等效耦合因子以及较低的损耗。

9. 发明申请

US20090100657A1 PIEZOELECTRIC RESONATOR HAVING IMPROVED TEMPERATURE COMPENSATION AND METHOD FOR MANUFACTURING SAME 失效
标题翻译：具有改进的温度补偿的压电谐振器及其制造方法
公开(公告)号：US20090100657A1
公开(公告)日：2009-04-23
申请号：US12344829
申请日：2008-12-29
申请人： Robert Aigner
发明人： Robert Aigner
IPC分类号： H01L41/22
CPC分类号： H03H9/02102 , Y10T29/42 , Y10T29/49128 , Y10T29/49155
摘要： A piezoelectric resonator includes a piezoelectric layer having a first resonance frequency temperature coefficient of a first sign, a first and a second electrode, the piezoelectric layer being arranged between the first and second electrodes, and a compensation layer arranged between the first electrode and the piezoelectric layer, of a compensation material having a second resonance frequency temperature coefficient of a second sign opposite to the first one, wherein the compensation material is provided with a modification material to increase a conductivity of the compensation layer in a direction of the first electrode and the piezoelectric layer.
摘要翻译：压电谐振器包括具有第一符号的第一谐振频率温度系数的压电层，第一和第二电极，压电层布置在第一和第二电极之间，以及补偿层，布置在第一电极和压电体之间层，其具有与第一谐振频率温度系数相反的第二共振频率温度系数的补偿材料，其中所述补偿材料设置有修改材料，以在所述第一电极的方向上增加所述补偿层的导电性，压电层。

10. 发明申请

US20080197430A1 Biochemical Semiconductor Chip Laboratory Comprising A Coupled Address And Control Chip And Method For Producing The Same 审中-公开
标题翻译：生物化学半导体芯片实验室，包括耦合地址和控制芯片及其生产方法
公开(公告)号：US20080197430A1
公开(公告)日：2008-08-21
申请号：US11791963
申请日：2005-11-29
申请人： Robert Aigner , Ralf Brederlow , Lude Elbrecht , Heinrich Heiss , Stephan Marksteiner , Werner Simburger , Roland Thewes , Hans-Jorg Timme
发明人： Robert Aigner , Ralf Brederlow , Lude Elbrecht , Heinrich Heiss , Stephan Marksteiner , Werner Simburger , Roland Thewes , Hans-Jorg Timme
IPC分类号： H01L27/00 , H01L21/00 , G01N29/00
CPC分类号： G01N29/036 , B01L3/5085 , B01L2300/0645 , B01L2300/0663 , B01L2300/0819 , G01N33/02 , G01N33/15 , G01N33/48707 , G01N2291/0256 , H01L2224/81801 , H01L2924/01068 , H01L2924/13091 , H01L2924/00
摘要： A biochemical semiconductor chip laboratory is disclosed including a coupled address and control chip for biochemical analyses and a method for producing the same. In at least one embodiment the semiconductor chip laboratory has a semiconductor sensor chip, which provides numerous analytical positions for biochemical samples in a matrix. The sensor chip is located on the address and control chip and the analytical positions are in electric contact with a printed contact structure on the upper face of the address and control chip via low-resistance through-platings through the semiconductor substrate of the semiconductor chip.
摘要翻译：公开了一种生物化学半导体芯片实验室，其包括用于生化分析的耦合地址和控制芯片及其制造方法。在至少一个实施例中，半导体芯片实验室具有半导体传感器芯片，其为矩阵中的生物化学样品提供许多分析位置。传感器芯片位于地址和控制芯片上，并且分析位置通过半导体芯片的半导体衬底的低电阻穿透与地址和控制芯片的上表面上的印刷接触结构电接触。

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