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1. 发明授权

US08294331B2 Acoustic wave guide device and method for minimizing trimming effects and piston mode instabilities 有权
标题翻译：声波导引装置和减少修剪效果和活塞模式不稳定性的方法
公开(公告)号：US08294331B2
公开(公告)日：2012-10-23
申请号：US13041653
申请日：2011-03-07
申请人： Benjamin P. Abbott , Robert Aigner , Alan S. Chen , Julien Gratier , Taeho Kook , Marc Solal , Kurt G. Steiner
发明人： Benjamin P. Abbott , Robert Aigner , Alan S. Chen , Julien Gratier , Taeho Kook , Marc Solal , Kurt G. Steiner
IPC分类号： H03H9/25 , H01L41/22
CPC分类号： H03H9/02858 , H03H9/1452 , H03H9/1457 , Y10T29/42 , Y10T29/49009
摘要： An acoustic wave device operable as a piston mode wave guide includes electrodes forming an interdigital transducer on a surface of the piezoelectric substrate, wherein each of the plurality of electrodes is defined as having a transversely extending center region and transversely opposing edge regions for guiding an acoustic wave longitudinally through the transducer. A Silicon Oxide overcoat covers the transducer and a Silicon Nitride layer covers the Silicon Oxide overcoat within only the center and edge regions. The thickness of the Silicon Nitride layer is sufficient for providing a frequency modification to the acoustic wave within the center region and is optimized with a positioning of a Titanium strip within each of the opposing edge regions. The Titanium strip reduces the acoustic wave velocity within the edge regions with the velocity in the edge regions being less than the wave velocity within the transducer center region.
摘要翻译：可用作活塞模式波导的声波装置包括在压电基板的表面上形成叉指式换能器的电极，其中多个电极中的每一个被限定为具有横向延伸的中心区域和横向相对的边缘区域，用于引导声学通过传感器纵向波动。氧化硅外涂层覆盖换能器，氮化硅层仅覆盖中心和边缘区域内的氧化硅外涂层。氮化硅层的厚度足以对中心区域内的声波提供频率修正，并且通过在每个相对的边缘区域内定位钛带来优化。钛带减少了边缘区域内的声波速度，边缘区域中的速度小于换能器中心区域内的波速。

2. 发明申请

US20120161577A1 Acoustic Wave Guide Device and Method for Minimizing Trimming Effects and Piston Mode Instabilities 有权
标题翻译：声波引导装置和最小化修剪效果和活塞模式不稳定性的方法
公开(公告)号：US20120161577A1
公开(公告)日：2012-06-28
申请号：US13041653
申请日：2011-03-07
申请人： Benjamin P. Abbott , Robert Aigner , Alan S. Chen , Kevin Gamble , Julien Gratier , Taeho Kook , Marc Solal , Kurt G. Steiner
发明人： Benjamin P. Abbott , Robert Aigner , Alan S. Chen , Kevin Gamble , Julien Gratier , Taeho Kook , Marc Solal , Kurt G. Steiner
IPC分类号： H03H9/25 , H02K15/00 , H01L41/18
CPC分类号： H03H9/02858 , H03H9/1452 , H03H9/1457 , Y10T29/42 , Y10T29/49009
摘要： An acoustic wave device operable as a piston mode wave guide includes electrodes forming an interdigital transducer on a surface of the piezoelectric substrate, wherein each of the plurality of electrodes is defined as having a transversely extending center region and transversely opposing edge regions for guiding an acoustic wave longitudinally through the transducer. A Silicon Oxide overcoat covers the transducer and a Silicon Nitride layer covers the Silicon Oxide overcoat within only the center and edge regions. The thickness of the Silicon Nitride layer is sufficient for providing a frequency modification to the acoustic wave within the center region and is optimized with a positioning of a Titanium strip within each of the opposing edge regions. The Titanium strip reduces the acoustic wave velocity within the edge regions with the velocity in the edge regions being less than the wave velocity within the transducer center region.
摘要翻译：可用作活塞模式波导的声波装置包括在压电基板的表面上形成叉指式换能器的电极，其中多个电极中的每一个被限定为具有横向延伸的中心区域和横向相对的边缘区域，用于引导声学通过传感器纵向波动。氧化硅外涂层覆盖换能器，氮化硅层仅覆盖中心和边缘区域内的氧化硅外涂层。氮化硅层的厚度足以对中心区域内的声波提供频率修正，并且通过在每个相对的边缘区域内定位钛带来优化。钛带减少了边缘区域内的声波速度，边缘区域中的速度小于换能器中心区域内的波速。

3. 发明授权

US07939987B1 Acoustic wave device employing reflective elements for confining elastic energy 有权
标题翻译：使用反射元件限制弹性能的声波装置
公开(公告)号：US07939987B1
公开(公告)日：2011-05-10
申请号：US12256494
申请日：2008-10-23
申请人： Marc Solal , Robert Aigner , Julien Gratier , Taeho Kook , Benjamin P. Abbott
发明人： Marc Solal , Robert Aigner , Julien Gratier , Taeho Kook , Benjamin P. Abbott
IPC分类号： H03H9/145 , H03H9/25
CPC分类号： H03H9/02866 , H03H9/02118 , H03H9/02645
摘要： An acoustic wave device includes electrodes carried on a surface of a piezoelectric material and an array of reflective obstacles such that elastic energy resulting from a piezoelectric effect is preferentially directed along a primary wave propagation path. The array of reflective obstacles are positioned generally parallel to the surface of the piezoelectric material and redirect acoustic waves typically reflected in other than a desirable direction to along a desired direction generally along the primary propagation path. The obstacles improve performance for SAW and BAW devices by effecting reflected energy and suppressing spurious modes.
摘要翻译：声波装置包括承载在压电材料的表面上的电极和反射障碍物的阵列，使得由压电效应产生的弹性能量优先沿着主波传播路径引导。反射障碍物的阵列大致平行于压电材料的表面定位，并且通常沿着主要传播路径重定向通常沿期望方向反射的声波沿期望的方向。障碍通过实现反射能量和抑制杂散模式来改善SAW和BAW器件的性能。

4. 发明申请

US20110068655A1 PISTON MODE ACOUSTIC WAVE DEVICE AND METHOD PROVIDING A HIGH COUPLING FACTOR 有权
标题翻译：活塞式振动波装置及提供高耦合因子的方法
公开(公告)号：US20110068655A1
公开(公告)日：2011-03-24
申请号：US12564305
申请日：2009-09-22
申请人： Marc Solal , Julien Gratier , Robert Aigner , Kevin Gamble
发明人： Marc Solal , Julien Gratier , Robert Aigner , Kevin Gamble
IPC分类号： H01L41/047
CPC分类号： H03H9/02858 , H03H9/1452 , H03H9/1457
摘要： An interdigital transducer includes an edge gap length between ends of electrodes and the opposing busbar increased sufficiently for reducing or even eliminating tunneling effects through the gap. As a result, a wave velocity of the acoustic wave within the longitudinally extending edge regions is less than the wave velocity within the transducer center region, and the wave velocity within the opposing gap regions is greater than a velocity in the transducer center region, thus an essentially flat propagation mode results within the aperture of the transducer. A SAW transducer or a SAW resonator on a high coupling substrate will thus guide the energy in the transducer region without a need for apodization. Higher equivalent coupling factors as well as lower losses are obtained.
摘要翻译：叉指换能器包括电极端部之间的边缘间隙长度，并且相对的母线充分增加以减少甚至消除通过间隙的隧道效应。结果，纵向延伸的边缘区域内的声波的波速小于换能器中心区域内的波速，相对间隙区域内的波速大于换能器中心区域的速度，因此在传感器的孔内产生基本平坦的传播模式。因此，高耦合衬底上的SAW换能器或SAW谐振器将引导换能器区域中的能量而不需要变迹。获得较高的等效耦合系数以及较低的损耗。

5. 发明授权

US07939989B2 Piston mode acoustic wave device and method providing a high coupling factor 有权
标题翻译：活塞式声波装置及方法提供高耦合系数
公开(公告)号：US07939989B2
公开(公告)日：2011-05-10
申请号：US12564305
申请日：2009-09-22
申请人： Marc Solal , Julien Gratier , Robert Aigner , Kevin Gamble
发明人： Marc Solal , Julien Gratier , Robert Aigner , Kevin Gamble
IPC分类号： H03H9/25
CPC分类号： H03H9/02858 , H03H9/1452 , H03H9/1457
摘要： An interdigital transducer includes an edge gap length between ends of electrodes and the opposing busbar increased sufficiently for reducing or even eliminating tunneling effects through the gap. As a result, a wave velocity of the acoustic wave within the longitudinally extending edge regions is less than the wave velocity within the transducer center region, and the wave velocity within the opposing gap regions is greater than a velocity in the transducer center region, thus an essentially flat propagation mode results within the aperture of the transducer. A SAW transducer or a SAW resonator on a high coupling substrate will thus guide the energy in the transducer region without a need for apodization. Higher equivalent coupling factors as well as lower losses are obtained.
摘要翻译：叉指换能器包括电极端部之间的边缘间隙长度，并且相对的母线充分增加以减少甚至消除通过间隙的隧道效应。结果，纵向延伸的边缘区域内的声波的波速小于换能器中心区域内的波速，相对间隙区域内的波速大于换能器中心区域的速度，因此在传感器的孔内产生基本平坦的传播模式。因此，高耦合衬底上的SAW换能器或SAW谐振器将引导换能器区域中的能量而不需要变迹。获得较高的等效耦合因子以及较低的损耗。

6. 发明授权

US08085117B1 Slotted boundary acoustic wave device 有权
标题翻译：开口边界声波装置
公开(公告)号：US08085117B1
公开(公告)日：2011-12-27
申请号：US12511181
申请日：2009-07-29
申请人： Benjamin P. Abbott , Marc Solal , Michael Wang , Kenya Hashimoto
发明人： Benjamin P. Abbott , Marc Solal , Michael Wang , Kenya Hashimoto
IPC分类号： H03H9/25 , H01L41/083
CPC分类号： H03H9/25 , H03H9/0222
摘要： A piezoelectric boundary acoustic wave (PBAW) device includes a slotted dielectric body disposed over one surface of a piezoelectric body and electrodes forming an IDT at the interface between the piezoelectric body and the dielectric body. The thickness of the electrode is set so that the acoustic velocity of the boundary acoustic waves is less than acoustic waves propagating in the piezoelectric body.
摘要翻译：压电弹性波（PBAW）装置包括设置在压电体的一个表面上的开槽电介质体和在压电体和电介质体之间的界面处形成IDT的电极。电极的厚度被设定为使得声界面声波的声速小于在压电体中传播的声波。

7. 发明授权

US5703427A Surface-wave distributed acoustic reflection transducer and filter including such a transducer 失效
标题翻译：表面波分布式声反射传感器和包括这种传感器的滤波器
公开(公告)号：US5703427A
公开(公告)日：1997-12-30
申请号：US730173
申请日：1996-10-15
申请人： Marc Solal , Pascal Ventura , Jean-Michel Hode
发明人： Marc Solal , Pascal Ventura , Jean-Michel Hode
IPC分类号： H03H9/145 , H03H9/64
CPC分类号： H03H9/14505 , H03H9/02685 , H03H9/14538
摘要： The distributed acoustic reflection transducer has a reflection function which includes at least one reversal of sign, that is to say it possesses at least one reflector and, in general, a combination of reflectors, the center of which is at a distance of k.lambda./2+.lambda./4 from the center of the other reflectors, .lambda. being the wavelength corresponding to the central operating frequency of the transducer. The applications will be for the production of surface-wave filters in radio communication systems.
摘要翻译：分布式声反射换能器具有反射功能，其包括至少一个符号反转，也就是说它具有至少一个反射器，并且通常具有反射器的组合，其中心的距离为λλ/ 2λλ/ 4，其中λ是对应于换能器的中心工作频率的波长。这些应用将用于在无线电通信系统中生产表面波滤波器。

8. 发明授权

US5475348A Surface wave filter filtering delay transfer function 失效
标题翻译：表面波滤波滤波延时传递函数
公开(公告)号：US5475348A
公开(公告)日：1995-12-12
申请号：US211622
申请日：1994-04-18
申请人： Jean-Michel Hode , Jean Desbois , Marc Solal
发明人： Jean-Michel Hode , Jean Desbois , Marc Solal
IPC分类号： H03H9/00 , H03H9/02 , H03H9/145 , H03H9/64
CPC分类号： H03H9/0057 , H03H9/02653 , H03H9/0285 , H03H9/02905
摘要： It consists of several channels (V1, V2) in parallel, which exhibit an inter-transducer gap difference (2.sub.1 -4.sub.1 ; 2.sub.2 -4.sub.2) equal to an even multiple of the half-wavelength (.lambda.) at the central frequency, from one channel to the next, so as to cancel the delay line transfer function which corresponds to the direct path between transducers.
摘要翻译： PCT No.PCT / FR92 / 00827 Sec。 371日期1994年04月18日 102（e）1994年4月18日PCT PCT日期：1992年10月28日PCT公布。公开号WO93 / 08641 日期为1993年04月29日。它由并行的多个通道（V1，V2）组成，它们具有等于半波长（λ）的偶数倍的换能器间差（21-41; 22-42）在中心频率，从一个通道到下一个通道，以消除对应于换能器之间的直接路径的延迟线传递函数。

9. 发明授权

US08610518B1 Elastic guided wave coupling resonator filter and associated manufacturing 失效
标题翻译：弹性导波耦合谐振滤波器及相关制造
公开(公告)号：US08610518B1
公开(公告)日：2013-12-17
申请号：US13110518
申请日：2011-05-18
申请人： Marc Solal , Christophe Zinck
发明人： Marc Solal , Christophe Zinck
IPC分类号： H03H9/64
CPC分类号： H03H9/6443 , H03H9/0052 , H03H9/0066 , H03H9/02228
摘要： An elastic guided acoustic wave coupling resonator filter includes a dielectric layer interposed between piezoelectric substrates, with interdigital transducers on each substrate generally positioned at an interface between the substrates and the dielectric layer. The interdigital transducers on one substrate are aligned with the transducers on the opposing substrate and include cascaded filter tracks. The cascaded orientation between the two filter tracks includes either a differential connection or a balanced connection. As a result, the interdigital transducers are electrically isolated yet acoustically coupled to each other.
摘要翻译：弹性引导声波耦合谐振滤波器包括介于压电基板之间的电介质层，每个基板上的叉指换能器通常位于基板和电介质层之间的界面处。一个衬底上的叉指换能器与相对衬底上的换能器对准，并且包括级联的过滤器轨迹。两个滤波轨道之间的级联取向包括差分连接或平衡连接。结果，叉指式换能器彼此电隔离而声耦合。

10. 发明申请

US20050162048A1 Interface acoustic wave device made of lithium tantalate 有权
标题翻译：接口声波器件由钽酸锂制成
公开(公告)号：US20050162048A1
公开(公告)日：2005-07-28
申请号：US10507909
申请日：2003-03-11
申请人： Marc Solal , Serge Calisti , Vincent Laude , Sylvain Ballandras , Serge Camou , Thomas Pastureaud
发明人： Marc Solal , Serge Calisti , Vincent Laude , Sylvain Ballandras , Serge Camou , Thomas Pastureaud
IPC分类号： H01L41/09 , H01L41/18 , H01L41/22 , H03H9/02 , H03H9/25 , H03H9/42 , H03H9/64
CPC分类号： H03H9/0222
摘要： The invention relates to interface acoustic wave components made of lithium tantalate. In the case in which the two substrates making up the filter have the same cut and the same crystal orientation, the invention gives the best cut angles in particular for optimizing the electromechanical coupling coefficient that determines the final performance characteristics of the component produced. Curves giving the variations of the coupling coefficient and the attenuation as a function of the cut angles and of the direction of propagation are provided. The values of the main acoustic characteristics of the component for these optimum cut angles are also given. The applications of this type of device are, on the one hand, uses as a passive component such a resonator or a filter or a delay line, or as an integrated device, either in a measurement chain or in an array of devices operating according to the principle of recognition of the device by a phase code.
摘要翻译：本发明涉及由钽酸锂制成的界面声波元件。在构成滤光片的两个基板具有相同的切割和相同的晶体取向的情况下，本发明给出了最佳切割角度，特别是为了优化确定所生产的部件的最终性能特性的机电耦合系数。提供给出耦合系数和衰减的变化作为切割角度和传播方向的函数的曲线。还给出了用于这些最佳切割角的部件的主要声学特性的值。一方面，这种类型的装置的应用一方面用作诸如谐振器或滤波器或延迟线的无源部件，或作为集成装置，在测量链中或者根据通过相位代码识别设备的原理。

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