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    • 8. 发明授权
    • Method of forming a probe substrate by layering probe row structures and probe substrates formed thereby
    • 通过层叠由此形成的探针行结构和探针基底来形成探针基底的方法
    • US08513942B1
    • 2013-08-20
    • US12974152
    • 2010-12-21
    • Benjamin N. EldridgeGaetan L. Mathieu
    • Benjamin N. EldridgeGaetan L. Mathieu
    • G01R1/06G01R31/20
    • G01R3/00G01R1/07307
    • A probe head can comprise a substrate and electrically conductive structures extending from opposite surfaces of the substrate. The probe head can be made by forming frame structures each comprising a frame to which a row of the conductive structures is coupled. The frame structures can be placed in a stack. A compressible shim or a curable adhesive can be provided between adjacent frames in the stack to control a distance between the contact ends of the conductive structures in adjacent rows of the conductive structures. The frames can include cavities that form a mold while the frames are in the stack, and the substrate can be formed by introducing a moldable material into the mold. After the moldable material hardens, the frame can be removed, leaving the conductive structures embedded in the substrate.
    • 探头可以包括衬底和从衬底的相对表面延伸的导电结构。 探针头可以通过形成每个包括一排导电结构的框架的框架结构来制造。 框架结构可以放置在堆叠中。 可以在堆叠中的相邻框架之间设置可压缩垫片或可固化粘合剂,以控制导电结构的相邻行中的导电结构的接触端之间的距离。 框架可以包括在框架在堆叠中时形成模具的空腔,并且可以通过将可模制材料引入模具中来形成基板。 在可模塑材料变硬之后,可以移除框架,使导电结构嵌入衬底中。