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    • 5. 发明授权
    • Method for manufacturing an integral thin-film metal resistor
    • 制造整体薄膜金属电阻的方法
    • US06232042B1
    • 2001-05-15
    • US09111189
    • 1998-07-07
    • Gregory J. DunnJovica SavicAllyson Beuhler
    • Gregory J. DunnJovica SavicAllyson Beuhler
    • G03F700
    • H05K1/167G03F7/00H01C17/07H05K3/0023H05K3/025H05K3/048H05K3/386H05K2201/0317H05K2201/09881H05K2203/0152H05K2203/1461
    • A method for manufacturing a microelectronic assembly to have a resistor, and particularly a metal resistive film, with desirable processing and dimensional characteristics. The method generally entails applying a photosensitive dielectric to a substrate to form a dielectric layer. The dielectric layer is photoimaged to polymerize a first portion of the dielectric layer on a first region of the substrate, leaving the remainder of the dielectric layer unpolymerized. An electrically resistive film is then applied to the dielectric layer, and the dielectric layer is developed to remove concurrently the unpolymerized portion thereof and the portion of the resistive film overlying the unpolymerized portion, so that a portion of the resistive film remains over the second portion to form the resistor. An alternative process order is to apply the resistive film prior to exposing the dielectric layer to radiation, and then exposing the dielectric layer through the resistive film. The resistive film is preferably a multilayer film that includes an electrically resistive layer, such as NiP, NiCr or another nickel-containing alloy, and a sacrificial backing such as a layer of copper.
    • 一种用于制造具有所需加工和尺寸特性的电阻器,特别是金属电阻膜的微电子组件的方法。 该方法通常需要将光敏电介质施加到衬底以形成电介质层。 介电层被光刻以在基板的第一区域上聚合电介质层的第一部分,留下介电层的其余部分未聚合。 然后将电阻膜施加到电介质层,并且电介质层被显影以同时除去其未聚合部分和覆盖未聚合部分的电阻膜的部分,使得电阻膜的一部分保留在第二部分上 以形成电阻器。 替代的处理顺序是在将电介质层暴露于辐射之前施加电阻膜,然后将电介质层暴露于电阻膜。 电阻膜优选为包含电阻层的多层膜,例如NiP,NiCr或其它含镍合金,以及牺牲衬底,例如铜层。
    • 9. 发明授权
    • Flexural plate wave systems
    • 弯曲板波系统
    • US06777727B2
    • 2004-08-17
    • US10304429
    • 2002-11-26
    • Gregory J. DunnAllyson BeuhlerDavid Penunuri
    • Gregory J. DunnAllyson BeuhlerDavid Penunuri
    • H01L2980
    • G01N29/245G01N29/022G01N29/222G01N2291/0256G01N2291/0427H01L27/20
    • An exemplary system and method for providing an acoustic plate wave apparatus is disclosed as comprising inter alia: a monocrystalline silicon substrate (200); an amorphous oxide material (220); a monocrystalline perovskite oxide material (230); a monocrystalline piezoelectric material (240); and a flexural plate wave component (250, 270) having an input interdigitated transducer (270), an output interdigitated transducer (250) and an optional support layer (260). Deposition or removal of material on or from an absorptive thin film sensor surface (210), or changes in the mechanical properties of the thin film (210) in contact with various chemical species, or changes in the electrical characteristics of a solvent solution exposed to the thin film (210) generally operate to produce measurable perturbations in the vector quantities (e.g., velocity, etc.) and scalar quantities (e.g., attenuation, etc.) of the acoustic plate modes.
    • 公开了一种用于提供声板波装置的示例性系统和方法,其包括:单晶硅衬底(200); 无定形氧化物材料(220); 单晶钙钛矿氧化物材料(230); 单晶压电材料(240); 以及具有输入交叉换能器(270)的弯曲板波分量(250,270),输出叉指换能器(250)和可选支撑层(260)。 在吸收薄膜传感器表面(210)上或从吸收薄膜传感器表面(210)上沉积或去除材料,或与各种化学物质接触的薄膜(210)的机械性能的变化,或暴露于 薄膜(210)通常用于在声板模式的矢量(例如,速度等)和标量(例如,衰减等)中产生可测量的扰动。
    • 10. 发明授权
    • Methods and compositions for attachment of biomolecules to solid supports, hydrogels, and hydrogel arrays
    • 用于将生物分子附着到固体支持物,水凝胶和水凝胶阵列的方法和组合物
    • US06686161B2
    • 2004-02-03
    • US09976986
    • 2001-10-11
    • Travis JohnsonJohn McGowenAllyson BeuhlerCharles Kimball BrushRobert Emil Lajos
    • Travis JohnsonJohn McGowenAllyson BeuhlerCharles Kimball BrushRobert Emil Lajos
    • C08J328
    • G01N33/54353
    • The present invention provides solid supports (e.g., glass) and polymer hydrogels (particularly polymer hydrogel arrays present on a solid support) comprising one or more reactive sites for the attachment of biomolecules, as well as biomolecules comprising one or more reactive sites for attachment to solid supports and polymer hydrogels. The invention further provides novel compositions and methods for the preparation of biomolecules, solid supports, and polymer hydrogels comprising reactive sites. The invention also provides for preparation of crosslinked solid supports, polymer hydrogels, and hydrogel arrays, wherein one or more biomolecules is attached by means of the reactive sites in a photocycloaddition reaction. Advantageously, according to the invention, crosslinking of the hydrogel and attachment of biomolecules can be done in a single step.
    • 本发明提供固体支持物(例如玻璃)和聚合物水凝胶(特别是存在于固体支持物上的聚合物水凝胶阵列),其包含用于附着生物分子的一个或多个反应性位点,以及包含一个或多个反应性位点的生物分子, 固体支持物和聚合物水凝胶。 本发明还提供了用于制备生物分子,固体支持物和包含反应性位点的聚合物水凝胶的新型组合物和方法。 本发明还提供了交联固体载体,聚合物水凝胶和水凝胶阵列的制备,其中通过光环加成反应中的反应性位点连接一个或多个生物分子。 有利地,根据本发明,水凝胶的交联和生物分子的连接可以在单一步骤中进行。