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1. 发明授权

US07023604B2 Three dimensional optical switches and beam steering modules 有权
标题翻译：三维光开关和光束转向模块
公开(公告)号：US07023604B2
公开(公告)日：2006-04-04
申请号：US09812066
申请日：2001-03-17
申请人： Behrang Behin , Robert Conant , Michael J. Daneman , David Horsley , Meng-Hsiung Kiang , David Lerner , Satinderpall Pannu
发明人： Behrang Behin , Robert Conant , Michael J. Daneman , David Horsley , Meng-Hsiung Kiang , David Lerner , Satinderpall Pannu
IPC分类号： C02B26/00 , C02B26/08 , C02B6/26
CPC分类号： G02B6/3556 , G02B6/3512 , G02B6/3588
摘要： A beam steering module comprised of a mirror stack array in close proximity to a collimator array controllably steers photons along two axis and in a direction substantially less than 90 degrees to the collimator orientation. Several configurations of the module are described using single and double axis mirror rotation and relay optics. Optical telecommunications switches are shown using modules coupled to each other along flat and curved surfaces, with and without use of fold mirror and enabling a plurality of configuration options including photodetector optical power monitoring schemes that require no external power taps.
摘要翻译：光束转向模块包括靠近准直器阵列的反射镜堆叠阵列，其可控制地沿着两个轴线并且沿与准直器取向基本上小于90度的方向导引光子。使用单轴和双轴镜旋转和中继光学器件描述了该模块的几种配置。光通信开关被示出为使用具有和不使用折叠镜的平面和弯曲表面彼此耦合的模块，并且实现多个配置选项，包括不需要外部电源抽头的光电检测器光功率监控方案。

2. 发明授权

US06819822B2 Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing 有权
标题翻译：具有垂直静电梳状驱动器的二维万向扫描执行器用于致动和/或感测
公开(公告)号：US06819822B2
公开(公告)日：2004-11-16
申请号：US09751660
申请日：2000-12-28
申请人： Behrang Behin , Michael J. Daneman , Meng-Hsiung Kiang , Kam-Yin Lau , Satinderpall Pannu
发明人： Behrang Behin , Michael J. Daneman , Meng-Hsiung Kiang , Kam-Yin Lau , Satinderpall Pannu
IPC分类号： G02B635
CPC分类号： G02B6/3556 , B81B3/0021 , B81B2201/033 , B81B2201/045 , B81B2203/0181 , B81B2203/058 , B81B2207/07 , B81C1/00214 , G02B6/3512 , G02B6/3518 , G02B6/3542 , G02B6/3546 , G02B6/356 , G02B6/357 , G02B6/3584 , G02B26/0833 , G02B26/085 , G02B26/0858 , G02B26/0866 , H02N1/008
摘要： A two-dimensional scanner consists of a rotatable gimbal structure with vertical electrostatic comb-drive actuators and sensors. The scanner's two axes of rotation may be controlled independently by activating two sets of vertical comb-drive actuators. The first set of vertical comb-drive actuator is positioned in between a outer frame of the gimbal structure and the base, and the second set of vertical comb-drive actuator is positioned in between the inner part of the gimbal structure and the outer frame of the gimbal structure. The inner part of the gimbal structure may include a reflective surface, and the device may be used as a mirror. Furthermore, the capacitance of the vertical comb-drives may be measured to monitor the angular position of the mirror, and the capacitive position-monitoring signal may be used to implement closed-loop feedback control of the mirror angle. The two-dimensional scanner may be fabricated in a semiconductor process. Two-dimensional scanners may be used to produce fiber-optic switches.
摘要翻译：二维扫描器由可旋转的万向架结构与垂直静电梳状驱动致动器和传感器组成。扫描仪的两个旋转轴可以通过激活两组垂直梳齿驱动执行器来独立控制。第一组垂直梳齿驱动致动器位于万向架结构的外框架和基座之间，第二组垂直梳齿驱动致动器定位在万向架结构的内部和外框之间万向架结构。万向节结构的内部可以包括反射表面，并且该装置可以用作反射镜。此外，可以测量垂直梳状驱动器的电容以监视反射镜的角度位置，并且可以使用电容位置监视信号来实现镜角的闭环反馈控制。二维扫描器可以在半导体工艺中制造。二维扫描仪可用于生产光纤交换机。

3. 发明授权

US06330102B1 Apparatus and method for 2-dimensional steered-beam NxM optical switch using single-axis mirror arrays and relay optics 有权
标题翻译：使用单轴反射镜阵列和继电器光学的二维转向光束NxM光开关的装置和方法
公开(公告)号：US06330102B1
公开(公告)日：2001-12-11
申请号：US09536164
申请日：2000-03-25
申请人： Michael J. Daneman , Behrang Behin , Satinderpall Pannu
发明人： Michael J. Daneman , Behrang Behin , Satinderpall Pannu
IPC分类号： G02B2600
CPC分类号： G02B6/3556 , B81B3/0021 , B81B2201/033 , B81B2201/045 , B81B2203/0181 , B81B2203/058 , B81B2207/07 , B81C1/00214 , G02B6/3512 , G02B6/3518 , G02B6/3542 , G02B6/3546 , G02B6/356 , G02B6/357 , G02B6/3584 , G02B26/0833 , G02B26/085 , G02B26/0858 , G02B26/0866 , H02N1/008
摘要： A beam steering module and switching system. The steering module is composed of a N×M array of single axis mirrors able to rotate about a particular axis (X-axis), a second N×M array of single axis mirrors able to rotate about an axis orthogonal to that of the first N×M array of mirrors (Y-axis), and a relay lens designed to image the first mirror array onto the second mirror array such that the beam angle may be controlled in both the X and Y-axis by adjusting the angle of the appropriate mirrors in the X and Y mirror arrays. Two steering modules may be combined to form a switching system. With two such steering modules, it is possible to completely determine, at the plane of the output fiber array, the position and angle of an optical beam emerging from any of the input fibers.
摘要翻译：光束转向模块和开关系统。转向模块由能够围绕特定轴线（X轴）旋转的单轴镜的N×M阵列组成，能够围绕与第一N×M阵列阵列的轴正交的轴线旋转的单轴镜的第二N×M阵列（Y轴）和设计成将第一反射镜阵列成像到第二反射镜阵列上的中继透镜，使得可以通过调整X中的适当反射镜的角度来控制X和Y轴两者的光束角度，以及 Y镜阵列。可以组合两个转向模块以形成切换系统。使用两个这样的转向模块，可以在输出光纤阵列的平面处完全确定从任何输入光纤出射的光束的位置和角度。

4. 发明授权

US06629461B2 Biased rotatable combdrive actuator methods 有权
公开(公告)号：US06629461B2
公开(公告)日：2003-10-07
申请号：US09809994
申请日：2001-03-14
申请人： Behrang Behin , Satinderpall Pannu
发明人： Behrang Behin , Satinderpall Pannu
IPC分类号： G01P1508
CPC分类号： G02B6/357 , G02B6/3512 , G02B6/3518 , G02B6/3524 , G02B6/3584 , G02B6/359 , G02B26/0833 , G02B26/085 , G02B26/0858 , G02B26/0866 , H02N1/008
摘要： A method for rotating a combdriven device about an axis uses applied bias force along with applied voltage between first and second comb fingers to controllably rotate the device about one or two axis. One mode of the present invention includes measuring the position of a rotating element and providing feedback to control the angular position thereof by changing bias force and/or drive voltage. The present invention can be employed with prior-art staggered combdrives, single layer self-aligned combdriven devices, and in a broad range of applications in optical telecommunication switching, video, biomedical, inertial sensors, and in storage magnetic disk drives.

5. 发明授权

US06612029B2 Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods 有权
标题翻译：多层，自对准垂直梳齿驱动器静电执行器和制造方法
公开(公告)号：US06612029B2
公开(公告)日：2003-09-02
申请号：US09810335
申请日：2001-03-14
申请人： Behrang Behin , Satinderpall Pannu
发明人： Behrang Behin , Satinderpall Pannu
IPC分类号： H05K302
CPC分类号： G02B6/357 , B81B3/0021 , B81B2201/033 , B81B2201/042 , B81B2201/045 , B81B2203/0136 , B81B2203/0181 , B81B2203/058 , B81C1/0015 , B81C1/00214 , B81C1/00396 , G02B6/3518 , G02B6/3524 , G02B6/3584 , G02B6/359 , G02B26/0833 , H02N1/008 , Y10T29/49005 , Y10T29/49126 , Y10T29/49155 , Y10T29/49156
摘要： A method of fabricating multi-layer vertical comb-drive actuator that includes a first comb structure having a plurality of first comb fingers and a second comb structure having a plurality of second comb fingers, wherein the first and second comb fingers are substantially interdigitated. The present invention includes masking and etching of a structure that contains these multiple layers, wherein the first and second comb fingers are simultaneously fabricated. The first and second comb fingers may include two or more stacked conductive layers electrically isolated from each other by an insulating layer or an air gap. Alternatively, either the first or second comb fingers may include only one conductive layer.
摘要翻译：一种制造多层垂直梳状驱动致动器的方法，该致动器包括具有多个第一梳齿的第一梳结构和具有多个第二梳指的第二梳结构，其中第一和第二梳指基本上交错。本发明包括掩蔽和蚀刻包含这些多层的结构，其中同时制造第一和第二梳齿。第一和第二梳齿可以包括通过绝缘层或气隙彼此电隔离的两个或更多个堆叠的导电层。或者，第一或第二梳齿可以仅包括一个导电层。

6. 发明授权

US06744173B2 Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods 有权
标题翻译：多层，自对准垂直梳齿驱动器静电执行器和制造方法
公开(公告)号：US06744173B2
公开(公告)日：2004-06-01
申请号：US09810333
申请日：2001-03-14
申请人： Behrang Behin , Satinderpall Pannu
发明人： Behrang Behin , Satinderpall Pannu
IPC分类号： G02B2610
CPC分类号： G02B6/357 , B81B3/0021 , B81B2201/033 , B81B2201/042 , B81B2201/045 , B81B2203/0136 , B81B2203/0181 , B81B2203/058 , B81C1/0015 , B81C1/00214 , B81C1/00396 , G02B6/3518 , G02B6/3524 , G02B6/3584 , G02B6/359 , G02B26/0833 , H02N1/008 , Y10T29/49005 , Y10T29/49126 , Y10T29/49155 , Y10T29/49156
摘要： A multi-layer vertical comb-drive actuator includes a first comb structure having a plurality of first comb fingers and a second comb structure having a plurality of second comb fingers, wherein the first and second comb fingers are substantially interdigitated. The first and second comb fingers may include two or more stacked conductive layers electrically isolated from each other by an insulating layer or an air gap. Alternatively, either the first or second comb fingers may include only one conductive layer. An application of a voltage between the first and second comb fingers causes the second comb structure to move relative to the first comb structure. The present invention includes a 2D-gimble configuration to rotate a movable element along two axis.
摘要翻译：多层垂直梳驱动致动器包括具有多个第一梳指的第一梳结构和具有多个第二梳指的第二梳结构，其中第一梳指和第二梳指基本相互交错。第一和第二梳齿可以包括通过绝缘层或气隙彼此电隔离的两个或更多个堆叠的导电层。或者，第一或第二梳齿可以仅包括一个导电层。施加第一和第二梳齿之间的电压使得第二梳状结构相对于第一梳状结构移动。本发明包括沿着两个轴线旋转可移动元件的2D柔性配置。

7. 发明授权

US06593677B2 Biased rotatable combdrive devices and methods 有权
标题翻译：偏置式可旋转梳齿装置及方法
公开(公告)号：US06593677B2
公开(公告)日：2003-07-15
申请号：US09810336
申请日：2001-03-14
申请人： Behrang Behin , Satinderpall Pannu
发明人： Behrang Behin , Satinderpall Pannu
IPC分类号： H02N100
CPC分类号： G02B6/357 , G02B6/3518 , G02B6/3524 , G02B6/358 , G02B6/3584 , G02B6/359 , G02B26/0833 , G02B26/085 , G02B26/0858 , G02B26/0866 , H02N1/008
摘要： Rotating devices including actuators and position sensors that employ combdrives are described. One design of a combdrive fabricated from a single layer is provided such that, in a nominal state, the two sets of comb fingers are substantially interdigitated according to a predetermined engagement. A rotating element may be attached to a rotatable flexure disposed along an axis and coupled to the comb fingers along with a biasing element attached to the rotating element to cause the comb fingers along with the rotating element to undergo a controlled angular displacement from the initial engagement and in response to feedback from sensing the position of the movable or rotating element. A voltage may be applied between comb fingers to cause the rotating element to undergo further rotation about the axis in a predetermined manner. Alternatively, a time-vary biasing force may be exerted on the rotating element, causing the first comb fingers along with the rotating element to undergo further rotation about the axis in a predetermined manner. The combdriven device can serve as both rotating actuators and position sensor. By arranging two such combdrives in a gimbaled structure bi-axial rotating actuators and position sensors may be constructed. The combdrive devices of the present invention can be employed in a broad range of applications, including biomedical devices, optical devices for tracking and display, telecommunication devices such as fiber-optic switches, inertial sensors, and magnetic disk drives.
摘要翻译：描述了包括使用梳齿的致动器和位置传感器的旋转装置。提供由单层制造的梳齿驱动器的一种设计，使得在标称状态下，两组梳指根据预定的接合基本上互相指向。旋转元件可以附接到沿着轴线设置的可旋转的弯曲部，并且与附接到旋转元件的偏压元件一起耦合到梳齿，以使梳齿与旋转元件一起经受来自初始接合的受控角位移并且响应于来自感测可移动或旋转元件的位置的反馈。可以在梳齿之间施加电压，使得旋转元件以预定的方式围绕轴进行进一步的旋转。或者，可以在旋转元件上施加时变偏压力，使得第一梳指与旋转元件一起以预定方式围绕轴进行进一步旋转。梳齿装置可用作旋转执行器和位置传感器。通过在万向结构中布置两个这样的梳齿可以构造双轴旋转致动器和位置传感器。本发明的梳状驱动装置可以用于广泛的应用，包括生物医学装置，用于跟踪和显示的光学装置，诸如光纤开关，惯性传感器和磁盘驱动器之类的电信装置。

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