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1. 发明授权

US07234214B2 Methods for making thick film elements 有权
标题翻译：制作厚膜元件的方法
公开(公告)号：US07234214B2
公开(公告)日：2007-06-26
申请号：US11084579
申请日：2005-03-18
申请人： Baomin Xu , Steven A. Buhler , Michael C. Weisberg , William S. Wong , Scott E. Solberg , Karl A. Littau , John S. Fitch , Scott A. Elrod
发明人： Baomin Xu , Steven A. Buhler , Michael C. Weisberg , William S. Wong , Scott E. Solberg , Karl A. Littau , John S. Fitch , Scott A. Elrod
IPC分类号： H04R17/00
CPC分类号： B41J2/161 , B41J2/1623 , B41J2/1632 , B41J2/1634 , B41J2/1637 , B41J2/1646 , H01L41/313 , H01L41/314 , H01L41/331 , H01L2221/68368 , Y10T29/42 , Y10T29/435 , Y10T29/49128 , Y10T29/4913 , Y10T29/49133 , Y10T29/49155 , Y10T29/4981
摘要： A method of producing at least one thick film element, including depositing a material on a surface of at least one first substrate to form at least one thick film element structure having a thickness of approximately greater than 10 μm to 100 μm. Then, then the at least one thick film element structure is bonded to a second substrate, and the at least one first substrate is removed from the at least one thick film element structure using a lift-off process employing radiation energy. The lift-off process including emitting, from a radiation source, a radiation beam through the first substrate to an attachment interface formed between the first substrate and the at least one thick film element structure at the first surface of the first substrate. The first substrate being substantially transparent at the wavelength of the radiation beam, permitting the radiation beam to generate sufficient energy at the interface to break the attachment.
摘要翻译：一种生产至少一个厚膜元件的方法，包括在至少一个第一基底的表面上沉积材料以形成至少一个厚度大约在10至100μm的厚膜元件结构。然后，将至少一个厚膜元件结构接合到第二基板，并且使用采用辐射能的剥离工艺将至少一个第一基板从至少一个厚膜元件结构移除。剥离过程包括从辐射源将辐射束从第一衬底发射到在第一衬底的第一表面处形成在第一衬底和至少一个厚膜元件结构之间的附接界面。第一衬底在辐射束的波长处基本上是透明的，允许辐射束在界面处产生足够的能量以破坏附件。

2. 发明授权

US07091650B2 Piezoelectric ceramic thick film element, array of elements, and devices 有权
标题翻译：压电陶瓷厚膜元件，元件阵列和器件
公开(公告)号：US07091650B2
公开(公告)日：2006-08-15
申请号：US11017494
申请日：2004-12-20
申请人： Baomin Xu , Steven A. Buhler , Michael C. Weisberg , William S. Wong , Scott E. Solberg , Karl A. Littau , John S. Fitch , Scott A. Elrod
发明人： Baomin Xu , Steven A. Buhler , Michael C. Weisberg , William S. Wong , Scott E. Solberg , Karl A. Littau , John S. Fitch , Scott A. Elrod
IPC分类号： H01L41/08
CPC分类号： B41J2/161 , B41J2/1623 , B41J2/1632 , B41J2/1634 , B41J2/1637 , B41J2/1646 , H01L41/313 , H01L41/314 , H01L41/331 , H01L2221/68368 , Y10T29/42 , Y10T29/435 , Y10T29/49128 , Y10T29/4913 , Y10T29/49133 , Y10T29/49155 , Y10T29/4981
摘要： A piezoelectric thick film element array includes at least one piezoelectric element structure having a thickness between 10 μm to 100 μm formed by a deposition process. The at least one piezoelectric element is patterned during the deposition process, and includes a first electrode deposited on a first surface of the piezoelectric elements structure, and a second electrode deposited on a second surface of the piezoelectric element structure. In a further embodiment, several devices are provided using a piezoelectric element or an array having a piezoelectric element structure with a thickness of between 10 μm to 100 μm formed by a deposition process. These devices include microfluidic ejectors, transducer arrays and catheters.
摘要翻译：压电厚膜元件阵列包括通过沉积工艺形成的至少一个压电元件结构，其厚度在10um至100μm之间。所述至少一个压电元件在所述沉积工艺期间被图案化，并且包括沉积在所述压电元件结构的第一表面上的第一电极和沉积在所述压电元件结构的第二表面上的第二电极。在另一实施例中，使用压电元件或具有通过沉积工艺形成的厚度在10um至100μm之间的压电元件结构的阵列来提供若干器件。这些装置包括微流体喷射器，换能器阵列和导管。

3. 发明授权

US07089635B2 Methods to make piezoelectric ceramic thick film arrays and elements 有权
标题翻译：制造压电陶瓷厚膜阵列和元件的方法
公开(公告)号：US07089635B2
公开(公告)日：2006-08-15
申请号：US10376544
申请日：2003-02-25
申请人： Baomin Xu , Steven A. Buhler , Michael C. Weisberg , William S. Wong , Scott E. Solberg , Karl A. Littau , John S. Fitch , Scott A. Elrod
发明人： Baomin Xu , Steven A. Buhler , Michael C. Weisberg , William S. Wong , Scott E. Solberg , Karl A. Littau , John S. Fitch , Scott A. Elrod
IPC分类号： H04R17/00
CPC分类号： B41J2/161 , B41J2/1623 , B41J2/1632 , B41J2/1634 , B41J2/1637 , B41J2/1646 , H01L41/313 , H01L41/314 , H01L41/331 , H01L2221/68368 , Y10T29/42 , Y10T29/435 , Y10T29/49128 , Y10T29/4913 , Y10T29/49133 , Y10T29/49155 , Y10T29/4981
摘要： A method of producing at least one piezoelectric element includes depositing a piezoelectric ceramic material onto a surface of a first substrate to form at least one piezoelectric element structure. Then an electrode is deposited on a surface of the at least one piezoelectric element structure. Next, the at least one piezoelectric element structure is bonded to a second substrate, the second substrate being conductive or having a conductive layer. The first substrate is then removed from the at least one piezoelectric element structure and a second side electrode is deposited on a second surface of the at least one piezoelectric element structure. A poling operation is performed to provide the at least one piezoelectric element structure with piezoelectric characteristics.
摘要翻译：制造至少一个压电元件的方法包括将压电陶瓷材料沉积到第一基板的表面上以形成至少一个压电元件结构。然后在至少一个压电元件结构的表面上沉积电极。接下来，将至少一个压电元件结构接合到第二基板，第二基板是导电的或具有导电层。然后从至少一个压电元件结构去除第一衬底，并且第二侧电极沉积在至少一个压电元件结构的第二表面上。执行极化操作以向至少一个压电元件结构提供压电特性。

4. 发明授权

US06964201B2 Large dimension, flexible piezoelectric ceramic tapes 失效
标题翻译：大尺寸，柔性压电陶瓷带
公开(公告)号：US06964201B2
公开(公告)日：2005-11-15
申请号：US10376527
申请日：2003-02-25
申请人： Baomin Xu , Steven A. Buhler , William S. Wong , Michael C. Weisberg , Scott E. Solberg , Karl A. Littau , Scott A. Elrod
发明人： Baomin Xu , Steven A. Buhler , William S. Wong , Michael C. Weisberg , Scott E. Solberg , Karl A. Littau , Scott A. Elrod
IPC分类号： H01L41/09 , B06B1/06 , G01L1/16 , H01L27/20 , H01L41/08 , H01L41/18 , H01L41/187 , H01L41/24 , H01L41/26 , H03H9/17 , G01N3/00
CPC分类号： G01N29/245 , B06B1/0622 , G01L1/16 , G01N29/2475 , G01N2291/02827 , G01N2291/2694 , H01L27/20 , H01L41/313 , H01L41/314 , H01L41/47
摘要： A flexible detection/test tape includes a first flexible conductive layer, and a second flexible conductive layer positioned opposite the first conductive layer. A plurality of at least one of sensors, actuators or transducers are positioned between and are bonded to the first flexible conductive layer and the second flexible conductive layer. An insulative material is inserted around the plurality of at least one of the sensors, actuators or transducers. An electrical contact network connects to the first flexible conductive layer and the second flexible conductive layer, whereby power and control signals are provided to the flexible detection/test tape.
摘要翻译：柔性检测/测试带包括第一柔性导电层和与第一导电层相对定位的第二柔性导电层。多个传感器，致动器或换能器中的至少一个位于第一柔性导电层和第二柔性导电层之间并且被结合到第一柔性导电层和第二柔性导电层之间。绝缘材料插入到多个传感器，致动器或换能器中的至少一个传感器周围。电接触网络连接到第一柔性导电层和第二柔性导电层，由此向柔性检测/测试带提供电力和控制信号。

5. 发明授权

US07118990B1 Methods for making large dimension, flexible piezoelectric ceramic tapes 有权
标题翻译：制造大尺寸柔性压电陶瓷带的方法
公开(公告)号：US07118990B1
公开(公告)日：2006-10-10
申请号：US11017470
申请日：2004-12-20
申请人： Baomin Xu , Steven A. Buhler , William S. Wong , Michael C. Weisberg , Scott E. Solberg , Karl A. Littau , Scott A. Elrod
发明人： Baomin Xu , Steven A. Buhler , William S. Wong , Michael C. Weisberg , Scott E. Solberg , Karl A. Littau , Scott A. Elrod
IPC分类号： H01L21/30 , H01L21/46
CPC分类号： G01N29/245 , B06B1/0622 , G01L1/16 , G01N29/2475 , G01N2291/02827 , G01N2291/2694 , H01L27/20 , H01L41/313 , H01L41/314 , H01L41/47
摘要： A method for producing a detection/test tape includes depositing a material onto a surface of at least one first substrate to form a plurality of element structures. Electrodes are deposited on a surface of each of the plurality of element structures, and the element structures are bonded to a second substrate, where the second substrate is conductive or has a conductive layer, and the second substrate is carried on a carrier plate. The at least one first substrate is removed from the element structures and second side electrodes are deposited on a second surface of each of the plurality of element structures. An insulative material is inserted around the element structures to electrically isolate the two substrates used to bond the element structures. A second side of the element structures is then bonded to another substrate, where the other substrate is conductive or has a conductive layer. Thereafter, the carrier plate carrying the second substrate is removed.
摘要翻译：一种用于制造检测/测试带的方法包括将材料沉积在至少一个第一基底的表面上以形成多个元件结构。电极沉积在多个元件结构中的每一个的表面上，并且元件结构被结合到第二衬底，其中第二衬底是导电的或具有导电层，并且第二衬底承载在载体板上。从元件结构中去除至少一个第一衬底，并且将第二侧电极沉积在多个元件结构中的每一个的第二表面上。绝缘材料插入在元件结构周围以电隔离用于结合元件结构的两个基板。然后将元件结构的第二面接合到另一个衬底，其中另一个衬底是导电的或具有导电层。此后，移除携带第二基板的承载板。

6. 发明授权

US07574787B2 Methods to make piezoelectric ceramic thick film array and single elements with a reusable single layer substrate structure 失效
标题翻译：制造压电陶瓷厚膜阵列和单一元件的方法，具有可重复使用的单层基板结构
公开(公告)号：US07574787B2
公开(公告)日：2009-08-18
申请号：US11363849
申请日：2006-02-28
申请人： Baomin Xu , Steven A. Buhler , Michael C. Welsberg , William S. Wong , Scott E. Solberg , Karl A. Littau , John S. Fitch , Scott A. Elrod
发明人： Baomin Xu , Steven A. Buhler , Michael C. Welsberg , William S. Wong , Scott E. Solberg , Karl A. Littau , John S. Fitch , Scott A. Elrod
IPC分类号： H04R17/00
CPC分类号： B41J2/161 , B41J2/1623 , B41J2/1632 , B41J2/1634 , B41J2/1637 , B41J2/1646 , H01L41/313 , H01L41/314 , H01L41/331 , H01L2221/68368 , Y10T29/42 , Y10T29/435 , Y10T29/49128 , Y10T29/4913 , Y10T29/49133 , Y10T29/49155 , Y10T29/4981
摘要： A method of producing at least one piezoelectric element includes depositing a piezoelectric ceramic material onto a surface of a first substrate to form at least one piezoelectric element structure. Then an electrode is deposited on a surface of the at least one piezoelectric element structure. Next, the at least one piezoelectric element structure is bonded to a second substrate, the second substrate being conductive or having a conductive layer. The first substrate is then removed from the at least one piezoelectric element structure and a second side electrode is deposited on a second surface of the at least one piezoelectric element structure. A poling operation is performed to provide the at least one piezoelectric element structure with piezoelectric characteristics.
摘要翻译：制造至少一个压电元件的方法包括将压电陶瓷材料沉积到第一基板的表面上以形成至少一个压电元件结构。然后在至少一个压电元件结构的表面上沉积电极。接下来，将至少一个压电元件结构接合到第二基板，第二基板是导电的或具有导电层。然后从至少一个压电元件结构去除第一衬底，并且第二侧电极沉积在至少一个压电元件结构的第二表面上。执行极化操作以向至少一个压电元件结构提供压电特性。

7. 发明申请

US20090113685A1 Methods to make piezoelectric ceramic thick film array and single elements and devices 失效
标题翻译：制造压电陶瓷厚膜阵列和单元件和器件的方法
公开(公告)号：US20090113685A1
公开(公告)日：2009-05-07
申请号：US11363849
申请日：2006-02-28
申请人： Baomin Xu , Steven A. Buhler , Michael C. Welsberg , William S. Wong , Scott E. Solberg , Karl A. Littau , John S. Fitch , Scott A. Elrod
发明人： Baomin Xu , Steven A. Buhler , Michael C. Welsberg , William S. Wong , Scott E. Solberg , Karl A. Littau , John S. Fitch , Scott A. Elrod
IPC分类号： H04R17/00
CPC分类号： B41J2/161 , B41J2/1623 , B41J2/1632 , B41J2/1634 , B41J2/1637 , B41J2/1646 , H01L41/313 , H01L41/314 , H01L41/331 , H01L2221/68368 , Y10T29/42 , Y10T29/435 , Y10T29/49128 , Y10T29/4913 , Y10T29/49133 , Y10T29/49155 , Y10T29/4981
摘要： A method of producing at least one piezoelectric element includes depositing a piezoelectric ceramic material onto a surface of a first substrate to form at least one piezoelectric element structure. Then an electrode is deposited on a surface of the at least one piezoelectric element structure. Next, the at least one piezoelectric element structure is bonded to a second substrate, the second substrate being conductive or having a conductive layer. The first substrate is then removed from the at least one piezoelectric element structure and a second side electrode is deposited on a second surface of the at least one piezoelectric element structure. A poling operation is performed to provide the at least one piezoelectric element structure with piezoelectric characteristics.In another embodiment, a material for a thick film element is deposited onto a surface of a first substrate to form a thick film element structure having a thickness of between greater than 10 μm to 100 μm. The at least one thick film element structure is bonded to a second substrate. Thereafter, the first substrate is removed from the at least one thick film element structure using a liftoff process which includes emitting, from a radiation source (such as a laser or other appropriate device), a beam through the first substrate to an attachment interface formed between the first substrate and the at least one thick film element structure at the surface of the first substrate. The first substrate is substantially transparent at the wavelength of the beam, and the beam generates sufficient energy at the interface to break the attachment.
摘要翻译：制造至少一个压电元件的方法包括将压电陶瓷材料沉积到第一基板的表面上以形成至少一个压电元件结构。然后在至少一个压电元件结构的表面上沉积电极。接下来，将至少一个压电元件结构接合到第二基板，第二基板是导电的或具有导电层。然后从至少一个压电元件结构去除第一衬底，并且第二侧电极沉积在至少一个压电元件结构的第二表面上。执行极化操作以向至少一个压电元件结构提供压电特性。在另一个实施例中，用于厚膜元件的材料沉积到第一基底的表面上以形成厚度大于10um至100μm的厚膜元件结构。所述至少一个厚膜元件结构被结合到第二基板。此后，使用包括从辐射源（例如激光或其它合适的装置）发射通过第一基板的光束到形成的附接接口的剥离过程，从至少一个厚膜元件结构中去除第一基板，在第一基板和第一基板的表面处的至少一个厚膜元件结构之间。第一衬底在光束的波长处基本上是透明的，并且光束在界面处产生足够的能量以破坏附件。

8. 发明授权

US07445315B2 Thin film and thick film heater and control architecture for a liquid drop ejector 有权
标题翻译：薄膜和厚膜加热器和液滴喷射器的控制架构
公开(公告)号：US07445315B2
公开(公告)日：2008-11-04
申请号：US10990110
申请日：2004-11-15
申请人： Michael Yu Tak Young , Steven A. Buhler , Scott Jong Ho Limb , Karl A. Littau , Beverly J. Russo , Scott E. Solberg , Michael C. Weisberg , Cathie J. Burke , Richard Schmachtenberg , Peter J. Nystrom , Sharon Berger , Timothy Trang , Thomas Long
发明人： Michael Yu Tak Young , Steven A. Buhler , Scott Jong Ho Limb , Karl A. Littau , Beverly J. Russo , Scott E. Solberg , Michael C. Weisberg , Cathie J. Burke , Richard Schmachtenberg , Peter J. Nystrom , Sharon Berger , Timothy Trang , Thomas Long
IPC分类号： B41J2/05
CPC分类号： B41J2/1626 , B41J2/14072 , B41J2/14129 , B41J2/14153 , B41J2/1603 , B41J2/1631
摘要： A liquid drop ejector comprising a jet stack, thin film or thick film heaters formed on the surface of the jet stack, and at least one thin film or thick film temperature sensor operative to provide feedback temperature control for the thin film or thick film heater elements is provided. In one form, the liquid drop ejector also has the thin film or thick film heater elements grouped in segments that are operative to be individually controlled. In addition, in another form, the signal lines provided to the liquid drop ejector are patterned to allow for more uniform resistance over the span of the liquid drop ejector.
摘要翻译：一种液滴喷射器，包括形成在射流堆叠表面上的喷射叠层，薄膜或厚膜加热器，以及至少一个薄膜或厚膜温度传感器，用于为薄膜或厚膜加热器元件提供反馈温度控制被提供。在一种形式中，液滴喷射器还具有分组的薄膜或厚膜加热器元件，其可操作以单独控制。此外，在另一种形式中，提供给液滴喷射器的信号线被图案化以允许在液滴喷射器的跨度上具有更均匀的电阻。

9. 发明申请

US20110031211A1 Metal Trace Fabrication For Optical Element 有权
标题翻译：金属痕迹制作光学元件
公开(公告)号：US20110031211A1
公开(公告)日：2011-02-10
申请号：US12909488
申请日：2010-10-21
申请人： Hing Wah Chan , Harold Ackler , Scott E. Solberg , John S. Fitch , David K. Fork , David G. Duff , Michael C. Weisberg
发明人： Hing Wah Chan , Harold Ackler , Scott E. Solberg , John S. Fitch , David K. Fork , David G. Duff , Michael C. Weisberg
IPC分类号： B29D11/00 , B05D5/06
CPC分类号： H01L31/054 , H01L24/13 , H01L24/16 , H01L31/0547 , H01L2224/0554 , H01L2224/05568 , H01L2224/05573 , H01L2224/13101 , H01L2224/16237 , H01L2924/00014 , Y02E10/52 , Y10T156/10 , H01L2924/014 , H01L2224/05599 , H01L2224/0555 , H01L2224/0556
摘要： A system may include an optical element including a surface defining a recess, conductive material disposed within the recess, and a solder mask disposed over a portion of the conductive material. The solder mask may define an aperture through which light from the optical element may pass. Some aspects provide creation of an optical element including a surface defining a recess, deposition of conductive material on the surface such that a portion of the deposited conductive material is disposed within the recess, and substantial planarization of the surface to expose the portion of the conductive material disposed within the recess.
摘要翻译：系统可以包括光学元件，其包括限定凹部的表面，设置在凹部内的导电材料和设置在导电材料的一部分上的焊接掩模。焊接掩模可以限定光学元件可以经过的孔。一些方面提供了一种光学元件的创建，该光学元件包括限定凹部的表面，在该表面上沉积导电材料，使得一部分沉积的导电材料设置在该凹槽内，以及该表面的实质平面化以暴露导电部分设置在凹槽内的材料。

10. 发明授权

US08389851B2 Metal trace fabrication for optical element 有权
标题翻译：光学元件的金属轨迹制造
公开(公告)号：US08389851B2
公开(公告)日：2013-03-05
申请号：US12909488
申请日：2010-10-21
申请人： Hing Wah Chan , Harold Ackler , Scott E. Solberg , John S. Fitch , David K. Fork , David G. Duff , Michael C. Weisberg
发明人： Hing Wah Chan , Harold Ackler , Scott E. Solberg , John S. Fitch , David K. Fork , David G. Duff , Michael C. Weisberg
IPC分类号： H01L31/042
CPC分类号： H01L31/054 , H01L24/13 , H01L24/16 , H01L31/0547 , H01L2224/0554 , H01L2224/05568 , H01L2224/05573 , H01L2224/13101 , H01L2224/16237 , H01L2924/00014 , Y02E10/52 , Y10T156/10 , H01L2924/014 , H01L2224/05599 , H01L2224/0555 , H01L2224/0556
摘要： A system may include an optical element including a surface defining a recess, conductive material disposed within the recess, and a solder mask disposed over a portion of the conductive material. The solder mask may define an aperture through which light from the optical element may pass. Some aspects provide creation of an optical element including a surface defining a recess, deposition of conductive material on the surface such that a portion of the deposited conductive material is disposed within the recess, and substantial planarization of the surface to expose the portion of the conductive material disposed within the recess.
摘要翻译：系统可以包括光学元件，其包括限定凹部的表面，设置在凹部内的导电材料和设置在导电材料的一部分上的焊接掩模。焊接掩模可以限定光学元件可以经过的孔。一些方面提供了一种光学元件的创建，该光学元件包括限定凹部的表面，在该表面上沉积导电材料，使得一部分沉积的导电材料设置在该凹槽内，以及该表面的实质平面化以暴露导电部分设置在凹槽内的材料。

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