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    • 3. 发明授权
    • Plasma addressed liquid crystal display with etched glass spacers
    • 等离子体寻址液晶显示屏与蚀刻玻璃间隔
    • US06517402B1
    • 2003-02-11
    • US09911054
    • 2001-07-23
    • Babar A. KhanHenri R. J. R. Van HelleputteAdrianus L. J. BurgmansKarel Elbert KuijkPetrus F. G. BongaertsJacob Bruinink
    • Babar A. KhanHenri R. J. R. Van HelleputteAdrianus L. J. BurgmansKarel Elbert KuijkPetrus F. G. BongaertsJacob Bruinink
    • H01J924
    • G02F1/13334
    • A flat display device, preferably of the PALC type, in which the plasma channels are formed by etching laterally-spaced slots in a spacer plate, attaching a thin dielectric sheet over the etched spacer plate, and bonding the etched spacer plate to a transparent substrate such that each channel is formed by the portion of the substrate between flanking walls formed by the etched slots in the spacer plate, adjacent flanking walls in the spacer plate, and the overlying portion of the thin dielectric sheet. By positioning the flanking walls between channel electrode pairs, thus providing glass-to-glass interfaces, anodic bonding can be employed to assemble the three channel elements. Etching can be simplified by pre-attaching the unetched channel plate to the substrate or thin dielectric cover sheet with an intervening etch stop, and etching in situ using the-etch stop to prevent etching of the substrate or thin dielectric cover sheet. In a modification, the thin dielectric cover sheet as a separate element is substituted by depositing a continuous layer or multi-layers including an etch stop on the unetched spacer plate so that, following the etching, the deposited layer or multi-layer remains as the thin channel cover.
    • 优选为PALC型的平面显示装置,其中通过在间隔板中蚀刻横向间隔开的狭缝形成等离子体通道,将薄的电介质薄片附着在蚀刻的间隔板上,并将蚀刻的间隔板结合到透明基板 使得每个通道由衬底的部分由间隔板中的蚀刻槽形成的侧壁之间,间隔板中相邻的侧壁和薄介电片的上部形成。 通过将侧壁定位在通道电极对之间,从而提供玻璃 - 玻璃界面,可以采用阳极结合来组装三个通道元件。 可以通过将未蚀刻的通道板预先附着到具有中间蚀刻停止的基底或薄介电覆盖片上,并使用蚀刻停止层原位蚀刻以防止蚀刻基底或薄的介电覆盖片来简化蚀刻。 在一个修改中,通过在未蚀刻的间隔板上沉积包括蚀刻停止层的连续层或多层来替代作为单独元件的薄介电覆盖片,使得在蚀刻之后,沉积层或多层保持为 薄通道盖。
    • 5. 发明授权
    • Plasma addressed liquid crystal display with etched glass spacers
    • 等离子体寻址液晶显示屏与蚀刻玻璃间隔
    • US06285127B1
    • 2001-09-04
    • US09096073
    • 1998-06-11
    • Babar A. KhanHenri R. J. R. Van HelleputteAdrianus L. J. BurgmansKarel Elbert KuijkPetrus F. G. BongaertsJacob Bruinink
    • Babar A. KhanHenri R. J. R. Van HelleputteAdrianus L. J. BurgmansKarel Elbert KuijkPetrus F. G. BongaertsJacob Bruinink
    • H01J1749
    • G02F1/13334
    • A flat display device, preferably of the PALC type, in which the plasma channels are formed by etching laterally-spaced slots in a spacer plate, attaching a thin dielectric sheet over the etched spacer plate, and bonding the etched spacer plate to a transparent substrate such that each channel is formed by the portion of the substrate between flanking walls formed by the etched slots in the spacer plate, adjacent flanking walls in the spacer plate, and the overlying portion of the thin dielectric sheet. By positioning the flanking walls between channel electrode pairs, thus providing glass-to-glass interfaces, anodic bonding can be employed to assemble the three channel elements. Etching can be simplified by pre-attaching the unetched channel plate to the substrate or thin dielectric cover sheet with an intervening etch stop, and etching in situ using the etch stop to prevent etching of the substrate or thin dielectric cover sheet. In a modification, the thin dielectric cover sheet as a separate element is substituted by depositing a continuous layer or multi-layers including an etch stop on the unetched spacer plate so that, following the etching, the deposited layer or multi-layer remains as the thin channel cover.
    • 优选为PALC型的平面显示装置,其中通过在间隔板中蚀刻横向间隔开的狭缝形成等离子体通道,将薄的电介质薄片附着在蚀刻的间隔板上,并将蚀刻的间隔板结合到透明基板 使得每个通道由衬底的部分由间隔板中的蚀刻槽形成的侧壁之间,间隔板中相邻的侧壁和薄介电片的上部形成。 通过将侧壁定位在通道电极对之间,从而提供玻璃 - 玻璃界面,可以采用阳极结合来组装三个通道元件。 可以通过将未蚀刻的通道板预先附着到具有中间蚀刻停止的基片或薄介电覆盖片并且使用蚀刻停止层原位蚀刻以防止蚀刻基片或薄介电覆盖片来简化蚀刻。 在一个修改中,通过在未蚀刻的间隔板上沉积包括蚀刻停止层的连续层或多层来替代作为单独元件的薄介电覆盖片,使得在蚀刻之后,沉积层或多层保持为 薄通道盖。
    • 7. 发明授权
    • Plasma addressed liquid crystal display with etched glass spacers
    • 等离子体寻址液晶显示屏与蚀刻玻璃间隔
    • US5804920A
    • 1998-09-08
    • US588799
    • 1996-01-19
    • Babar A. KhanHenri R. J. R. Van HelleputteAdrianus L. J. BurgmansKarel Elbert KuijkPetrus F. G. BongaertsJacob Bruinink
    • Babar A. KhanHenri R. J. R. Van HelleputteAdrianus L. J. BurgmansKarel Elbert KuijkPetrus F. G. BongaertsJacob Bruinink
    • G02F1/133H01J17/49
    • G02F1/13334
    • A flat display device, preferably of the PALC type, in which the plasma channels are formed by etching laterally-spaced slots in a spacer plate, attaching a thin dielectric sheet over the etched spacer plate, and bonding the etched spacer plate to a transparent substrate such that each channel is formed by the portion of the substrate between flanking walls formed by the etched slots in the spacer plate, adjacent flanking walls in the spacer plate, and the overlying portion of the thin dielectric sheet. By positioning the flanking walls between channel electrode pairs, thus providing glass-to-glass interfaces, anodic bonding can be employed to assemble the three channel elements. Etching can be simplified by pre-attaching the unetched channel plate to the substrate or thin dielectric cover sheet with an intervening etch stop, and etching in situ using the etch stop to prevent etching of the substrate or thin dielectric cover sheet. In a modification, the thin dielectric cover sheet as a separate element is substituted by depositing a continuous layer or multi-layers including an etch stop on the unetched spacer plate so that, following the etching, the deposited layer or multi-layer remains as the thin channel cover.
    • 优选为PALC型的平面显示装置,其中通过在间隔板中蚀刻横向间隔开的狭缝形成等离子体通道,将薄的电介质薄片附着在蚀刻的间隔板上,并将蚀刻的间隔板结合到透明基板 使得每个通道由衬底的部分由间隔板中的蚀刻槽形成的侧壁之间,间隔板中相邻的侧壁和薄介电片的上部形成。 通过将侧壁定位在通道电极对之间,从而提供玻璃 - 玻璃界面,可以采用阳极结合来组装三个通道元件。 可以通过将未蚀刻的通道板预先附着到具有中间蚀刻停止的基片或薄介电覆盖片并且使用蚀刻停止层原位蚀刻以防止蚀刻基片或薄介电覆盖片来简化蚀刻。 在一个修改中,通过在未蚀刻的间隔板上沉积包括蚀刻停止层的连续层或多层来替代作为单独元件的薄介电覆盖片,使得在蚀刻之后,沉积层或多层保持为 薄通道盖。