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1. 发明申请

US20090313809A1 ELECTROMECHANICAL TRANSDUCER AND FABRICATION METHOD OF ELECTROMECHANICAL TRANSDUCING APPARATUS 有权
标题翻译：机电传感器和机电传动装置的制造方法
公开(公告)号：US20090313809A1
公开(公告)日：2009-12-24
申请号：US12489315
申请日：2009-06-22
申请人： Ayako Kato , Chienliu Chang
发明人： Ayako Kato , Chienliu Chang
IPC分类号： H04R31/00
CPC分类号： H04R31/00 , Y10T29/49005 , Y10T29/49007 , Y10T29/4908 , Y10T29/49137 , Y10T29/49155
摘要： A handling member is prepared that provides a channel that can withstand subsequent back face processing as to a substrate having elements made up of a substrate and a membrane, and the handling member is fixed to the substrate so that at least a portion within the elements are supported by the handling member. This provides a manufacturing method wherein the physical strength of an element at the time of manufacturing an electromechanical transducing apparatus is strengthened, and the handling member is easily detached in a short time after processing of the element.
摘要翻译：制备处理构件，其提供能够承受对由具有由基板和膜构成的元件的基板的后续后处理的通道，并且处理构件固定到基板，使得元件内的至少一部分为由处理构件支撑。这提供了一种制造方法，其中在制造机电换能装置时元件的物理强度得到加强，并且处理构件在元件处理后的短时间内容易地分离。

2. 发明申请

US20090313808A1 ELECTROMECHANICAL TRANSDUCER AND FABRICATION METHOD OF ELECTROMECHANICAL TRANSDUCING APPARATUS 有权
标题翻译：机电传感器和机电传动装置的制造方法
公开(公告)号：US20090313808A1
公开(公告)日：2009-12-24
申请号：US12488588
申请日：2009-06-22
申请人： Ayako Kato , Chienliu Chang
发明人： Ayako Kato , Chienliu Chang
IPC分类号： H04R31/00
CPC分类号： H04R31/00 , Y10T29/49005 , Y10T29/49007 , Y10T29/4908
摘要： A groove is formed on a handling member, on a face to be fixed to an element, the groove making up a portion of a channel that externally communicates in the state of being fixed to the element. In the fixing process of the substrate and then handling member, the handling member is fixed so that the edge direction of the vibrating membrane supporting portion and the edge direction of the groove of the handling member intersect. Thus, the probability that a membrane will break during handling or processing of the substrate is reduced, and the handling member can be quickly removed from the substrate.
摘要翻译：沟槽形成在处理构件上，待固定在元件上的表面上，沟槽构成固定在元件上的外部通道的一部分。在基板和处理构件的定影处理中，处理构件被固定成使得振动膜支撑部分的边缘方向和处理构件的槽的边缘方向相交。因此，减少在处理或处理衬底期间膜会破裂的可能性，并且处理构件可以快速地从衬底移除。

3. 发明授权

US08099854B2 Manufacturing method of an electromechanical transducer 有权
标题翻译：机电换能器的制造方法
公开(公告)号：US08099854B2
公开(公告)日：2012-01-24
申请号：US12488588
申请日：2009-06-22
申请人： Ayako Kato , Chienliu Chang
发明人： Ayako Kato , Chienliu Chang
IPC分类号： G01R3/00
CPC分类号： H04R31/00 , Y10T29/49005 , Y10T29/49007 , Y10T29/4908
摘要： A groove is formed on a handling member, on a face to be fixed to an element, the groove making up a portion of a channel that externally communicates in the state of being fixed to the element. In the fixing process of the substrate and then handling member, the handling member is fixed so that the edge direction of the vibrating membrane supporting portion and the edge direction of the groove of the handling member intersect. Thus, the probability that a membrane will break during handling or processing of the substrate is reduced, and the handling member can be quickly removed from the substrate.
摘要翻译：沟槽形成在处理构件上，待固定在元件上的表面上，沟槽构成固定在元件上的外部沟槽的一部分。在基板和处理构件的定影处理中，处理构件被固定成使得振动膜支撑部分的边缘方向和处理构件的槽的边缘方向相交。因此，减少在处理或处理衬底期间膜会破裂的可能性，并且处理构件可以快速地从衬底移除。

4. 发明申请

US20090320274A1 ELECTROMECHANICAL TRANSDUCER AND FABRICATION METHOD OF ELECTROMECHANICAL TRANSDUCING APPARATUS 有权
标题翻译：机电传感器和机电传动装置的制造方法
公开(公告)号：US20090320274A1
公开(公告)日：2009-12-31
申请号：US12488590
申请日：2009-06-22
申请人： Ayako Kato , Chienliu Chang
发明人： Ayako Kato , Chienliu Chang
IPC分类号： H02K15/00
CPC分类号： B81C1/0038 , B81C2201/0194 , Y10T29/49005 , Y10T29/49007 , Y10T29/49009 , Y10T29/4908
摘要： A groove is formed on a handling member, on a face to be fixed to an element, the groove making up a portion of a channel that externally communicates in the state of being fixed to the element. The handling member is fixed so that the cleavage direction of the vibrating membrane and the edge direction of the groove of the handling member intersect. Thus, the probability that a membrane will break during handling or processing of the substrate is reduced, and the handling member can be quickly removed from the substrate.
摘要翻译：沟槽形成在处理构件上，待固定在元件上的表面上，沟槽构成固定在元件上的外部通道的一部分。处理构件被固定成使得振动膜的解理方向和处理构件的槽的边缘方向相交。因此，减少在处理或处理衬底期间膜会破裂的可能性，并且处理构件可以快速地从衬底移除。

5. 发明授权

US08087153B2 Manufacturing method of an electromechanical transducer 有权
标题翻译：机电换能器的制造方法
公开(公告)号：US08087153B2
公开(公告)日：2012-01-03
申请号：US12489315
申请日：2009-06-22
申请人： Ayako Kato , Chienliu Chang
发明人： Ayako Kato , Chienliu Chang
IPC分类号： G01R3/00
CPC分类号： H04R31/00 , Y10T29/49005 , Y10T29/49007 , Y10T29/4908 , Y10T29/49137 , Y10T29/49155
摘要： A handling member is prepared that provides a channel that can withstand subsequent back face processing as to a substrate having elements made up of a substrate and a membrane, and the handling member is fixed to the substrate so that at least a portion within the elements are supported by the handling member. This provides a manufacturing method wherein the physical strength of an element at the time of manufacturing an electromechanical transducing apparatus is strengthened, and the handling member is easily detached in a short time after processing of the element.
摘要翻译：制备处理构件，其提供能够承受对由具有由基板和膜构成的元件的基板的后续后处理的通道，并且处理构件固定到基板，使得元件内的至少一部分为由处理构件支撑。这提供了一种制造方法，其中在制造机电换能装置时元件的物理强度得到加强，并且处理构件在元件处理后的短时间内容易地分离。

6. 发明授权

US08087152B2 Manufacturing method of an electromechanical transducer 有权
标题翻译：机电换能器的制造方法
公开(公告)号：US08087152B2
公开(公告)日：2012-01-03
申请号：US12488590
申请日：2009-06-22
申请人： Ayako Kato , Chienliu Chang
发明人： Ayako Kato , Chienliu Chang
IPC分类号： G01R3/00
CPC分类号： B81C1/0038 , B81C2201/0194 , Y10T29/49005 , Y10T29/49007 , Y10T29/49009 , Y10T29/4908
摘要： A groove is formed on a handling member, on a face to be fixed to an element, the groove making up a portion of a channel that externally communicates in the state of being fixed to the element. The handling member is fixed so that the cleavage direction of the vibrating membrane and the edge direction of the groove of the handling member intersect. Thus, the probability that a membrane will break during handling or processing of the substrate is reduced, and the handling member can be quickly removed from the substrate.
摘要翻译：沟槽形成在处理构件上，待固定在元件上的表面上，沟槽构成固定在元件上的外部沟槽的一部分。处理构件被固定成使得振动膜的解理方向和处理构件的槽的边缘方向相交。因此，减少在处理或处理衬底期间膜会破裂的可能性，并且处理构件可以快速地从衬底移除。

7. 发明授权

US08928042B2 Structure having plural conductive regions and process for production thereof 有权
标题翻译：具有多个导电区域的结构及其制造方法
公开(公告)号：US08928042B2
公开(公告)日：2015-01-06
申请号：US12935270
申请日：2009-05-29
申请人： Atsushi Kandori , Chienliu Chang , Makoto Takagi
发明人： Atsushi Kandori , Chienliu Chang , Makoto Takagi
IPC分类号： H01L29/84 , B81B3/00
CPC分类号： B81B3/0086 , B81B2207/07
摘要： A structure having a plurality of conductive regions insulated electrically from each other comprises a movable piece supported movably above the upper face of the conductive region, the movable piece having an electrode in opposition to the conductive region, the structure being constructed to be capable of emitting and receiving electric signals through the lower face of the conductive region, the plural conductive regions being insulated by sequentially connected oxidized regions formed from an oxide of a material having through-holes or grooves.
摘要翻译：具有彼此电绝缘的多个导电区域的结构包括可移动件，其被可移动地支撑在导电区域的上表面上方，所述可移动件具有与导电区域相对的电极，该结构被构造为能够发射并且通过导电区域的下表面接收电信号，多个导电区域通过由具有通孔或凹槽的材料的氧化物形成的顺序连接的氧化区域而被绝缘。

8. 发明授权

US08371018B2 Electromechanical transducer and manufacturing method therefor 失效
标题翻译：机电换能器及其制造方法
公开(公告)号：US08371018B2
公开(公告)日：2013-02-12
申请号：US12678365
申请日：2008-09-19
申请人： Chienliu Chang
发明人： Chienliu Chang
IPC分类号： H04R31/00 , H02N1/00
CPC分类号： B06B1/0292 , Y10T29/49005
摘要： In an electromechanical transducer which includes a vibration membrane provided with an upper electrode, a substrate provided with a lower electrode, and a support member adapted to support the vibration membrane in such a manner that a gap is formed between the vibration membrane and the substrate with these electrodes being arranged in opposition to each other, it is constructed such that a part of the vibration membrane and a region of the substrate are kept in contact with each other without application of an external force, and a remaining region of the vibration membrane other than its region in which the contact state is kept is able to vibrate.
摘要翻译：在包括设置有上电极的振动膜的机电换能器中，设置有下电极的基板和适于以振动膜和基板之间形成间隙的方式支撑振动膜的支撑构件，这些电极彼此相对布置，其构造使得振动膜的一部分和基板的区域在不施加外力的情况下保持彼此接触，并且其余的区域的振动膜其他比其保持接触状态的区域能够振动。

9. 发明授权

US08410659B2 Electromechanical transducer and manufacturing method therefor 有权
标题翻译：机电换能器及其制造方法
公开(公告)号：US08410659B2
公开(公告)日：2013-04-02
申请号：US12673232
申请日：2008-09-19
申请人： Chienliu Chang
发明人： Chienliu Chang
IPC分类号： H02N1/00 , H04R31/00
CPC分类号： B06B1/0292 , Y10T29/49005
摘要： An electromechanical transducer includes a vibration membrane provided with a first electrode, a substrate provided with a second electrode, and a support member adapted to support the vibration membrane in such a manner that a gap is formed between the vibration membrane and the substrate, with the first and second electrodes being arranged in opposition to each other, wherein a part of the vibration membrane and a part of the substrate are in contact with each other at a contact region, and another region of the vibration membrane other than the contact region is able to vibrate; an overlap region is provided between the first electrode and second electrode in the contact region, and at least one of these electrodes has a through portion formed therethrough in at least a part of the overlap region, and a plurality of protrusions formed within the gap and on at least one of the vibration member and the support member, wherein the contact region is surrounded by the plurality of protrusions.
摘要翻译：机电换能器包括设置有第一电极的振动膜，设置有第二电极的基板和适于以振动膜和基板之间形成间隙的方式支撑振动膜的支撑构件，第一电极和第二电极彼此相对布置，其中振动膜的一部分和基板的一部分在接触区域彼此接触，并且除了接触区域之外的振动膜的另一区域能够振动; 在接触区域中的第一电极和第二电极之间设置重叠区域，并且这些电极中的至少一个具有在重叠区域的至少一部分中穿过其形成的通孔部分，以及形成在间隙内的多个突起，在所述振动构件和所述支撑构件中的至少一个上，其中所述接触区域被所述多个突起围绕。

10. 发明申请

US20120058587A1 METHOD FOR MANUFACTURING CAPACITIVE ELECTROMECHANICAL TRANSDUCER 失效
标题翻译：制造电容式电磁传感器的方法
公开(公告)号：US20120058587A1
公开(公告)日：2012-03-08
申请号：US13319970
申请日：2010-05-13
申请人： Chienliu Chang
发明人： Chienliu Chang
IPC分类号： H01L21/02
CPC分类号： B06B1/0292 , B81B2201/0271 , B81B2203/0127 , B81C1/00476 , B81C2201/0139
摘要： A capacitive electromechanical transducer includes a substrate, a cavity formed by a vibrating membrane held above the substrate with a certain distance between the vibrating membrane and the substrate by supporting portions arranged on the substrate, a first electrode whose surface is exposed to the cavity, and a second electrode whose surface facing the cavity is covered with an insulating film, wherein the first electrode is provided on a surface of the substrate or a lower surface of the vibrating membrane and the second electrode is provided on a surface of the vibrating membrane or a surface of the substrate so as to face the first electrode. In this transducer, fine particles composed of an oxide film of a substance constituting the first electrode are arranged on the surface of the first electrode, and the diameter of the fine particles is 2 to 200 nm.
摘要翻译：一种电容式机电换能器，包括基板，由振动膜形成的空腔，该振动膜通过支撑布置在基板上的部分而在振动膜和基板之间具有一定距离而保持在基板上方，其表面暴露于空腔中的第一电极，面向空腔的表面的第二电极被绝缘膜覆盖，其中第一电极设置在基板的表面或振动膜的下表面上，第二电极设置在振动膜的表面上或基板的表面以面对第一电极。在该换能器中，由构成第一电极的物质的氧化物膜构成的微粒子配置在第一电极的表面上，微粒的直径为2〜200nm。

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