专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明公开

US20230245859A1 HYDRAULIC FEED SYSTEM FOR AN ION SOURCE 审中-公开
公开(公告)号：US20230245859A1
公开(公告)日：2023-08-03
申请号：US17588999
申请日：2022-01-31
申请人： Axcelis Technologies, Inc.
发明人： Neil J. Bassom , Joshua Abeshaus , David Sporleder , Neil Colvin , Joseph Valinski , Michael Cristoforo , Vladimir Romanov , Pradeepa Kowrikan Subrahmnya
IPC分类号： H01J37/32 , H01J37/08
CPC分类号： H01J37/32412 , H01J37/08
摘要： An ion source has an arc chamber defining an arc chamber volume. A reservoir is coupled to the arc chamber, defining a reservoir volume. The reservoir receives a source species to define a liquid within the reservoir volume. A conduit fluidly couples the reservoir volume to the arc chamber volume. First and second openings of the conduit are open to the respective reservoir and arc chamber volume. A heat source selectively heats the reservoir to melt the source species at a predetermined temperature. A liquid control apparatus controls a first volume of the liquid within the reservoir volume to define a predetermined supply of the liquid to the arc chamber volume. The liquid control apparatus is a pressurized gas source fluidly coupled to the reservoir to supply a gas to the reservoir and provide a predetermined amount of liquid to the arc chamber.

2. 发明授权

US11728140B1 Hydraulic feed system for an ion source 有权
公开(公告)号：US11728140B1
公开(公告)日：2023-08-15
申请号：US17588999
申请日：2022-01-31
申请人： Axcelis Technologies, Inc.
发明人： Neil J. Bassom , Joshua Abeshaus , David Sporleder , Neil Colvin , Joseph Valinski , Michael Cristoforo , Vladimir Romanov , Pradeepa Kowrikan Subrahmnya
IPC分类号： H01J37/26 , H01J37/32 , H01J37/08
CPC分类号： H01J37/32412 , H01J37/08
摘要： An ion source has an arc chamber defining an arc chamber volume. A reservoir is coupled to the arc chamber, defining a reservoir volume. The reservoir receives a source species to define a liquid within the reservoir volume. A conduit fluidly couples the reservoir volume to the arc chamber volume. First and second openings of the conduit are open to the respective reservoir and arc chamber volume. A heat source selectively heats the reservoir to melt the source species at a predetermined temperature. A liquid control apparatus controls a first volume of the liquid within the reservoir volume to define a predetermined supply of the liquid to the arc chamber volume. The liquid control apparatus is a pressurized gas source fluidly coupled to the reservoir to supply a gas to the reservoir and provide a predetermined amount of liquid to the arc chamber.

3. 发明授权

US12154763B2 Hydraulic feed system for an ion source 有权
公开(公告)号：US12154763B2
公开(公告)日：2024-11-26
申请号：US18336337
申请日：2023-06-16
申请人： Axcelis Technologies, Inc.
发明人： Neil J. Bassom , Joshua Abeshaus , David Sporleder , Neil Colvin , Joseph Valinski , Michael Cristoforo , Vladimir Romanov , Pradeepa Kowrikan Subrahmnya
IPC分类号： H01J37/32 , H01J37/08
CPC分类号： H01J37/32412 , H01J37/08
摘要： An ion source has an arc chamber defining an arc chamber volume. A reservoir is coupled to the arc chamber, defining a reservoir volume. The reservoir receives a source species to define a liquid within the reservoir volume. A conduit fluidly couples the reservoir volume to the arc chamber volume. First and second openings of the conduit are open to the respective reservoir and arc chamber volume. A heat source selectively heats the reservoir to melt the source species at a predetermined temperature. A liquid control apparatus controls a first volume of the liquid within the reservoir volume to define a predetermined supply of the liquid to the arc chamber volume. The liquid control apparatus is a pressurized gas source fluidly coupled to the reservoir to supply a gas to the reservoir and provide a predetermined amount of liquid to the arc chamber.

4. 发明授权

US10573485B1 Tetrode extraction apparatus for ion source 有权
公开(公告)号：US10573485B1
公开(公告)日：2020-02-25
申请号：US16227296
申请日：2018-12-20
申请人： Axcelis Technologies, Inc.
发明人： Wilhelm Platow , Edward Eisner , Bo Vanderberg , Neil Bassom , Michael Cristoforo , Joshua Abeshaus
IPC分类号： H01J37/08 , H01J37/317
摘要： An electrode system for an ion source has a source electrode that defines a source aperture in an ion source chamber, and is coupled to a source power supply. A first ground electrode defines a first ground aperture that is electrically coupled to an electrical ground potential and extracts ions from the ion source. A suppression electrode is positioned downstream of the first ground electrode and defines a suppression aperture that is electrically coupled to a suppression power supply. A second ground electrode is positioned downstream of the suppression electrode and defines a second ground aperture. The first and second ground electrodes are fixedly coupled to one another and are electrically coupled to the electrical ground potential.

5. 发明授权

US09318302B1 Integrated extraction electrode manipulator for ion source 有权
标题翻译：用于离子源的集成提取电极操纵器
公开(公告)号：US09318302B1
公开(公告)日：2016-04-19
申请号：US14674694
申请日：2015-03-31
申请人： Axcelis Technologies, Inc.
发明人： Bo Vanderberg , Joseph Valinski , Michael Cristoforo
IPC分类号： H01J27/02 , H01J37/08 , H01J37/30 , H01J37/317
CPC分类号： H01J37/3171 , H01J27/024 , H01J37/08 , H01J2237/024 , H01J2237/061
摘要： A modular ion source and extraction apparatus comprises an ion source chamber selectively electrically coupled to a voltage potential, wherein the ion source chamber comprises an extraction aperture. An extraction electrode is positioned proximate to the extraction aperture of the ion source chamber, wherein the extraction electrode is electrically grounded and configured to extract ions from the ion source chamber. One or more linkages operably couple to the ion source chamber, and one or more insulators couple the extraction electrode to the respective one or more linkages, wherein the one or more insulators electrically insulate the respective one or more linkages from the extraction electrode, therein electrically insulating the extraction electrode from the ion source chamber. One or more actuators operably couple the one or more linkages to the ion source chamber, wherein the one or more actuators are configured to translate the one or more linkages with respect to the ion source chamber, therein translating the extraction electrode in one or more axes.
摘要翻译：模块化离子源和提取装置包括选择性地电耦合到电压电位的离子源室，其中离子源室包括提取孔。提取电极位于靠近离子源室的提取孔的位置，其中提取电极被电接地并被配置为从离子源室提取离子。一个或多个键可操作地耦合到离子源室，并且一个或多个绝缘体将引出电极耦合到相应的一个或多个键，其中一个或多个绝缘体将相应的一个或多个键与引出电极电绝缘，其中电将引出电极与离子源室绝缘。一个或多个致动器可操作地将所述一个或多个连杆耦合到所述离子源室，其中所述一个或多个致动器被配置成相对于所述离子源室平移所述一个或多个连杆，其中在所述离心源室中平移所述引出电极。

6. 发明公开

US20230343558A1 HYDRAULIC FEED SYSTEM FOR AN ION SOURCE 审中-公开
公开(公告)号：US20230343558A1
公开(公告)日：2023-10-26
申请号：US18336337
申请日：2023-06-16
申请人： Axcelis Technologies, Inc.
发明人： Neil J. Bassom , Joshua Abeshaus , David Sporleder , Neil Colvin , Joseph Valinski , Michael Cristoforo , Vladimir Romanov , Pradeepa Kowrikan Subrahmnya
IPC分类号： H01J37/32 , H01J37/08
CPC分类号： H01J37/32412 , H01J37/08
摘要： An ion source has an arc chamber defining an arc chamber volume. A reservoir is coupled to the arc chamber, defining a reservoir volume. The reservoir receives a source species to define a liquid within the reservoir volume. A conduit fluidly couples the reservoir volume to the arc chamber volume. First and second openings of the conduit are open to the respective reservoir and arc chamber volume. A heat source selectively heats the reservoir to melt the source species at a predetermined temperature. A liquid control apparatus controls a first volume of the liquid within the reservoir volume to define a predetermined supply of the liquid to the arc chamber volume. The liquid control apparatus is a pressurized gas source fluidly coupled to the reservoir to supply a gas to the reservoir and provide a predetermined amount of liquid to the arc chamber.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式