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    • 2. 发明授权
    • Cleaning composition, cleaning process, and process for producing semiconductor device
    • 清洁组合物,清洁工艺和半导体器件的制造工艺
    • US08669217B2
    • 2014-03-11
    • US13050666
    • 2011-03-17
    • Atsushi MizutaniHideo FushimiTomonori TakahashiKazutaka Takahashi
    • Atsushi MizutaniHideo FushimiTomonori TakahashiKazutaka Takahashi
    • C11D7/50C11D11/00
    • H01L21/02076C11D7/261C11D7/265C11D7/3209C11D11/0047H01L21/02063H01L21/02071
    • A cleaning method is provided that includes a step of preparing a cleaning composition containing 57 to 95 wt % of (component a) water, 1 to 40 wt % of (component b) a secondary hydroxy group- and/or tertiary hydroxy group-containing hydroxy compound, (component c) an organic acid, and (component d) a quaternary ammonium compound, the composition having a pH of 5 to 10, and a step of removing plasma etching residue formed above a semiconductor substrate by means of the cleaning composition. There are also provided a process for producing a semiconductor device that includes a step of cleaning plasma etching residue formed above a semiconductor substrate using the cleaning method, and a cleaning composition for removing plasma etching residue formed above a semiconductor substrate that contains 57 to 95 wt % of (component a) water, 1 to 40 wt % of (component b) a secondary hydroxy group- and/or tertiary hydroxy group-containing hydroxy compound, (component c) an organic acid, and (component d) a quaternary ammonium compound, the composition having a pH of 5 to 10.
    • 提供一种清洗方法,其包括制备含有57〜95重量%的(a成分)水,1〜40重量%的(成分b)含羟基和/或叔羟基的 羟基化合物,(组分c)有机酸和(组分d)季铵化合物,该组合物的pH为5〜10,以及通过清洗组合物除去在半导体衬底上形成的等离子体蚀刻残渣的步骤 。 还提供了一种半导体器件的制造方法,该半导体器件包括使用该清洁方法清洗形成在半导体衬底上的等离子体蚀刻残渣的步骤,以及用于除去形成在半导体衬底上的等离子体蚀刻残渣的清洗组合物, (成分a)的水,1〜40重量%的(成分b)含羟基和/或叔羟基的羟基化合物,(成分c)有机酸和(成分d)季铵 化合物,该组合物的pH为5〜10。
    • 10. 发明授权
    • Method and apparatus for fabricating electroluminescent device
    • 用于制造电致发光器件的方法和装置
    • US06004618A
    • 1999-12-21
    • US841334
    • 1997-04-30
    • Atsushi MizutaniMasayuki KatayamaNobuei ItoTadashi Hattori
    • Atsushi MizutaniMasayuki KatayamaNobuei ItoTadashi Hattori
    • C23C16/30C23C16/44C23C16/455H05B33/10H05B33/14B05D5/12C23C16/00
    • C23C16/45576C23C16/305H05B33/10
    • Fabrication of an electroluminescent device having a high-quality luminescent layer is disclosed. The device emits intense blue light. A first electrode layer, a first dielectric layer, the luminescent layer, a second dielectric layer, and a second electrode layer are successively formed on a glass substrate. At least the exit side of the device is made from an optically transparent material. A first gaseous source material of a group II element belonging to group II of the periodic table, a second gaseous source material of a group VIB element belonging to group VIB, and a third gaseous source material of an element forming the luminescent center of the luminescent layer are supplied into a reaction furnace through first, second, and third gas supply tubes, respectively, and caused to react with each other. Thus, the luminescent layer is formed by chemical vapor deposition. The first material acts as a base material from which the luminescent layer is formed. The first tube for the first material is laid in the center of the furnace. The third tube for the third material forming the luminescent center is laid around the first gas supply tube. The second tube is laid around the third tube.
    • 公开了具有高品质发光层的电致发光器件的制造。 该装置发出强烈的蓝光。 在玻璃基板上依次形成第一电极层,第一电介质层,发光层,第二电介质层和第二电极层。 至少装置的出口侧由光学透明材料制成。 属于元素周期表II族的第II族元素的第一气态源材料,属于VIB族的VIB族元素的第二气态源材料和形成发光体的发光中心的元素的第三气态源材料 层分别通过第一,第二和第三气体供给管供给到反应炉中,并使其彼此反应。 因此,通过化学气相沉积形成发光层。 第一材料作为形成发光层的基材。 用于第一种材料的第一管被放置在炉的中心。 形成发光中心的第三材料的第三管被放置在第一气体供应管的周围。 第二个管被放置在第三根管子周围。