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    • 7. 发明申请
    • High aspect ration bitline oxides
    • 高比例位线氧化物
    • US20080025084A1
    • 2008-01-31
    • US11882787
    • 2007-08-06
    • Rustom IraniBoaz EitanAssaf Shappir
    • Rustom IraniBoaz EitanAssaf Shappir
    • G11C11/34H01L21/336H01L29/792
    • H01L27/115H01L27/11568
    • A non-volatile memory device includes a plurality of word line areas each separated from its neighbor by a contact area, an oxide-nitride-oxide (ONO) layer within the word line areas and at least partially within the contact areas and protective elements, generated when spacers are formed in the periphery area, to protect silicon under the ONO layer in the contact areas. A non-volatile memory device includes a plurality of word line areas each separated from its neighbor by a contact area and bitline oxides whose height:distance aspect ratio (T:D) is at least 25% greater than the maximum height:distance (Tg:Dg) ratio of gate electrodes in the CMOS periphery to ensure remnants of sidewall material between bitlines after sidewall spacer etch, thus protecting silicon in a subsequent word line salicidation step.
    • 非易失性存储器件包括多个字线区域,每个字线区域与其相邻部分由接触区域分开,字线区域内的氧化物 - 氧化物 - 氧化物(ONO)层和至少部分地在接触区域内的保护元件, 当在周边区域中形成间隔物时产生,以保护接触区域内的ONO层下的硅。 非易失性存储器件包括多个字线区域,每个字线区域与其相邻的接触区域分开,并且其高度:距离长宽比(T:D)比最大高度大至少25%的位线氧化物:距离(Tg :Dg)CMOS外围的栅电极的比例,以确保在侧壁间隔物蚀刻之后位线之间的侧壁材料的残留物,从而在随后的字线盐化步骤中保护硅。
    • 10. 发明申请
    • Non-volatile memory cell with injector
    • 带注射器的非易失性存储单元
    • US20090201741A1
    • 2009-08-13
    • US12318789
    • 2009-01-08
    • Boaz EitanMaria KushnirAssaf Shappir
    • Boaz EitanMaria KushnirAssaf Shappir
    • G11C16/06H01L29/792
    • H01L29/792G11C16/0475H01L21/28282H01L29/4234H01L29/513H01L29/518
    • In a nonvolatile memory (NVM) cell, an injector having one or more layers of material with a lower potential barrier for holes is disposed between a charge storage stack and a source of holes (the gate for top injection, the substrate for bottom injection), to facilitate hole tunneling from the source of holes into the charge-storage layer of the charge storage stack. The injector has a barrier potential for holes which is less than an insulating layer of the charge-storage stack which is oriented towards the source of holes. A multi-layer crested barrier injector may have layers of increasing potential barriers for holes from the source to the charge-storage layer. Methods of operating NVM cells are disclosed. The NVM cell may be NROM, SONOS, or other oxide-nitride technology NVM cells such as SANOS, MANOS, TANOS.
    • 在非易失性存储器(NVM)单元中,具有一个或多个具有较低的空穴势垒的材料层的注入器设置在电荷存储堆叠和空穴源之间(用于顶部注入的栅极,用于底部注入的衬底) 以便于从孔源穿孔到电荷存储堆的电荷存储层中。 喷射器具有小于电荷存储堆的绝缘层的孔的势垒势垒,该绝缘层朝向孔源。 多层波峰势垒注入器可以具有从源到电荷存储层的空穴的增加的势垒层。 公开了操作NVM单元的方法。 NVM单元可以是NROM,SONOS或其它氧化物氮化物技术NVM单元,例如SANOS,MANOS,TANOS。