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    • 3. 发明授权
    • Method and device for carrying out working steps on miniaturized modules
    • 用于对小型化模块进行工作步骤的方法和装置
    • US07165669B2
    • 2007-01-23
    • US11036301
    • 2005-01-14
    • Arnd Menschig
    • Arnd Menschig
    • B65G25/00
    • B23Q7/1426H01L21/677H01L21/6776H01L21/681Y10S414/141Y10T156/1702
    • In order to provide a method of carrying out working steps in at least one work station on miniaturised modules which are held by a module carrier provided with a holding device, whereby the method enables a plurality of processing steps to be carried out on a module, it is proposed that the module be moved by one of the module carriers to a plurality of work stations for carrying out the working steps and that it be precisely positioned for carrying out one of the working steps by means of a relative movement between the module carrier and the currently relevant one of the plurality of workstations, and in that the positioning of the module relative to the module carrier be maintained for carrying out the working steps.
    • 为了提供在由设置有保持装置的模块载体保持的小型化模块的至少一个工作站中执行工作步骤的方法,由此该方法能够在模块上执行多个处理步骤, 提出了将模块中的一个模块移动到多个工作站以执行工作步骤,并且通过模块载体之间的相对移动来精确定位以执行一个工作步骤 和多个工作站中当前相关的一个,并且保持模块相对于模块载体的定位以执行工作步骤。
    • 4. 发明授权
    • Method and device for carrying out working steps on miniaturized modules
    • 用于对小型化模块进行工作步骤的方法和装置
    • US06596115B1
    • 2003-07-22
    • US09718229
    • 2000-11-21
    • Arnd Menschig
    • Arnd Menschig
    • B23Q714
    • B23Q7/1426H01L21/677H01L21/6776H01L21/681Y10S414/141Y10T156/1702
    • In order to provide a method of carrying out working steps in at least one work station on miniaturized modules which are held by a module carrier provided with a holding device, whereby the method enables a plurality of processing steps to be carried out on a module, it is proposed that the module be moved by one of the module carriers to a plurality of work stations for carrying out the working steps and that it be precisely positioned for carrying out one of the working steps by means of a relative movement between the module carrier and the currently relevant one of the plurality of workstations, and in that the positioning of the module relative to the module carrier be maintained for carrying out the working steps.
    • 为了提供在由设置有保持装置的模块载体保持的小型化模块的至少一个工作站中执行工作步骤的方法,由此该方法能够在模块上执行多个处理步骤, 提出了将模块中的一个模块移动到多个工作站以执行工作步骤,并且通过模块载体之间的相对移动来精确定位以执行一个工作步骤 和多个工作站中当前相关的一个,并且保持模块相对于模块载体的定位以执行工作步骤。
    • 7. 发明授权
    • Method and device for detaching a segment of a material layer
    • 用于分离材料层的段的方法和装置
    • US06521068B1
    • 2003-02-18
    • US09607191
    • 2000-06-28
    • Arnd MenschigRalf BaehnischBernd Huettner
    • Arnd MenschigRalf BaehnischBernd Huettner
    • B32B3128
    • B23K26/18B23K26/009H05K3/046Y10T156/1158
    • For the purpose of producing a method for detaching a segment—disposed on a carrier—from a material layer extending in a layer plane and having a specific layer thickness, by means of a laser pulse passing through the carrier in such a way as to detach segments from a material layer with as little thermal stress and as few thermal secondary effects as possible, it is proposed that the laser pulse within a segment layer-component volume butting against the carrier, the said layer-component volume lying in the plane of the layer within an extent of the beam cross-section of the laser pulse and extending transversely to the layer plane via a part of the layer thickness, produces superheated matter of a density similar to the solid state in a state of thermodynamic non-equilibrium and in particular at a temperature above the critical temperature, and that a cohesive, solid partial layer remains in the segment on the side of the layer-component volume opposite to the carrier, the said partial layer being urged away from the carrier by the superheated matter.
    • 为了制造用于从层平面上延伸并且具有特定层厚度的材料层分离设置在载体上的段的方法,借助于穿过载体的激光脉冲以分离的方式 来自具有尽可能少的热应力和尽可能少的热二次效应的材料层的片段,提出了在层间分量体积内对齐载体的激光脉冲,所述层组分体积位于 在激光脉冲的光束横截面的范围内并且经由层厚度的一部分横向于层平面延伸的层,在热力学非平衡的状态下产生具有类似于固态的密度的过热物质,并且 特别是在高于临界温度的温度下,并且粘合的固体部分层保留在与载体相反的层 - 组分体积侧的段中,所述部分 Al层被过热物质推离离开载体。