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1. 发明授权

US06521068B1 Method and device for detaching a segment of a material layer 失效
标题翻译：用于分离材料层的段的方法和装置
公开(公告)号：US06521068B1
公开(公告)日：2003-02-18
申请号：US09607191
申请日：2000-06-28
申请人： Arnd Menschig , Ralf Baehnisch , Bernd Huettner
发明人： Arnd Menschig , Ralf Baehnisch , Bernd Huettner
IPC分类号： B32B3128
CPC分类号： B23K26/18 , B23K26/009 , H05K3/046 , Y10T156/1158
摘要： For the purpose of producing a method for detaching a segment—disposed on a carrier—from a material layer extending in a layer plane and having a specific layer thickness, by means of a laser pulse passing through the carrier in such a way as to detach segments from a material layer with as little thermal stress and as few thermal secondary effects as possible, it is proposed that the laser pulse within a segment layer-component volume butting against the carrier, the said layer-component volume lying in the plane of the layer within an extent of the beam cross-section of the laser pulse and extending transversely to the layer plane via a part of the layer thickness, produces superheated matter of a density similar to the solid state in a state of thermodynamic non-equilibrium and in particular at a temperature above the critical temperature, and that a cohesive, solid partial layer remains in the segment on the side of the layer-component volume opposite to the carrier, the said partial layer being urged away from the carrier by the superheated matter.
摘要翻译：为了制造用于从层平面上延伸并且具有特定层厚度的材料层分离设置在载体上的段的方法，借助于穿过载体的激光脉冲以分离的方式来自具有尽可能少的热应力和尽可能少的热二次效应的材料层的片段，提出了在层间分量体积内对齐载体的激光脉冲，所述层组分体积位于在激光脉冲的光束横截面的范围内并且经由层厚度的一部分横向于层平面延伸的层，在热力学非平衡的状态下产生具有类似于固态的密度的过热物质，并且特别是在高于临界温度的温度下，并且粘合的固体部分层保留在与载体相反的层 - 组分体积侧的段中，所述部分 Al层被过热物质推离离开载体。

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