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    • 1. 发明授权
    • Oscillator having a plurality of switchable MEMS vibrators
    • 振荡器具有多个可切换MEMS振动器
    • US08648663B2
    • 2014-02-11
    • US13444144
    • 2012-04-11
    • Aritsugu Yajima
    • Aritsugu Yajima
    • H03B5/30H01L41/00H03H9/205
    • H03B5/364H03B5/30H03B2200/0012H03B2200/0048
    • An oscillator includes: a plurality of MEMS vibrators each having a first terminal and a second terminal, and having respective resonant frequencies different from each other; an amplifier circuit having an input terminal and an output terminal; a connection circuit adapted to connect the first terminal of one of the MEMS vibrators and the input terminal to each other, and the second terminal of the one of the MEMS vibrators and the output terminal to each other; a signal reception terminal adapted to receive a switching signal used to switch a state of the connection circuit; and a switching circuit adapted to make the connection circuit switch the MEMS vibrator to be connected to the amplifier circuit based on the switching signal, wherein the MEMS vibrators are housed in an inside of a cavity, and the signal reception terminal is disposed outside the cavity.
    • 振荡器包括:多个MEMS振子,每个具有第一端子和第二端子,并且具有彼此不同的谐振频率; 具有输入端子和输出端子的放大器电路; 连接电路,其适于将所述MEMS振动器中的一个的所述第一端子和所述输入端子彼此连接,并且所述MEMS振动器中的一个的所述第二端子和所述输出端子彼此连接; 信号接收端子,适于接收用于切换所述连接电路的状态的切换信号; 以及切换电路,其适于使所述连接电路基于所述切换信号切换要连接到所述放大器电路的所述MEMS振动器,其中所述MEMS振动器容纳在腔的内部,并且所述信号接收端设置在所述腔 。
    • 3. 发明申请
    • High-frequency composite component
    • 高频复合元件
    • US20050024162A1
    • 2005-02-03
    • US10881752
    • 2004-06-30
    • Toru WatanabeYutaka TakadaMakoto InoguchiAritsugu YajimaKazuaki TanakaShigekazu Takagi
    • Toru WatanabeYutaka TakadaMakoto InoguchiAritsugu YajimaKazuaki TanakaShigekazu Takagi
    • H04B1/3822H04B1/40H01P1/213
    • H04B1/006H04B1/0057H04B1/406H04B1/52
    • A high-frequency composite component is provided by placing an antenna on a multi-layer wiring board, placing a multiplexer/demultiplexer circuit, first and second matching circuits, and first and second balanced-to-unbalanced transformer circuits inside the board respectively, and providing first to fourth input and output terminals on the side surface of the board. The antenna is connected to the multiplexer/demultiplexer circuit via a first unbalanced line path, and the multiplexer/demultiplexer is connected to the first and second matching circuits via second and third unbalanced line paths, respectively. The first and second matching circuits are connected to the first and second balanced-to-unbalanced transformer circuits, respectively, via fourth and fifth unbalanced line paths, respectively. The respective balanced terminals of the first and second balanced-to-unbalanced transformer circuits are connected to the first and second, and third and fourth input and output terminals, respectively, via first and second balanced line paths, respectively.
    • 通过将天线放置在多层布线板上,分别将多路复用器/解复用器电路,第一和第二匹配电路以及第一和第二平衡不平衡变压器电路分别放置在板内,提供高频复合元件,以及 在板的侧表面上提供第一至第四输入和输出端子。 天线经由第一不平衡线路连接到多路复用器/解复用器电路,并且多路复用器/解复用器分别经由第二和第三不平衡线路连接到第一和第二匹配电路。 第一和第二匹配电路分别经由第四和第五不平衡线路路连接到第一和第二平衡不平衡变压器电路。 第一和第二平衡不平衡变压器电路的各个平衡端分别经由第一和第二平衡线路路连接到第一和第二以及第三和第四输入和输出端子。
    • 4. 发明申请
    • OSCILLATOR CIRCUIT AND ELECTRONIC DEVICE HAVING OSCILLATOR CIRCUIT
    • 振荡器电路和具有振荡器电路的电子器件
    • US20090058546A1
    • 2009-03-05
    • US12204457
    • 2008-09-04
    • Aritsugu Yajima
    • Aritsugu Yajima
    • H03B5/30
    • H03B5/364
    • An oscillator circuit includes a first terminal, a second terminal, a resonator that is connected to the first terminal and the second terminal, a first capacitor that is connected to the first terminal and a ground line supplying the ground electric potential, a second capacitor that is connected to the second terminal and the ground line, m inverters, where m is an odd number equal to or larger than three, which are connected in series between the first terminal and the second terminal, and a third capacitor that is connected to an input terminal of the n-th (where n is an integer satisfying 1≦n
    • 振荡电路包括第一端子,第二端子,连接到第一端子和第二端子的谐振器,连接到第一端子的第一电容器和提供接地电位的地线;第二电容器, 连接到第二端子和地线,m个逆变器,其中m是串联在第一端子和第二端子之间的等于或大于三的奇数,以及连接到第一端子和第二端子的第三电容器 从逆变器阵列的输入侧和第(n + 1)个反相器的输出端计数第n(其中n是满足1 <= n
    • 5. 发明申请
    • Method of manufacturing surface acoustic wave device and surface acoustic wave device
    • 声表面波器件和声表面波器件的制造方法
    • US20060131678A1
    • 2006-06-22
    • US11304766
    • 2005-12-16
    • Aritsugu YajimaHisakatsu SatoTakashi Kojima
    • Aritsugu YajimaHisakatsu SatoTakashi Kojima
    • H01L29/84H01L21/00
    • H03H9/02976H03H3/08H03H9/02866Y10T29/42
    • A method of manufacturing a surface acoustic wave device formed in one chip and including over a semiconductor substrate at least an IC region and a surface acoustic wave element region that are horizontally disposed, the method including: forming in the IC region over the semiconductor substrate a semiconductor element layer that includes a semiconductor element and an insulation layer covering the semiconductor element and being deposited also in the surface acoustic wave element region; forming over the semiconductor element layer a wire layer that includes a plurality of wires coupled to the semiconductor element and a wire insulating film deposited over the plurality of wires to provide insulation among the wires, the wire insulating film being deposited also over the insulation layer in the surface acoustic wave element region; forming an interlayer insulating film having a flattened surface on the wire insulating film in the IC region and the surface acoustic wave element region; forming a piezoelectric thin film on the interlayer insulating film; and forming a surface acoustic wave element on the piezoelectric thin film in the surface acoustic wave element region.
    • 一种制造表面声波装置的方法,所述方法包括:在所述半导体衬底上的所述IC区域中形成至少一个水平设置的IC区域和表面声波元件区域, 半导体元件层,其包括半导体元件和覆盖半导体元件并且也沉积在表面声波元件区域中的绝缘层; 在所述半导体元件层上形成包括耦合到所述半导体元件的多条导线的线层和沉积在所述多根导线上的线绝缘膜以在所述导线之间提供绝缘,所述线绝缘膜也沉积在所述绝缘层上方 声表面波元件区域; 在所述IC区域中的所述导线绝缘膜上形成具有平坦表面的层间绝缘膜和所述表面声波元件区域; 在层间绝缘膜上形成压电薄膜; 在声表面波元件区域的压电薄膜上形成表面声波元件。
    • 6. 发明授权
    • Surface acoustic wave oscillator and method of varying frequency thereof
    • 表面声波振荡器及其频率变化的方法
    • US07642871B2
    • 2010-01-05
    • US11847632
    • 2007-08-30
    • Aritsugu Yajima
    • Aritsugu Yajima
    • H03B5/12
    • H03B5/326H03B5/368
    • A surface acoustic wave oscillator includes: a cross-coupled circuit including first and second active elements differentially connected to first and second output terminals; first and second surface acoustic wave elements having different resonance frequencies and connected to the cross-coupled circuit in parallel; a first variable capacitance circuit including a first variable capacitance element and changing the resonance frequency of the first surface acoustic wave element; and a second variable capacitance circuit including a second variable capacitance element and changing the resonance frequency of the second surface acoustic wave element, wherein the first surface acoustic wave element is connected to the first variable capacitance circuit, the second surface acoustic wave element is connected to the second variable capacitance circuit, and oscillating outputs from combining outputs of the first and second surface acoustic wave elements are outputted by the cross-coupled circuit.
    • 表面声波振荡器包括:交叉耦合电路,包括与第一和第二输出端子差分连接的第一和第二有源元件; 具有不同谐振频率的第一和第二表面声波元件并联连接到交叉耦合电路; 包括第一可变电容元件并改变第一表面声波元件的谐振频率的第一可变电容电路; 以及包括第二可变电容元件并改变第二弹性表面波元件的共振频率的第二可变电容电路,其中第一声表面波元件连接到第一可变电容电路,第二声表面波元件连接到 第二可变电容电路和来自第一和第二声表面波元件的组合输出的振荡输出由交叉耦合电路输出。
    • 8. 发明授权
    • Method of manufacturing monolithic surface acoustic wave device and integrated circuit
    • 制造单片声表面波器件和集成电路的方法
    • US07420441B2
    • 2008-09-02
    • US11304766
    • 2005-12-16
    • Aritsugu YajimaHisakatsu SatoTakashi Kojima
    • Aritsugu YajimaHisakatsu SatoTakashi Kojima
    • H03H9/00
    • H03H9/02976H03H3/08H03H9/02866Y10T29/42
    • A method of manufacturing a surface acoustic wave device formed in one chip and including over a semiconductor substrate at least an IC region and a surface acoustic wave element region that are horizontally disposed, the method including: forming in the IC region over the semiconductor substrate a semiconductor element layer that includes a semiconductor element and an insulation layer covering the semiconductor element and being deposited also in the surface acoustic wave element region; forming over the semiconductor element layer a wire layer that includes a plurality of wires coupled to the semiconductor element and a wire insulating film deposited over the plurality of wires to provide insulation among the wires, the wire insulating film being deposited also over the insulation layer in the surface acoustic wave element region; forming an interlayer insulating film having a flattened surface on the wire insulating film in the IC region and the surface acoustic wave element region; forming a piezoelectric thin film on the interlayer insulating film; and forming a surface acoustic wave element on the piezoelectric thin film in the surface acoustic wave element region.
    • 一种制造表面声波装置的方法,所述方法包括:在所述半导体衬底上的所述IC区域中形成至少一个水平设置的IC区域和表面声波元件区域, 半导体元件层,其包括半导体元件和覆盖半导体元件并且也沉积在表面声波元件区域中的绝缘层; 在所述半导体元件层上形成包括耦合到所述半导体元件的多个导线的线层和沉积在所述多根导线上的线绝缘膜以在所述导线之间提供绝缘,所述线绝缘膜也沉积在所述绝缘层上方 声表面波元件区域; 在所述IC区域中的所述导线绝缘膜上形成具有平坦表面的层间绝缘膜和所述表面声波元件区域; 在层间绝缘膜上形成压电薄膜; 在声表面波元件区域的压电薄膜上形成表面声波元件。
    • 9. 发明申请
    • OSCILLATOR
    • 振荡器
    • US20120262243A1
    • 2012-10-18
    • US13444144
    • 2012-04-11
    • Aritsugu Yajima
    • Aritsugu Yajima
    • H03B5/30
    • H03B5/364H03B5/30H03B2200/0012H03B2200/0048
    • An oscillator includes: a plurality of MEMS vibrators each having a first terminal and a second terminal, and having respective resonant frequencies different from each other; an amplifier circuit having an input terminal and an output terminal; a connection circuit adapted to connect the first terminal of one of the MEMS vibrators and the input terminal to each other, and the second terminal of the one of the MEMS vibrators and the output terminal to each other; a signal reception terminal adapted to receive a switching signal used to switch a state of the connection circuit; and a switching circuit adapted to make the connection circuit switch the MEMS vibrator to be connected to the amplifier circuit based on the switching signal, wherein the MEMS vibrators are housed in an inside of a cavity, and the signal reception terminal is disposed outside the cavity.
    • 振荡器包括:多个MEMS振子,每个具有第一端子和第二端子,并且具有彼此不同的谐振频率; 具有输入端子和输出端子的放大器电路; 连接电路,其适于将所述MEMS振动器中的一个的所述第一端子和所述输入端子彼此连接,并且所述MEMS振动器中的一个的所述第二端子和所述输出端子彼此连接; 信号接收端子,适于接收用于切换所述连接电路的状态的切换信号; 以及切换电路,其适于使所述连接电路基于所述切换信号切换要连接到所述放大器电路的所述MEMS振动器,其中所述MEMS振动器容纳在腔的内部,并且所述信号接收端设置在所述腔 。
    • 10. 发明授权
    • Oscillator circuit and electronic device having oscillator circuit
    • 振荡电路和具有振荡电路的电子器件
    • US07834710B2
    • 2010-11-16
    • US12204457
    • 2008-09-04
    • Aritsugu Yajima
    • Aritsugu Yajima
    • H03B5/30
    • H03B5/364
    • An oscillator circuit includes a first terminal, a second terminal, a resonator that is connected to the first terminal and the second terminal, a first capacitor that is connected to the first terminal and a ground line supplying the ground electric potential, a second capacitor that is connected to the second terminal and the ground line, m inverters, where m is an odd number equal to or larger than three, which are connected in series between the first terminal and the second terminal, and a third capacitor that is connected to an input terminal of the n-th (where n is an integer satisfying 1≦n
    • 振荡电路包括第一端子,第二端子,连接到第一端子和第二端子的谐振器,连接到第一端子的第一电容器和提供接地电位的地线;第二电容器, 连接到第二端子和地线,m个逆变器,其中m是串联在第一端子和第二端子之间的等于或大于三的奇数,以及连接到第一端子和第二端子的第三电容器 从逆变器阵列的输入侧和第(n + 1)个反相器的输出端计数第n个(其中n是满足1&nlE; n