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1. 发明授权

US11881416B2 Gas delivery system for a shared gas delivery architecture 有权
公开(公告)号：US11881416B2
公开(公告)日：2024-01-23
申请号：US17120976
申请日：2020-12-14
申请人： Applied Materials, Inc.
发明人： Arun Chakravarthy Chakravarthy , Chahal Neema , Abhijit A. Kangude , Elizabeth Neville , Vishal S. Jamakhandi , Kurt R. Langeland , Syed A. Alam , Ming Xu , Kenneth Le
IPC分类号： H01L21/67 , H01J37/32
CPC分类号： H01L21/67017 , H01J37/3244 , H01J37/32357 , H01J37/32899 , H01L21/67167 , H01J2237/006
摘要： Exemplary substrate processing systems may include a lid plate. The systems may include a gas splitter seated on the lid plate. The gas splitter may define a plurality of gas inlets and gas outlets. A number of gas outlets may be greater than a number of gas inlets. The systems may include a plurality of valve blocks that are interfaced with the gas splitter. Each valve block may define a number of gas lumens. An inlet of each of the gas lumens may be in fluid communication with one of the gas outlets. An interface between the gas splitter and each of the valve blocks may include a choke. The systems may include a plurality of output manifolds seated on the lid plate. The systems may include a plurality of output weldments that may couple an outlet of one of the gas lumens with one of the output manifolds.

2. 发明申请

US20190332129A1 Gas-Pulsing-Based Shared Precursor Distribution System and Methods of Use 审中-公开
公开(公告)号：US20190332129A1
公开(公告)日：2019-10-31
申请号：US16396684
申请日：2019-04-27
申请人： Applied Materials, Inc.
发明人： Michael Rice , Joseph AuBuchon , Sanjeev Baluja , Ashley M. Okada , Alexander Fernandez , Ming Xu , Marcel E. Josephson , Sushant Suresh Koshti , Kenneth Le , Kevin M. Brashear
IPC分类号： G05D7/06
摘要： Gas distribution apparatus to provide uniform flows of gases from a single source to multiple processing chambers are described. A regulator is positioned at an upstream end of a shared volume having a plurality of downstream ends. A flow controller is positioned at each downstream end of the shared volume, the flow controller comprising an orifice and a fast pulsing valve. Methods of using the gas distribution apparatus and calibrating the flow controllers are also described.

3. 发明授权

US11520358B2 Gas-pulsing-based shared precursor distribution system and methods of use 有权
公开(公告)号：US11520358B2
公开(公告)日：2022-12-06
申请号：US17521469
申请日：2021-11-08
申请人： Applied Materials, Inc.
发明人： Michael Rice , Joseph AuBuchon , Sanjeev Baluja , Ashley M. Okada , Alexander Fernandez , Ming Xu , Marcel E. Josephson , Sushant Suresh Koshti , Kenneth Le , Kevin M. Brashear
IPC分类号： G05D7/06 , G01F25/00 , G01F25/17
摘要： Gas distribution apparatus to provide uniform flows of gases from a single source to multiple processing chambers are described. A regulator is positioned at an upstream end of a shared volume having a plurality of downstream ends. A flow controller is positioned at each downstream end of the shared volume, the flow controller comprising an orifice and a fast pulsing valve. Methods of using the gas distribution apparatus and calibrating the flow controllers are also described.

4. 发明申请

US20210026380A1 PRESSURE REGULATED FLOW CONTROLLER 有权
公开(公告)号：US20210026380A1
公开(公告)日：2021-01-28
申请号：US16522614
申请日：2019-07-25
申请人： APPLIED MATERIALS, INC.
发明人： Ming Xu , Kenneth Le , Ashley M. Okada
IPC分类号： G05D7/06
摘要： Disclosed herein is an apparatus for controlling a flow rate of a gas including a flow restriction element configured to restrict a flow rate of a gas; a pressure regulator coupled to an inlet of the flow restriction element, wherein the pressure regulator is configured to control a pressure of the gas between the pressure regulator and the flow restriction element; a flow meter coupled to an outlet of the flow restriction element, wherein the flow meter is configured to measure the flow rate of the gas at an outlet of the flow restriction element; and a controller operatively coupled to the pressure regulator and the flow meter, wherein the controller is to receive a measurement of the flow rate by the flow meter, determine a pressure setting associated with a target flow rate, and cause the pressure regulator to have the pressure setting.

5. 发明授权

US10428807B2 Pump power consumption enhancement 有权
公开(公告)号：US10428807B2
公开(公告)日：2019-10-01
申请号：US13692552
申请日：2012-12-03
申请人： APPLIED MATERIALS, INC.
发明人： Mariusch Gregor , Kenneth Le
IPC分类号： F04B7/00 , F04B37/06 , F04B37/14 , F04B49/03 , F04B49/06
摘要： Methods and apparatus for reducing the power consumption of a pump are provided herein. In some embodiments, a pump power consumption reduction system for use in a substrate processing system may include a vacuum chamber having an exhaust port; a valve; a first pump having a pump inlet port coupled to the exhaust port via the valve and a pump exhaust port to couple the first pump to an exhaust handling system; and a second pump coupled to the pump exhaust port to selectively reduce an exhaust pressure of the first pump.

6. 发明公开

US20230314269A1 LEAK DETECTION FOR GAS STICKS 审中-公开
公开(公告)号：US20230314269A1
公开(公告)日：2023-10-05
申请号：US18190418
申请日：2023-03-27
申请人： Applied Materials, Inc.
发明人： Yen-Kun Wang , Alex J. Tom , Ming Xu , Ashley Okada , Kenneth Le
IPC分类号： G01M3/28 , H01L21/67
CPC分类号： G01M3/2815 , H01L21/67253
摘要： A method and system for monitoring and detecting a gas leak in a gas stick assembly is provided. The method includes measuring the pressure in the mass flow controller of the gas stick assembly at different time points and determining whether there is a difference in the pressure at the different time points that exceeds a difference threshold.

7. 发明申请

US20220189793A1 GAS DELIVERY SYSTEM FOR A SHARED GAS DELIVERY ARCHITECTURE 有权
公开(公告)号：US20220189793A1
公开(公告)日：2022-06-16
申请号：US17120976
申请日：2020-12-14
申请人： Applied Materials, Inc.
发明人： Arun Chakravarthy Chakravarthy , Chahal Neema , Abhijit A. Kangude , Elizabeth Neville , Vishal S. Jamakhandi , Kurt R. Langeland , Syed A. Alam , Ming Xu , Kenneth Le
IPC分类号： H01L21/67 , H01J37/32
摘要： Exemplary substrate processing systems may include a lid plate. The systems may include a gas splitter seated on the lid plate. The gas splitter may define a plurality of gas inlets and gas outlets. A number of gas outlets may be greater than a number of gas inlets. The systems may include a plurality of valve blocks that are interfaced with the gas splitter. Each valve block may define a number of gas lumens. An inlet of each of the gas lumens may be in fluid communication with one of the gas outlets. An interface between the gas splitter and each of the valve blocks may include a choke. The systems may include a plurality of output manifolds seated on the lid plate. The systems may include a plurality of output weldments that may couple an outlet of one of the gas lumens with one of the output manifolds.

8. 发明授权

US10921827B1 Pressure regulated flow controller 有权
公开(公告)号：US10921827B1
公开(公告)日：2021-02-16
申请号：US16522614
申请日：2019-07-25
申请人： APPLIED MATERIALS, INC.
发明人： Ming Xu , Kenneth Le , Ashley M. Okada
IPC分类号： G05D7/06
摘要： Disclosed herein is an apparatus for controlling a flow rate of a gas including a flow restriction element configured to restrict a flow rate of a gas; a pressure regulator coupled to an inlet of the flow restriction element, wherein the pressure regulator is configured to control a pressure of the gas between the pressure regulator and the flow restriction element; a flow meter coupled to an outlet of the flow restriction element, wherein the flow meter is configured to measure the flow rate of the gas at an outlet of the flow restriction element; and a controller operatively coupled to the pressure regulator and the flow meter, wherein the controller is to receive a measurement of the flow rate by the flow meter, determine a pressure setting associated with a target flow rate, and cause the pressure regulator to have the pressure setting.

9. 发明授权

US12031885B2 Leak detection for gas sticks 有权
公开(公告)号：US12031885B2
公开(公告)日：2024-07-09
申请号：US18190418
申请日：2023-03-27
申请人： Applied Materials, Inc.
发明人： Yen-Kun Wang , Alex J. Tom , Ming Xu , Ashley Okada , Kenneth Le
IPC分类号： G01M3/28 , H01L21/67
CPC分类号： G01M3/2815 , H01L21/67253
摘要： A method and system for monitoring and detecting a gas leak in a gas stick assembly is provided. The method includes measuring a pressure in a mass flow controller of the gas stick assembly at different time points and determining whether there is a difference in pressure at the different time points that exceeds a difference threshold.

10. 发明授权

US11835974B2 Pressure regulated flow controller 有权
公开(公告)号：US11835974B2
公开(公告)日：2023-12-05
申请号：US17175313
申请日：2021-02-12
申请人： APPLIED MATERIALS, INC.
发明人： Ming Xu , Kenneth Le , Ashley M. Okada
IPC分类号： G05D7/06
CPC分类号： G05D7/0635 , G05D7/0623
摘要： A manufacturing system includes a processing chamber, an gas supply, and a mass flow control apparatus coupled to the gas supply and the processing chamber. The mass flow control apparatus includes a flow restriction element configured to restrict a flow rate of a gas, a bypass flow element configured to control the flow rate of the gas in parallel to the flow restriction element, and a pressure regulator configured to control a pressure of the gas between the pressure regulator and the flow restriction element and/or a pressure of the gas between the pressure regulator and the flow restriction element. The manufacturing system further includes a controller that is configured to flow gas from the gas supply to the processing chamber via the mass flow control apparatus in view of a first pressure setting. The controller further determines to modify the flow of the gas from a first flow rate associated with the first pressure setting to a second flow rate. The controller further determines a second pressure setting associated with the second flow rate and causes the pressure regulator to modify the pressure of the gas between the pressure regulator and the flow restriction element and/or the pressure regulator and the bypass flow element in view of the second pressure setting.

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