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1. 发明授权

US11126172B2 Methods and systems for applying run-to-run control and virtual metrology to reduce equipment recovery time 有权
公开(公告)号：US11126172B2
公开(公告)日：2021-09-21
申请号：US16538689
申请日：2019-08-12
申请人： Applied Materials, Inc.
发明人： Jimmy Iskandar , Jianping Zou , Parris C. M. Hawkins , James Moyne
IPC分类号： G05B23/02
摘要： Described herein are methods, apparatuses, and systems for reducing equipment repair time. In one embodiment, a computer implemented method includes collecting test substrate data or other metrology data and fault detection data for maintenance recovery of at least one manufacturing tool in a manufacturing facility and determining a relationship between tool parameter settings for the manufacturing tool and the test substrate data. The method further includes utilizing virtual metrology predictive algorithms and at least some collected data to obtain a metrology prediction and applying multivariate run-to-run (R2R) control modeling to obtain a state estimation including a current operating region of the at least one manufacturing tool. Applying multivariate run-to-run (R2R) control modeling to obtain tool parameter adjustments for at least one manufacturing tool to reduce maintenance recovery time and to reduce requalification time.

2. 发明授权

US11054815B2 Apparatus for cost-effective conversion of unsupervised fault detection (FD) system to supervised FD system 有权
公开(公告)号：US11054815B2
公开(公告)日：2021-07-06
申请号：US15457016
申请日：2017-03-13
申请人： Applied Materials, Inc.
发明人： Bradley D. Schulze , Suketu Arun Parikh , Jimmy Iskandar , Jigar Bhadriklal Patel
IPC分类号： G05B23/02
摘要： Techniques are provided for classifying runs of a recipe within a manufacturing environment. Embodiments monitor a plurality of runs of a recipe to collect runtime data from a plurality of sensors within a manufacturing environment. Qualitative data describing each semiconductor devices produced by the plurality of runs is determined. Embodiments characterize each run into a respective group, based on an analysis of the qualitative data, and generate a data model based on the collected runtime data. A multivariate analysis of additional runtime data collected during at least one subsequent run of the recipe is performed to classify the at least one subsequent run into a first group. Upon classifying the at least one subsequent run, embodiments output for display an interface depicting a ranking sensor types based on the additional runtime data and the description of relative importance of each sensor type for the first group within the data model.

3. 发明申请

US20140114611A1 PORTABLE, ADAPTABLE EQUIPMENT HEALTH USER INTERFACE 审中-公开
标题翻译：便携式，适应性设备健康用户界面
公开(公告)号：US20140114611A1
公开(公告)日：2014-04-24
申请号：US14061725
申请日：2013-10-23
申请人： Applied Materials, Inc.
发明人： James R. Moyne , Jimmy Iskandar , Bradley D. Schulze
IPC分类号： G01M99/00
CPC分类号： G05B23/0272 , G05B19/4184 , G05B23/024 , Y02P90/14
摘要： Described herein are methods and systems for providing a user interface to indicate health of a tool in a manufacturing facility. A method may include receiving, via a user interface, user selection of fault detection data pertaining to a tool in a manufacturing facility, obtaining health abnormality indicators of the tool using the fault detection data, and presenting the health abnormality indicators of the tool in the user interface.
摘要翻译：这里描述了用于提供用户界面以指示制造设施中的工具的健康的方法和系统。一种方法可以包括：经由用户界面接收用户选择与制造设备中的工具相关的故障检测数据，使用故障检测数据获取所述工具的健康异常指示，以及将所述工具的健康异常指示符呈现在用户界面。

4. 发明申请

US20210116898A1 MATCHING PROCESS CONTROLLERS FOR IMPROVED MATCHING OF PROCESS 有权
公开(公告)号：US20210116898A1
公开(公告)日：2021-04-22
申请号：US17137679
申请日：2020-12-30
申请人： Applied Materials, Inc.
发明人： James Robert Moyne , Jimmy Iskandar
IPC分类号： G05B19/418 , G05B13/04 , G03F7/20 , F27B17/00 , H05K3/00 , H01L21/67 , H01L21/66
摘要： A method includes identifying first parameters of a first processing chamber of a semiconductor fabrication facility. The first parameters include first input parameters and first output parameters. The method further includes identifying second parameters of a second processing chamber of the semiconductor fabrication facility. The second parameters include second input parameters and second output parameters. The method further includes generating, by a processing device based on the first parameters and the second parameters, composite parameters comprising composite input parameters and composite output parameters. Semiconductor fabrication is based on the composite parameters.

5. 发明申请

US20210042570A1 AUTOMATIC AND ADAPTIVE FAULT DETECTION AND CLASSIFICATION LIMITS 有权
公开(公告)号：US20210042570A1
公开(公告)日：2021-02-11
申请号：US16534828
申请日：2019-08-07
申请人： Applied Materials, Inc.
发明人： Jimmy Iskandar , James Robert Moyne
IPC分类号： G06K9/62 , G05B23/02 , G06N20/00 , G06F11/30 , G06F11/34
摘要： A method includes receiving, from sensors, current trace data including current sensor values associated with producing products. The method further includes processing the current trace data to identify features of the current trace data and providing the features of the current trace data as input to a trained machine learning model that uses a hyperplane limit for product classification. The method further includes obtaining, from the trained machine learning model, outputs indicative of predictive data associated with the hyperplane limit and processing the predictive data and the hyperplane limit to determine: first products associated with a first product classification and second products associated with a second product classification based exclusively on the subset of the plurality of features; and third products associated with the first product classification or the second product classification based on an additional feature not within the subset.

6. 发明授权

US10303812B2 Topography prediction using system state information 有权
公开(公告)号：US10303812B2
公开(公告)日：2019-05-28
申请号：US15231487
申请日：2016-08-08
申请人： Applied Materials, Inc.
发明人： Jimmy Iskandar , Chong Jiang , Michael D. Armacost , Bradley D. Schulze
IPC分类号： G06F17/50 , H01L21/66 , G01R31/28
摘要： Embodiments presented herein provide techniques for predicting the topography of a product produced from a manufacturing process. One embodiment includes generating a plurality of prediction models. Each of the plurality of prediction models corresponds to a respective one of a plurality of positional coordinates of a product produced from a manufacturing process. The method also includes receiving a set of user-specified input parameters to apply to the manufacturing control process. The method further includes generating a graphical representation of a topography map for the product for the user-specified of input parameters based on the plurality of prediction models.

7. 发明申请

US20220019863A1 ANOMALY DETECTION FROM AGGREGATE STATISTICS USING NEURAL NETWORKS 有权
公开(公告)号：US20220019863A1
公开(公告)日：2022-01-20
申请号：US16947052
申请日：2020-07-16
申请人： Applied Materials, Inc.
发明人： Jimmy Iskandar , Michael D. Armacost
IPC分类号： G06K9/62 , G06N3/04
摘要： Implementations disclosed describe a method and a system to perform the method of obtaining a reduced representation of a plurality of sensor statistics representative of data collected by a plurality of sensors associated with a device manufacturing system performing a manufacturing operation. The method further includes generating, using a plurality of outlier detection models, a plurality of outlier scores, each of the plurality of outlier scores generated based on the reduced representation of the plurality of sensor statistics using a respective one of the plurality of outlier detection models. The method further includes processing the plurality of outlier scores using a detector neural network to generate an anomaly score indicative of a likelihood of an anomaly associated with the manufacturing operation.

8. 发明授权

US10884400B2 Matching process controllers for improved matching of process 有权
公开(公告)号：US10884400B2
公开(公告)日：2021-01-05
申请号：US15444647
申请日：2017-02-28
申请人： Applied Materials, Inc.
发明人： James Robert Moyne , Jimmy Iskandar
IPC分类号： H05K3/00 , H01L21/67 , G05B19/418 , G05B13/04 , H01L21/66 , G03F7/20 , F27B17/00 , C23C16/00
摘要： Described herein are methods and systems for chamber matching in a manufacturing facility. A method may include receiving a first chamber recipe advice for a first chamber and a second chamber recipe advice for a second chamber. The chamber recipe advices describe a set of tunable inputs and a set of outputs for a process. The method may further include adjusting at least one of the set of first chamber input parameters or the set of second chamber input parameters and at least one of the set of first chamber output parameters or the set of second chamber output parameters to substantially match the first and second chamber recipe advices.

9. 发明授权

US10042357B2 Portable, adaptable equipment health user interface 有权
公开(公告)号：US10042357B2
公开(公告)日：2018-08-07
申请号：US14061725
申请日：2013-10-23
申请人： Applied Materials, Inc.
发明人： James R. Moyne , Jimmy Iskandar , Bradley D. Schulze
IPC分类号： G06F11/30 , G21C17/00 , G05B23/02 , G05B19/418
摘要： Described herein are methods and systems for providing a user interface to indicate health of a tool in a manufacturing facility. A method may include receiving, via a user interface, user selection of fault detection data pertaining to a tool in a manufacturing facility, obtaining health abnormality indicators of the tool using the fault detection data, and presenting the health abnormality indicators of the tool in the user interface.

10. 发明申请

US20160342147A1 METHODS AND SYSTEMS FOR APPLYING RUN-TO-RUN CONTROL AND VIRTUAL METROLOGY TO REDUCE EQUIPMENT RECOVERY TIME 审中-公开
标题翻译：用于运行运行控制和虚拟计量的方法和系统，以减少设备恢复时间
公开(公告)号：US20160342147A1
公开(公告)日：2016-11-24
申请号：US14716838
申请日：2015-05-19
申请人： Applied Materials, Inc.
发明人： Jimmy Iskandar , Jianping Zou , Parris C.M. Hawkins , James Moyne
IPC分类号： G05B19/402 , G05B19/404
CPC分类号： G05B23/0294 , G05B23/024
摘要： Described herein are methods, apparatuses, and systems for reducing equipment repair time. In one embodiment, a computer implemented method includes collecting, with a system, data including test substrate data or other metrology data and fault detection data for maintenance recovery of at least one manufacturing tool in a manufacturing facility and determining, with the system, a relationship between tool parameter settings for the at least one manufacturing tool and at least some collected data including the test substrate data. The method further includes utilizing zero or more virtual metrology predictive algorithms and at least some collected data to obtain a metrology prediction and applying multivariate run-to-run (R2R) control modeling to obtain a state estimation including a current operating region of the at least one manufacturing tool based on the test substrate data and obtain at least one tool parameter adjustment for at least one target parameter for the at least one manufacturing tool. Applying multivariate run-to-run (R2R) control modeling to obtain tool parameter adjustments for at least one manufacturing tool occurs after maintenance to reduce maintenance recovery time and to reduce requalification time.
摘要翻译：这里描述了用于减少设备维修时间的方法，装置和系统。在一个实施例中，计算机实现的方法包括与系统一起收集包括测试基板数据或其他测量数据和故障检测数据的数据，用于在制造设备中维护至少一个制造工具的恢复，并且与系统确定关系在至少一个制造工具的工具参数设置和包括测试衬底数据的至少一些收集的数据之间。该方法还包括利用零个或多个虚拟测量预测算法和至少一些收集的数据来获得度量预测和应用多变量运行（R2R）控制建模，以获得包括至少至少的当前操作区域的状态估计一个基于测试基板数据的制造工具，并为至少一个制造工具的至少一个目标参数获得至少一个刀具参数调整。应用多变量运行（R2R）控制建模以获得至少一个制造工具的工具参数调整，在维护后发生，以减少维护恢复时间并减少重新定标时间。

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