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    • 1. 发明授权
    • Method for dry cleaning clean room containers
    • 洁净室容器干洗方法
    • US5846338A
    • 1998-12-08
    • US584374
    • 1996-01-11
    • Anthony C. BonoraN. KedarnathJoshua T. Oen
    • Anthony C. BonoraN. KedarnathJoshua T. Oen
    • B08B9/093B24C1/00B24C3/32C11D7/02C11D11/00C11D17/00H01L21/00B08B3/00
    • H01L21/67028B08B9/093B24C1/003B24C3/325C11D11/0047C11D17/0043C11D7/02
    • A method and apparatus for dry cleaning a semiconductor wafer storage and transport pod. After the pod is located with respect to the cleaning chamber and opened to expose the interior surfaces of the pod to the cleaning chamber, the pod is conditioned in preparation for the cleaning process. The conditioning of the pod includes purging the pod and cleaning chamber with an ionized nitrogen gas to rid the pod and cleaning chamber of airborne contaminants and to neutralize static electrical charges on the pod surfaces. The conditioning process further includes heating the pod surfaces to prevent condensation of moisture and organic contaminants thereon. After the conditioning process, the pod is cleaned with a dry aerosol sprayed onto the pod surfaces. The aerosol spray is comprised of an ionized carbon dioxide/nitrogen (CO.sub.2 /N.sub.2) gas and fine particles of CO.sub.2. The dry cleaning apparatus further includes a circulation subsystem for circulating a fluid through the pod and cleaning chamber to remove airborne particulate, such as those dislodged from the pod surfaces by the CO.sub.2 /N.sub.2 aerosol spray. A filter provided within the path of the circulating fluid removes particulates from the circulating fluid.
    • 一种用于干燥半导体晶片存储和运输盒的方法和装置。 在容器相对于清洁室定位并打开以将容器的内表面暴露于清洁室之后,调节容器以准备清洁过程。 荚的调理包括用离子化氮气吹扫荚果和清洁室,以使荚果和清洁室中的空气污染物排出并中和荚果表面上的静电。 调理过程还包括加热荚表面以防止其上的水分和有机污染物的冷凝。 在调理过程之后,将荚用干燥的气雾剂喷洒到荚果表面上。 气溶胶喷雾由电离二氧化碳/氮(CO2 / N2)气体和二氧化碳细颗粒组成。 干洗设备还包括一个循环子系统,用于使流体通过荚和清洁室循环,以除去空气中的颗粒,例如通过CO 2 / N 2气溶胶喷雾从荚果表面移出的颗粒。 设置在循环流体的路径内的过滤器从循环流体中除去微粒。
    • 2. 发明授权
    • High efficiency low power air manifold for cleaner subsystems
    • 高效低功率空气歧管,用于清洁子系统
    • US5321484A
    • 1994-06-14
    • US68335
    • 1993-05-28
    • N. KedarnathSamuel P. Mordenga
    • N. KedarnathSamuel P. Mordenga
    • G03G21/10G03G21/00
    • G03G21/0035G03G2221/0005
    • A detoning cleaner subsystem for a xerographic machine includes a housing having a longitudinal opening extending on one side thereof and a longitudinally extending rotating brush located therein which cleans toner particles from a moving photoreceptor surface moving past the opening. A longitudinally extending air manifold is located within the housing substantially adjacent the longitudinal opening, near one of first and second air gaps located between the photoreceptor surface and the manifold. The air manifold defines an air channel extending longitudinally substantially the length of the brush. The air channel is in communication with the longitudinal opening. A vacuum source in communication with the air channel provides a longitudinal air flow therethrough for maintaining the dispersed particles aloft and removing the particles. A flicker bar is preferably located between the brush and the air manifold to remove toner accumulation from the brush.
    • 用于静电复印机的分离清洁器子系统包括具有在其一侧延伸的纵向开口的壳体和位于其中的纵向延伸的旋转刷,其从移动通过开口的移动感光体表面清洁调色剂颗粒。 纵向延伸的空气歧管位于壳体内,基本上邻近纵向开口,位于感光体表面和歧管之间的第一和第二气隙中的一个附近。 空气歧管限定了基本上沿刷子长度延伸的空气通道。 空气通道与纵向开口连通。 与空气通道连通的真空源提供穿过其中的纵向气流,用于将分散的颗粒保持在高度上并除去颗粒。 闪烁杆优选地位于刷子和空气歧管之间,以从刷子上去除调色剂积聚。