专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US5169272A Method and apparatus for transferring articles between two controlled environments 失效
标题翻译：用于在两个控制环境之间传送文章的方法和装置
公开(公告)号：US5169272A
公开(公告)日：1992-12-08
申请号：US607898
申请日：1990-11-01
申请人： Anthony C. Bonora , Gilles Guerre , Mihir Parikh , Frederick T. Rosenquist , Sudhir Jain
发明人： Anthony C. Bonora , Gilles Guerre , Mihir Parikh , Frederick T. Rosenquist , Sudhir Jain
IPC分类号： B65G49/07 , G03F7/20 , H01L21/677
CPC分类号： H01L21/67757 , G03F7/7075 , H01L21/67772 , Y10S414/14
摘要： A method and apparatus for transferring articles from a transportable container, for example, a SMIF pod, to a second container, for example, a processing station having a port which provides access to the interior region of the processing station. A non-contact seal or an isolation cover or skirt seals the port so that the interior region of the container can be purged of contaminants prior to exposing the interior environment of the processing station to the environment within the container. The purging of the container may be a multi-step process in which the container door is moved between several intermediate positions so that the container door iself is purged prior to the purging of the environment within the container.
摘要翻译：用于将物品从可运输的容器例如SMIF盒传送到第二容器的方法和装置，例如具有提供进入处理站的内部区域的端口的处理站。非接触式密封件或隔离盖或裙部密封端口，使得在将处理站的内部环境暴露于容器内的环境之前，容器的内部区域可以被清除污染物。容器的吹扫可以是多步骤过程，其中容器门在几个中间位置之间移动，使得容器门在清洁容器内的环境之前被清除。

2. 发明授权

US5740845A Sealable, transportable container having a breather assembly 失效
标题翻译：具有通气组件的可密封的可移动容器
公开(公告)号：US5740845A
公开(公告)日：1998-04-21
申请号：US499588
申请日：1995-07-07
申请人： Anthony C. Bonora , Frederick T. Rosenquist , Sudhir Jain , Mark R. Davis
发明人： Anthony C. Bonora , Frederick T. Rosenquist , Sudhir Jain , Mark R. Davis
IPC分类号： B65D6/40 , H01L21/673 , B65D85/30
CPC分类号： H01L21/67373 , H01L21/67393 , Y10S414/14
摘要： A transportable, sealable container, for example a SMIF pod, including a box and box door. The box has a first sealing surface and the box door has a second sealing surface. The two sealing surfaces form a seal when the box door is moved in a sealing position with respect to the box. A latch mechanism is provided in the box door for holding the box door in the sealing position. The container further includes a breather assembly having an aperture, with a filter, that allows gas to flow between the interior of the container and an environment external to the container. A valve, which is actuated by the latch, opens and closes the aperture. When the latch unlocks the box door, the valve opens the aperture. When the door is locked, the valve closes the aperture.
摘要翻译：可运输，可密封的容器，例如SMIF荚，包括箱和箱门。该箱具有第一密封表面，并且箱门具有第二密封表面。当箱门相对于盒子处于密封位置时，两个密封表面形成密封。在箱门中设有一个闩锁机构，用于将箱门保持在密封位置。容器还包括具有孔的通气组件，其具有过滤器，其允许气体在容器的内部和容器外部的环境之间流动。由闩锁致动的阀打开和关闭孔。当闩锁解锁箱门时，阀打开孔。当门被锁定时，阀关闭光圈。

3. 发明授权

US5469963A Sealable transportable container having improved liner 失效
标题翻译：具有改进衬管的可密封可运输容器
公开(公告)号：US5469963A
公开(公告)日：1995-11-28
申请号：US865297
申请日：1992-04-08
申请人： Anthony C. Bonora , Frederick T. Rosenquist , Sudhir Jain , Mark R. Davis
发明人： Anthony C. Bonora , Frederick T. Rosenquist , Sudhir Jain , Mark R. Davis
IPC分类号： B65D85/00 , B65D85/86 , G03F7/20 , H01L21/673 , H01L21/677 , B65D85/30
CPC分类号： H01L21/67376 , G03F1/66 , G03F7/70741 , G03F7/7075 , H01L21/67396 , Y10S414/135 , Y10S414/14
摘要： A transportable, sealable container, which has an improved pod liner. The container includes a box, a box door, and a gasket which forms a seal between the box and the box door. The box door has a conductive liner and a conductive path from the conductive liner to ground potential for electrostatic discharge protection. A membrane for isolating the gasket from the interior region of the container is bonded to the gasket and the conductive liner. The membrane may be impervious to gasses to prevent outgassing of the gasket or impervious to particles but not gasses to prevent particulate matter generated by the gasket from entering the interior region of the container.
摘要翻译：可运输，可密封的容器，其具有改进的荚式衬垫。容器包括一个盒子，一个盒子门和一个形成盒子和盒子门之间的密封件的衬垫。箱门具有导电衬垫和从导电衬套到接地电位的静电放电保护的导电路径。用于将垫圈与容器的内部区域隔离的膜结合到垫圈和导电衬里。膜可能不渗透气体，以防止垫圈脱气或不渗透颗粒而不是气体，以防止垫圈产生的颗粒物质进入容器的内部区域。

4. 发明授权

US4995430A Sealable transportable container having improved latch mechanism 失效
标题翻译：具有改进的闩锁机构的可密封可运输容器
公开(公告)号：US4995430A
公开(公告)日：1991-02-26
申请号：US354027
申请日：1989-05-19
申请人： Anthony C. Bonora , Frederick T. Rosenquist
发明人： Anthony C. Bonora , Frederick T. Rosenquist
IPC分类号： H01L21/677 , B65G49/07 , H01L21/673
CPC分类号： H01L21/67373 , Y10S414/14
摘要： A transportable, sealable container, for example a SMIF pod, has a box and a box door. The box has a first sealing surface and the box door has a second sealing surface which forms a seal with the first sealing surface when the box door is moved in a sealing direction with respect to the box. A latch mechanism provided in the box door is operable in two stages. The first stage of operation moves latch members from a retracted position to an extended position, in the retracted position the latch members are contained in the box door to allow movement of the box door with respect to the box, and in the extended position the latch members are adjacent to latch surfaces of the box. Movement from the retracted to the extended position is performed without contact between the latch members and the latch surfaces to avoid any scraping or rubbing action which would create particles in the "clean" interior region of the box. The second stage of operation engages latch members with the latch surfaces to move the box door in the sealing direction; this second stage of the operation is also performed without scraping or rubbing of the latch members and the latch surfaces.
摘要翻译：可移动，可密封的容器，例如SMIF荚，具有一个盒子和一个盒子门。盒子具有第一密封表面，并且盒门具有第二密封表面，当盒门相对于盒子的密封方向移动时，第二密封表面与第一密封表面形成密封。设置在盒门中的闩锁机构可分两个阶段操作。第一操作阶段将闩锁构件从缩回位置移动到延伸位置，在缩回位置，闩锁构件容纳在箱门中，以允许箱门相对于箱体移动，并且在延伸位置，闩锁构件与盒的闩锁表面相邻。从缩回到延伸位置的运动在闩锁构件和闩锁表面之间没有接触的情况下进行，以避免任何刮擦或摩擦作用，这会在盒子的“清洁”内部区域中产生颗粒。第二阶段的操作使闩锁构件与闩锁表面接合以沿着密封方向移动箱门; 该操作的第二阶段也在不刮擦或摩擦闩锁构件和闩锁表面的情况下进行。

5. 发明授权

US06188323B1 Wafer mapping system 有权
标题翻译：晶圆贴图系统
公开(公告)号：US06188323B1
公开(公告)日：2001-02-13
申请号：US09173710
申请日：1998-10-15
申请人： Frederick T. Rosenquist , Bruce Richardson , William J. Fosnight , Anthony C. Bonora
发明人： Frederick T. Rosenquist , Bruce Richardson , William J. Fosnight , Anthony C. Bonora
IPC分类号： G08B2100
CPC分类号： H01L21/67265
摘要： A wafer mapping system is disclosed mounted to the port door of a process tool. As the port door is lowered away from the access port of the process tool in order to allow wafer transfer through the port, the wafer mapping system according to the present invention detects the presence and position of the various wafers in the pod shell, which information may then be stored in memory for later use. As such, wafer mapping according to this system occurs without additional processing steps or time. The port door is lowered by a servo drive which allows the precise position of the port door to be identified at any given time. As such, the position of a wafer within the pod shell may be precisely identified by the wafer mapping system mounted on the port door as the door is lowered.
摘要翻译：公开了一种安装到处理工具的端口门的晶片映射系统。当端口门从工艺工具的进入口下降，以允许晶片通过端口传送时，根据本发明的晶片映射系统检测在荚壳中各种晶片的存在和位置，哪些信息然后可以存储在存储器中供以后使用。因此，根据该系统的晶片映射没有附加的处理步骤或时间。端口门通过伺服驱动器下降，允许在任何给定时间识别端口门的精确位置。因此，当门降低时，可以通过安装在端口门上的晶片映射系统精确地识别晶片在荚壳内的位置。

6. 发明授权

US06530736B2 SMIF load port interface including smart port door 有权
标题翻译： SMIF负载端口接口包括智能端口门
公开(公告)号：US06530736B2
公开(公告)日：2003-03-11
申请号：US09905339
申请日：2001-07-13
申请人： Frederick T. Rosenquist
发明人： Frederick T. Rosenquist
IPC分类号： B65G4907
CPC分类号： H01L21/67259 , H01L21/67772 , H01L21/67775 , Y10S414/14
摘要： A SMIF load port assembly is disclosed including a port door position compensation assembly capable of dynamically adjusting a relative spacing between a front surface of a port door and a front surface of a pod door loaded onto the load port assembly so as to compensate for any improper positioning of the front surface of the pod. The position compensation assembly includes a plunger translationally mounted in the port door, and a sensor for detecting a position of the plunger. As a pod is loaded onto the load port assembly is advanced toward the port door, the front surface of the pod door contacts the plunger at which point the position compensation assembly in combination with an overall controller can identify the exact position of the pod door. From this identification, the position of the port and/or pod doors may be adjusted to compensate for any improper positioning of the front surface of the pod door on the load port assembly.
摘要翻译：公开了一种SMIF装载端口组件，其包括端口门位置补偿组件，其能够动态地调节端口门的前表面和装载到装载端口组件上的荚门的前表面之间的相对间隔，以补偿任何不正当的荚的前表面的定位。位置补偿组件包括平移地安装在端口门中的柱塞和用于检测柱塞的位置的传感器。当将荚装载到装载端口组件上朝向端口门前进时，荚门的前表面接触柱塞，此时位置补偿组件与整体控制器结合可以识别荚门的确切位置。根据该识别，可以调整端口和/或荚门的位置以补偿荚门的前表面在装载端口组件上的任何不正确的定位。

7. 发明授权

US06419438B1 FIMS interface without alignment pins 有权
标题翻译： FIMS接口没有对准引脚
公开(公告)号：US06419438B1
公开(公告)日：2002-07-16
申请号：US09723629
申请日：2000-11-28
申请人： Frederick T. Rosenquist
发明人： Frederick T. Rosenquist
IPC分类号： B65G4907
CPC分类号： H01L21/67775 , Y10S414/139
摘要： A front opening interface mechanical standard, or “FIMS”, system is disclosed for ensuring proper registration of a pod door against a port door on a load port assembly without the use of guide pins on the port door. In a preferred embodiment, the load port assembly includes kinematic pins provided to mate within slots on the bottom of a FOUP to provide a fixed and repeatable position of the FOUP on the load port assembly. The load port assembly further includes a pair of latch keys protruding outwardly from the outer surface of the port door for mating within slots of a door latch assembly within the pod door. The load port assembly may further include vacuum seals on the port door, or magnetic assemblies, to further facilitate support of the pod door on the port door. In one embodiment, with the above constraints, the load port assembly may initially include removable alignment pins. The alignment pins operate in conjunction with a calibration fixture to set the respective and collective heights of the kinematic pins on the load port assembly. Once the kinematic pins are adjusted so that the vertical plate is parallel to the port door and the openings in the vertical plate mate cleanly over the removable alignment pins, the calibration fixture may be removed and the alignment pins may be removed from or retracted back into the port door. Thereafter, a FOUP may be placed on the pod advance plate and advanced to the port door.
摘要翻译：公开了一种前开口接口机械标准或“FIMS”系统，用于确保荚门对装载端口组件上的端口门的正确对准，而不使用端口门上的引导销。在优选实施例中，装载端口组件包括设置成配合在FOUP底部的狭槽内的运动销，以在装载口组件上提供FOUP的固定且可重复的位置。装载端口组件还包括从端口门的外表面向外突出的一对闩锁键，用于在荚门内的门闩组件的槽内配合。负载端口组件还可包括端口门上的真空密封件或磁性组件，以进一步便于端口门上的荚门的支撑。在一个实施例中，通过上述限制，负载端口组件可以最初包括可移除的对准销。校准销与校准夹具一起工作，以设置负载端口组件上的运动销的相应和集体高度。一旦调整了运动销，使得垂直板平行于端口门，并且垂直板中的开口在可移除的对准销钉上清洁地配合，则校准夹具可以被移除，并且对准销可以被移除或缩回港口门。此后，可以将FOUP放置在舱前进板上并前进到门口。

8. 发明授权

US06502869B1 Pod door to port door retention system 失效
标题翻译：门口门口保持系统
公开(公告)号：US06502869B1
公开(公告)日：2003-01-07
申请号：US09115414
申请日：1998-07-14
申请人： Frederick T. Rosenquist , Michael Ng
发明人： Frederick T. Rosenquist , Michael Ng
IPC分类号： E05C502
CPC分类号： H01L21/687 , E05C3/00 , Y10T292/0863 , Y10T292/0866 , Y10T292/1083
摘要： A system is disclosed for ensuring that the pod door is firmly and securely retained on the port door of a process tool as the pod door is removed from the pod and stowed in the process tool during workpiece transfer between the pod and process tool. The system includes a latch key protruding outwardly from the outer surface of the port door. The latch key is provided to mate within a slot of a door latch assembly within the pod door. Once the latch key is properly seated within the slot, the latch key is rotated by mechanisms within the port door to decouple the pod door from the pod shell. Such rotation at the same time couples the pod door to the port door. According to the present invention, while the latch key rotates, it simultaneously moves in the rearward direction (i.e., back toward the port door) to thereby pull the pod door into a tight engagement with the port door.
摘要翻译：公开了一种系统，用于确保荚门牢固且牢固地保持在处理工具的端口门上，因为在荚和处理工具之间的工件传送过程中，将荚门从荚果中取出并收存在处理工具中。该系统包括从端口门的外表面向外突出的闩锁键。提供闩锁键以配合在荚门内的门闩组件的狭槽内。一旦闩锁键正确地安置在插槽内，则闩锁键通过端口门内的机构旋转，以将荚门与荚壳分离。同时这种旋转将荚门连接到门口。根据本发明，当闩锁旋转时，它同时沿向后方向移动（即朝向端口门），从而将荚门拉入与门口的紧密接合。

9. 发明授权

US6082949A Load port opener 失效
标题翻译：装载开启装置
公开(公告)号：US6082949A
公开(公告)日：2000-07-04
申请号：US730643
申请日：1996-10-11
申请人： Frederick T. Rosenquist
发明人： Frederick T. Rosenquist
IPC分类号： B65G49/07 , H01L21/677
CPC分类号： H01L21/67772 , Y10S414/14
摘要： A load port opener for separating a pod top from a pod door so that a wafer-carrying cassette may be accessed and/or transferred from the pod into a semiconductor processing station, to which the load port opener is attached. The load port opener comprises a base, an inner support plate seated on the base, an outer support plate surrounding the inner support plate, and mechanisms for raising the outer support plate away from the inner support plate. Initially, a sealed SMIF pod having a wafer-carrying cassette therein is located on top of the load port opener, such that the pod door is supported on the inner support plate, and the pod top is supported on the outer support plate. Once located on the load port opener, the pod top is decoupled from the pod door by mechanisms within the inner support plate, and thereafter the outer support plate is raised upward with the top supported thereon. The cassette remains stationary on the inner support plate, and once the top has been sufficiently raised, a pick and place robot from within the processing station may transfer wafers and/or the cassette between the load port opener and the processing station.
摘要翻译：一种用于将荚果顶部与荚果门分开的装载开口器，使得晶片携带盒可以从荚进入和/或传送到加载开口器附接到的半导体处理站。装载开口装置包括基座，位于基座上的内支撑板，围绕内支撑板的外支撑板，以及用于将外支撑板抬离内支撑板的机构。最初，其中具有晶片携带盒的密封SMIF盒位于装载口开启器的顶部，使得荚门被支撑在内支撑板上，并且荚顶被支撑在外支撑板上。一旦位于装载口开启器上，通过内支撑板内的机构，荚顶部与荚门脱开，此后，外支撑板向上升起，顶部被支撑在其上。盒子保持固定在内支撑板上，并且一旦顶部已经被充分地升高，来自处理站内的拾取和放置机器人可以在装载开启装置和加工站之间转移晶片和/或盒。

10. 发明授权

US06430877B1 Pod door alignment device 失效
标题翻译：荚门对准装置
公开(公告)号：US06430877B1
公开(公告)日：2002-08-13
申请号：US09114711
申请日：1998-07-13
申请人： Frederick T. Rosenquist , Perry A. Peterson
发明人： Frederick T. Rosenquist , Perry A. Peterson
IPC分类号： E05C900
CPC分类号： E05C9/042 , E05B15/0006 , E05B17/0025 , E05B63/143 , E05C9/041 , E05C9/045 , E05F7/005
摘要： A system is disclosed for ensuring a properly aligned position of a pod door within the opening in a pod shell upon location of the pod at a tool load port. The door positioning assembly according to the present invention includes a cam affixed to rotating latch hubs of a pod door latching assembly, and a cam follower mounted around each of the cams, which followers include arm portions that extend out toward an edge of the pod door. When the pod door and shell are separated, the arm portions are held in a retracted position completely contained within the footprint of the pod door. However, upon rejoining the pod door to the pod shell, mechanisms in the port door rotate the latch hub cams. Cam rotation causes translation of the arm portions of the cam followers so that the ends of the arm portions extend out beyond an edge of the pod door and against a surface of the pod shell. In their extended positions, the arm portions maintain a desired vertical positioning of the pod door within the pod shell opening. Moreover, as the arm portions remain in their extended positions after the pod door is coupled to the pod, the positioning assemblies prevent the door from sagging downward in the pod shell opening as a result of its own weight or as a result of a shock or jolt to the pod.
摘要翻译：公开了一种系统，用于在荚在工具装载端口的位置处确保荚果门在荚壳中的开口内的适当对准的位置。根据本发明的门定位组件包括固定到荚式门闩锁组件的旋转闩锁毂的凸轮和安装在每个凸轮周围的凸轮随动件，该从动件包括朝向荚门的边缘延伸的臂部分。当荚门和壳分离时，臂部分被保持在完全包含在荚门的占地面积内的缩回位置。然而，在将荚门重新连接到荚壳时，端口门中的机构旋转闩锁轮毂凸轮。凸轮旋转导致凸轮从动件的臂部分的平移，使得臂部分的端部延伸超出荚门的边缘并抵靠荚壳的表面。在其延伸的位置，臂部分保持荚门在荚壳外壳开口内的期望的垂直定位。此外，由于在荚门连接到荚之后臂部分保持在其延伸位置，所以定位组件由于其自身重量或由于震动而阻止门在荚壳开口中向下流动摇摇晃晃的荚。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式